Method and apparatus for impasse detection and resolution
AssigneeAdvanced Micro Devices, Inc.
InventorsSusan Hickey, Edward C. Stewart, Jason A. Grover, Cabe W. Nicksic
Life of this patent
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Abstract
A method, apparatus and a system, for provided for performing an automated process flow adjustment. A semiconductor wafer is processed based upon a routing plan and a predetermined schedule. A fault detection relating to the processing of the semiconductor wafer is performed. Dynamically modifying the predetermined routing plan or the predetermined schedule based upon the fault detection. A predetermined process material delivery plan is dynamically modified based upon the modifying of the routing plan or modifying of the predetermined schedule.
Claims17
A method, comprising:
- processing a workpiece based upon a routing plan and a predetermined schedule;
- performing a fault detection relating to said processing of said workpiece;
- modifying dynamically at least one of said predetermined routing plan and said predetermined schedule based upon said fault detection;
- and
- modifying dynamically a predetermined process material delivery plan based upon at least one of said modifying of said routing plan and modifying of said predetermined schedule.
A method, comprising:
- monitoring a process flow relating to processing a workpiece;
- detecting a change in said process flow;
- performing an automated modification of a process material delivery process for delivery of material used in processing said workpiece based upon said change in the process flow to provide for balance of process material throughout a fab;
- wherein performing said automated modification of said process material delivery process comprises performing a load balancing process to provide for balance of process material throughout a fab.
A method, comprising:
- determining a routing and a schedule for processing a first workpiece and a second workpiece;
- processing said first workpiece based upon said routing and said schedule;
- acquiring at least one of a metrology data and a tool state data relating to said processing of said first workpiece;
- determining whether a process error has occurred based upon at least one of said metrology data and said tool state data;
- modifying at least one of said routing and said schedule relating to said second workpiece based upon a determination that said process error has occurred;
- and
- performing an automated modification of a process material delivery process for processing said second workpiece based upon said modifying at least one of said routing and said schedule;
- wherein performing said automated modification of said process material delivery process comprises performing a load balancing process to provide for balance of process material throughout a fab.
An apparatus, comprising:
- means for processing a workpiece based upon a routing plan and a predetermined schedule;
- means for performing a fault detection relating to said processing of said workpiece;
- means for modifying dynamically at least one of said predetermined routing plan and said predetermined schedule based upon said fault detection;
- and
- means for modifying dynamically a predetermined process material delivery plan based upon at least one of said modifying of said routing plan and modifying of said predetermined schedule.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
- processing a workpiece based upon a routing plan and a predetermined schedule;
- performing a fault detection relating to said processing of said workpiece;
- modifying dynamically at least one of said predetermined routing plan and said predetermined schedule based upon said fault detection;
- and
- modifying dynamically a predetermined process material delivery plan based upon at least one of said modifying of said routing plan and modifying of said predetermined schedule.
Dependencies are inferred from the claim text.