# US 7,613,215 B2 · High efficiency second harmonic generation vertical external cavity surface emitting laser

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- Number: US 7,613,215 B2
- Document ID: US7613215B2
- Status: Granted
- Kind: B2
- Application number: 11/443,251
- Filed: 2006-05-31
- Published: 2007-05-24
- Granted: 2009-11-03
- Earliest claimed: 2005-11-22
- Assignees: Samsung Electronics Co., Ltd.
- Inventors: Jun-youn Kim
- Web page: https://patentgrep.com/patent/US7613215B2

## CPC

- H01S 5/18305: {with emission through the substrate, i.e. bottom emission}
- H01S 5/02484: {Sapphire or diamond heat spreaders}
- H01S 5/041: {Optical pumping}
- H01S 3/109: Frequency multiplication, e.g. harmonic generation
- H01S 5/0213: {Sapphire, quartz or diamond based substrates}
- H01S 5/141: {using a wavelength selective device, e.g. a grating or etalon (H01S5/146 takes precedence)}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A vertical external cavity surface emitting laser (VECSEL) in which the full-width at half maximum (FWHM) of laser light is reduced by two etalon filter layers to improve the efficiency of second harmonic (SHG) crystal is provided. The VECSEL includes: a laser chip for generating laser light; a first etalon filter layer formed on the laser chip; a second etalon filter layer that is formed on the first etalon filter layer and has a different refractive index than the first etalon filter layer; a first mirror separated from and disposed obliquely to the laser chip; a second mirror for reflecting the laser light reflected from the first mirror back to the first mirror to form a cavity with the laser chip; and an SHG crystal disposed along an optical path between the first and second mirrors and doubles the frequency of the laser light generated in the laser chip.

## Claims

### Claim 1

A vertical external cavity surface emitting laser (VECSEL) comprising:
a laser chip for generating laser light at a predetermined wavelength;
a first etalon filter layer formed on the laser chip and configured to filter wavelengths outside of a first predetermined mode of the laser light;
a second etalon filter layer that is formed on the first etalon filter layer, has a different refractive index than the first etalon filter layer, and is configured to filter wavelengths outside of a second predetermined mode of the laser light, the first and second etalon filter layers being configured to reduce a full-width at half maximum (FWHM) of the laser light;
a first mirror separated from and disposed obliquely to the laser chip;
a second mirror for reflecting the laser light reflected from the first mirror back to the first mirror to form a cavity with the laser chip; and
a second harmonic generation (SHG) crystal that is disposed along an optical path between the first mirror and the second mirror and configured to double the frequency of the laser light generated in the laser chip.

### Claim 2 (depends on 1)

The VECSEL of claim 1, wherein the first etalon filter layer and the second etalon filter layer have transmittance with respect to the laser light generated in the laser chip.

### Claim 3 (depends on 2)

The VECSEL of claim 2, wherein the first etalon filter layer is a heat spreader configured to exhaust heat generated in the laser chip.

### Claim 4 (depends on 3)

The VECSEL of claim 3, wherein the first etalon filter layer is formed of a material selected from the group consisting of diamond, Al2O3, and silicon carbide (SiC).

### Claim 5 (depends on 2)

The VECSEL of claim 2, wherein the second etalon filter layer is formed of a material selected from the group consisting of GaAs, lnP, SiC, diamond, and Al2O3.

### Claim 6 (depends on 1)

The VECSEL of claim 1, further comprising a coating layer interposed between the laser chip and the first etalon filter layer to increase the transmittance of the laser light at the interface between the laser chip and the first etalon filter layer.

### Claim 7 (depends on 6)

The VECSEL of claim 6, wherein the coating layer includes two alternately stacked semiconductor materials or two alternately stacked dielectric materials having different refractive indexes.

### Claim 8 (depends on 1)

The VECSEL of claim 1, further comprising a coating layer interposed between the first etalon filter layer and the second etalon filter layer to increase the transmittance of the laser light at the interface between the first and second etalon filter layers.

### Claim 9 (depends on 8)

The VECSEL of claim 8, wherein the coating layer includes two alternately stacked semiconductor materials or two alternately stacked dielectric materials having different refractive indexes.

### Claim 10 (depends on 1)

The VECSEL of claim 1, further comprising a birefringence filter disposed between the first mirror and the laser chip to transmit the laser light at the predetermined wavelength.

### Claim 11 (depends on 1)

The VECSEL of claim 1, wherein the second mirror has predetermined transmittance with respect to a first portion of the laser light whose frequency is not converted by the SHG crystal, and the first mirror has a predetermined transmittance with respect to a second portion of the laser light whose frequency is converted by the SHG crystal.

### Claim 12 (depends on 11)

The VECSEL of claim 11, wherein the first mirror is a concave mirror and the second mirror is a planar mirror.

