# US 7,613,582 B2 · Thermal type flow rate measurement apparatus

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- Number: US 7,613,582 B2
- Document ID: US7613582B2
- Status: Granted
- Kind: B2
- Application number: 11/667,456
- Filed: 2004-11-11
- Published: 2008-04-24
- Granted: 2009-11-03
- Earliest claimed: 2004-11-11
- Assignees: Hitachi, Ltd.
- Inventors: Atsushi Kanke
- Web page: https://patentgrep.com/patent/US7613582B2

## CPC

- G01F 1/6965: {comprising means to store calibration data for flow signal calculation or correction}
- G01F 1/6845: {Micromachined devices}
- G01F 1/72: Devices for measuring pulsing fluid flows
- G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME

## Abstract

Thermal type flow rate meters for measuring the flow rate of intake air of an internal combustion engine of a motor vehicle or the like have encountered a problem of an increase in pulsation errors during high engine speed and high pulsation. Meanwhile, digitally recovering responses has posed a problem in which pulsation performance is liable to become worse, affected by variation in a clock or the like. The sensor is provided with means for transferring a response variation factor to the engine control unit. The engine control unit is provided with logics for automatically determining the variation factor and correcting a response. Means for detecting a backflow occurrence is provided and a parameter for a response recovery is changed before and after a backflow occurrence. The sensor is provided with a selecting means by which a sensor response can be selected and obtained and the engine control unit is provided means for allowing selection of a response.

## Claims

### Claim 1

A thermal type flow rate measurement apparatus comprising a flow rate sensing element for sensing a flow rate of a fluid and capable of also sensing a forward flow and a backflow of a pulsating flow in said fluid, characterized by comprising:
a response recovery means for recovering a response delay of an output signal from said flow rate sensing element; and
a means for determining whether or not to execute a response recovery for said output signal or changing a parameter value for said response recovery, in accordance with a determination as to whether a backflow occurs or an estimated amount of said backflow.

### Claim 2 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein the apparatus makes a flow rate signal to be determined whether said backflow occurs, based on said output signal, performs said response recovery to said flow rate signal, and determines whether said backflow occurs or calculates the estimated amount of said backflow from at least said flow rate signal processed by said response recovery.

### Claim 3 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein the apparatus uses a correlation value obtained from a maximum value and a minimum value in a pulsation of said flow rate signal processed by said response recovery to determine whether said backflow occurs.

### Claim 4 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein said determination as to whether said backflow occurs or the estimated amount of said backflow is determined by extracting the output signal characteristics of said flow rate sensing element.

### Claim 5 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, further comprising:
a first output means for outputting the output signal of said flow rate sensing element, not processed by the response recovery;
a second output means for outputting the output signal of said flow rate sensing element, processed by the response recovery; and
a flow rate signal selecting means for selecting the output signal not processed by the response recovery, when a detection value of said backflow is not included in a pulsation of a flow rate signal based on the output signal of said flow rate sensing element, and selecting an output signal processed by the response recovery, when a said detection value of a said backflow is included in the pulsation of said flow rate signal.

### Claim 6 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein said thermal type flow rate measurement apparatus is used to measure a flow rate of intake air of an internal combustion engine and determines whether said backflow occurs, by using at least throttle opening of the engine and the engine speed.

### Claim 7 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein said thermal type flow rate measurement apparatus is used to measure a flow rate of intake air of an internal combustion engine and uses a zero flow rate when the engine is stopped as a reference flow rate used for backflow determination.

### Claim 8 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein said thermal type flow rate measurement apparatus is used to measure a flow rate of intake air of an internal combustion engine, and
wherein said apparatus is comprised of: a flow rate sensor including said flow rate sensing element and a said response recovery means; and an engine controller including said means for determining whether or not to execute said response recovery or changing said parameter value for said response recovery.

### Claim 9 (depends on 7)

The thermal type flow rate measurement apparatus according to claim 7, wherein said engine controller determines the pulsation state of the output signal of said flow rate sensing element from whether the backflow occurs or the estimated amount of the backflow and uses a plurality of output voltage to flow rate conversion tables for determining the pulsation level.

### Claim 10 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein the output signal from said flow rate sensing element is converted into a digital signal; said response recovery is performed on the digital signal; and the apparatus further comprises a parameter adjustment means for automatically adjusting the parameter value for said response recovery, in accordance with variations or error in a clock signal which is used in the response recovery.

### Claim 11

A thermal type flow rate measurement apparatus comprising a flow rate sensing element for sensing a flow rate of a fluid and capable of also sensing a forward flow and a backflow of a pulsating flow, characterized by comprising:
a response recovery means for recovering a response delay of an output signal from said flow rate sensing element; and
at least one of a means for determining whether or not to execute said response recovery in accordance with at least engine speed and a means for changing a parameter value for response recovery in accordance with at least engine speed.

### Claim 12 (depends on 1)

The thermal type flow rate measurement apparatus according to claim 1, wherein said flow rate sensing element and said response recovery means are formed integrally on a silicon substrate.

### Claim 13 (depends on 11)

The thermal type flow rate measurement apparatus according to claim 11, wherein said means for determining whether or not to execute said response recovery is configured to select said output signal processed by said response recovery means at the time when an engine of an internal combustion is in a high engine speed range and select said output signal not processed by said response recovery means at the time when said engine is in a low engine speed range.

### Claim 14 (depends on 11)

The thermal type flow rate measurement apparatus according to claim 11, wherein said means for changing said parameter value for said response recovery is configured to change said parameter value in accordance with a high engine speed range and a low engine speed range.

### Claim 15 (depends on 11)

The thermal type flow rate measurement apparatus according to claim 11,
wherein said means for determining whether or not to execute said response recovery is configured to select said output signal processed by said response recovery means at the time when an engine of an internal combustion is in a high engine speed range and select said output signal not processed by said response recovery means at the time when said engine is in a low engine speed range; and
wherein said means for changing said parameter value for said response recovery is configured to change said parameter value in accordance with said high engine speed range and said low engine speed range.
