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US 7,621,036 B2Granted
Method of manufacturing implantable wireless sensor for in vivo pressure measurement
AssigneeCardioMEMS, Inc.
InventorsFlorent Cros, David O'Brien, Michael Fonseca, Matthew Abercrombie, Jin Woo Park, Angad Singh
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Abstract
A method of manufacturing a sensor for in vivo applications includes the steps of providing two wafers of an electrically insulating material. A recess is formed in the first wafer, and a capacitor plate is formed in the recess of the first wafer. A second capacitor plate is formed in a corresponding region of the second wafer, and the two wafers are affixed to one another such that the first and second capacitor plates are arranged in parallel, spaced-apart relation.
Claims22
A method of manufacturing a sensor for in vivo applications, comprising the steps of:
- providing first and second wafers of an electrically insulating material;
- forming a recess in said first wafer;
- forming a first capacitor plate in said recess of said first wafer;
- forming a second capacitor plate in a corresponding region of said second wafer;
- mutually imposing said first and second wafers such that said first and second capacitor plates are arranged in parallel, spaced-apart relation;
- and
- affixing said first and second wafers to one another in said mutually imposed position by laser-cutting said mutually imposed wafers to reduce the sensor to its final size and to hermetically fuse the two wafers together.
4 more elements
Dependencies are inferred from the claim text.