### Claim 13

A vertical external cavity surface emitting laser (VECSEL) comprising:
a laser chip for generating laser light at a predetermined wavelength;
a first etalon filter layer formed on the laser chip and configured to filter wavelengths outside of a first predetermined mode of the laser light;
a second etalon filter layer that is formed on the fist etalon filter layer, a different refractive index than the first etalon filter layer, and is configured to filter wavelengths outside of a second predetermined mode of the laser light, the first and second etalon filter layers being configured to reduce a full-width at half maximum (FWHM) of the laser light;
a mirror for reflecting the laser light generated in the laser chip back to the laser chip to cause the laser light to resonate between the laser chip and the mirror; and
a second harmonic generation (SHG) crystal disposed along an optical path between the laser chip and the mirror and configured to double the frequency of the laser light emitted from the laser chip.

### Claim 14 (depends on 13)

The VECSEL of claim 13, wherein the first etalon filter layer and the second filter layer have transmittance with respect to the laser light generated in the laser chip.

### Claim 15 (depends on 14)

The VECSEL of claim 14, wherein the first etalon filter layer is a heat spreader configured to exhaust heat generated in the laser chip.

### Claim 16 (depends on 15)

The VECSEL of claim 15, wherein the first etalon filter layer is formed of a material selected from the group consisting of diamond, Al2O3, and silicon carbide (SiC).

### Claim 17 (depends on 14)

The VECSEL of claim 14, wherein the second etalon filter layer is formed of a material selected from the group consisting of GaAs, lnP, SiC, diamond, and Al2O3.

### Claim 18 (depends on 13)

The VECSEL of claim 13, further comprising a coating layer interposed between the laser chip and the first etalon filter layer to increase the transmittance of the laser light at the interface between the laser chip and the first etalon filter layer.

### Claim 19 (depends on 18)

The VECSEL of claim 18, wherein the coating layer includes two alternately stacked semiconductor materials or two alternately stacked dielectric materials having different refractive indexes.

### Claim 20 (depends on 13)

The VECSEL of claim 13, further comprising a coating layer interposed between the first etalon filter layer and the second etalon filter layer to increase the transmittance of the laser light at the interface between the first and second etalon filter layers.

### Claim 21 (depends on 20)

The VECSEL of claim 20, wherein the coating layer includes two alternately stacked semiconductor materials or two alternately stacked dielectric materials having different refractive indexes.

### Claim 22 (depends on 13)

The VECSEL of claim 13, further comprising a birefringence filter disposed between the first mirror and the laser chip to transmit the laser light at the predetermined wavelength.

### Claim 23 (depends on 22)

The VECSEL of claim 22, further comprising a lens disposed between the birefringence filter and the SHG crystal to focus the laser light on the SHG crystal.

### Claim 24 (depends on 13)

The VECSEL of claim 13, wherein the laser chip comprises:
an active layer for generating the laser light upon excitation by a pumping beam, the active layer including a multiple quantum well structure and being positioned beneath the first etalon filter layer; and
a Distributed Bragg Reflector (DBR) layer for reflecting the laser light generated in the active layer to the mirror, the DBR layer being positioned beneath the active layer.

### Claim 25 (depends on 24)

The VECSEL of claim 24, wherein the pumping beam is directed to the bottom surface of the DBR layer and thence incident on the active layer.

### Claim 26 (depends on 1)

The VECSEL of claim 1, wherein the laser chip includes:
an active layer for generating the laser light upon excitation by a pumping beam, the active layer including a multiple quantum well structure and being positioned beneath the first etalon filter layer; and
a Distributed Bragg Reflector (DBR) layer for reflecting the laser light generated in the active layer to the first mirror, the DBR layer being positioned beneath the active layer.

### Claim 27 (depends on 26)

The VECSEL of claim 26, wherein the pumping beam is directed to the bottom surface of the DBR layer and thence incident on the active layer.

### Claim 28 (depends on 26)

The VECSEL of claim 26, wherein the pumping beam is directed to the top surface of the second etalon filter layer and thence incident on the active layer.

### Claim 29 (depends on 1)

The VECSEL of claim 1, wherein the first etalon filter layer is configured to pass wavelengths in the first predetermined mode of the laser light therethrough, and the second etalon filter layer is configured to pass wavelengths in the second predetermined mode of the laser light therethrough.

### Claim 30 (depends on 13)

The VECSEL of claim 13, wherein the first etalon filter layer is configured to pass wavelengths in the first predetermined mode of the laser light therethrough, and the second etalon filter layer is configured to pass wavelengths in the second predetermined mode of the laser light therethrough.

### Claim 31 (depends on 1)

The VECSEL of claim 1, wherein the second etalon filter layer is formed continuously on the first etalon filter layer.

### Claim 32 (depends on 1)

The VECSEL of claim 1, wherein the second etalon filter layer is configured to further reduce the FWHM of the laser light beyond the reduction of the FWHM of the laser light achieved by the first etalon filter layer.

### Claim 33 (depends on 13)

The VECSEL of claim 13, wherein the second etalon filter layer is formed continuously on the first etalon filter layer.

### Claim 34 (depends on 13)

The VECSEL of claim 13, wherein the second etalon filter layer is configured to further reduce the FWHM of the laser light beyond the reduction of the FWHM of the laser light achieved by the first etalon filter layer.