Reaction chamber for manufacturing a carbon nanotube, apparatus for manufacturing the carbon nanotube and system for manufacturing the carbon nanotube

An apparatus for manufacturing a carbon nanotube, comprising:

• a reaction chamber comprising a reaction furnace having a box structure for receiving a substrate wherein the reaction furnace provides a space for forming the carbon nanotube on the substrate;
• a gas inlet having a through-hole structure formed at a first portion of the reaction furnace wherein the gas inlet provides a passage for an inflow of a source gas for forming the carbon nanotube into the reaction furnace;
• a gas outlet having a through-hole structure formed at a second portion of the reaction furnace wherein the gas outlet provides a passage for an outflow of the source gas from the reaction furnace;
• and a heat transfer member having at least one rectangular through-hole structure formed at a third portion of the reaction furnace along a direction substantially in parallel to the substrate wherein the heat transfer member provides a passage for transferring a heat to heat up the reaction furnace;
• a gas supply member connected to the gas inlet to provide the source gas into the reaction furnace through the gas inlet;
• a gas exhausting member connected to the gas outlet to exhaust the source gas from the reaction furnace through the gas outlet;
• and
• a heating member facing with the heat transfer member to heat the reaction furnace by providing the heat into the reaction furnace through the heat transfer member.

A system for manufacturing a carbon nanotube, comprising:

• an apparatus for manufacturing the carbon nanotube comprising:
• a reaction chamber comprising a reaction furnace having a box structure for receiving a substrate wherein the reaction furnace provides a space for forming the carbon nanotube on the substrate;
• a gas inlet having a through-hole structure formed at a first portion of the reaction furnace wherein the gas inlet provides a passage for an inflow of a source gas for forming the carbon nanotube into the reaction furnace;
• a gas outlet having a through-hole structure formed at a second portion of the reaction furnace wherein the gas outlet provides a passage for an outflow of the source gas from the reaction furnace;
• and a heat transfer member having at least one rectangular through-hole structure formed at a third portion of the reaction furnace along a direction substantially in parallel to the substrate wherein the heat transfer member provides a passage for transferring a heat to heat up the reaction furnace;
• a gas supply member connected to the gas inlet to provide the source gas into the reaction furnace through the gas inlet;
• a gas exhausting member connected to the gas outlet to exhaust the source gas from the reaction furnace through the gas outlet;
• and
• a heating member facing with the heat transfer member to heat the reaction furnace by providing the heat into the reaction furnace through the heat transfer member;
• and
• a transfer apparatus coupled to the apparatus to load/unload the substrate into/from the reaction furnace.