# US 7,612,933 B2 · Microelectromechanical device with spacing layer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,612,933 B2 - Document ID: US7612933B2 - Status: Granted - Kind: B2 - Application number: 12/057,161 - Filed: 2008-03-27 - Published: 2009-10-01 - Granted: 2009-11-03 - Earliest claimed: 2008-03-27 - Assignees: QUALCOMM MEMS Technologies, Inc. - Inventors: Kostadin Djordjev - Web page: https://patentgrep.com/patent/US7612933B2 ## CPC - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - G09G 3/2003: {Display of colours (specific for liquid crystal displays G09G3/3607)} - G09G 3/3466: {based on interferometric effect} - G09G 5/06: using colour palettes, e.g. look-up tables - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G09G: ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION (arrangements for transferring data between digital computers and displays G06F3/14; static indicating arrangements comprising an association of a number of separate sources or light control cells G09F9/00; static indicating arrangements comprising integral associations of a number of light sources H01J, H01K, H10H, H05B33/12; scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission, details thereof H04N1/00) ## Abstract An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and the electrode and provides a filtering cavity to improve color saturation. ## Claims ### Claim 1 A device comprising: an electrode; a fixed reflector; a movable reflector comprising an electrically conductive material, wherein an interferometric modulating cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and a spacing layer positioned between the fixed reflector and the electrode, wherein the spacing layer comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity. ### Claim 2 (depends on 1) The device of claim 1, wherein the thickness of the spacing layer is at least 160 nm. ### Claim 3 (depends on 1) The device of claim 1, wherein the device reflects red light when the movable reflector is at the third position, and wherein the spacing layer comprises SiO2 and a thickness of the spacing layer is at least 140 nm. ### