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US 7,613,535 B2Granted
Independent, self-contained, risk isolated, sectional CIM design for extremely large scale factory operation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLarry Jann, Chien-Fei Cheng, I. Chun Chen, Liang Po Hsiung
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Abstract
A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.
Claims11
A semiconductor manufacturing system, comprising:
- a centralized computer integrated manufacturing (CIM) system;
- a plurality of sectional CIM systems each associated with one of a plurality of manufacturing facilities and coupled with the centralized CIM system, wherein the plurality of manufacturing facilities includes a request entity and a support entity, wherein the support entity provides manufacturing backup for the request entity;
- and
- a centralized basic record module included in the centralized CIM system, and having a predefined unified process flow for use by a mobile object that is transferred between the request entity and the support entity;
- and wherein the unified process flow defines a first processing step, and wherein the unified process flow further defines a first set of tools to perform the first processing step at the request entity and a second set of tools to perform the first processing step at the support entity.
2 more elements
Dependencies are inferred from the claim text.