Window membrane for detector and analyser devices, and a method for manufacturing a window membrane
AssigneeOxford Instruments Analytical Oy
InventorTomi Meilahti
Life of this patent
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Abstract
A window membrane is permeable to electromagnetic radiation, especially soft X-rays. It comprises a film (201) and a metallic reinforcement mesh (202) attached to the film (201). A preferable way of attaching the metallic reinforcement mesh (202) to the film is to use a positive-working photosensitive glue (204) and allow the reinforcement mesh (202) to act as the exposure mask.
Claims16
A window membrane permeable to electromagnetic radiation, comprising:
- a film and a metallic reinforcement mesh attached onto one surface of the film, and
- a polymer layer between said film and said reinforcement mesh, said polymer layer attaching said film and said reinforcement mesh together;
- wherein said polymer layer comprises a cured positive-working photosensitive polymer.
A window member for use in at least one of X-ray detector and X-ray analyser devices, the window member comprising:
- a membrane in which a film, a metallic reinforcement mesh and a polymer layer between said film and said reinforcement mesh form a composite structure, in which said polymer layer attaches said reinforcement layer to said film and in which said polymer layer comprises a cured positive-working photosensitive polymer, and
- an edge of said membrane for installing the window member gas tightly to an opening in an X-ray detector or X-ray analyser device.
A method for making a window membrane that is permeable to electromagnetic radiation, comprising:
- producing a film,
- applying at least one layer of polymer solution comprising a positive-working photosensitive polymer onto a surface of the film,
- placing a metallic reinforcement mesh into an applied layer of polymer solution while that applied layer of polymer solution is still wet,
- allowing the at least one applied layer of polymer solution to at least partly solidify, thus producing an at least partly solidified polymer layer that attaches said metallic reinforcement mesh to said film.
Dependencies are inferred from the claim text.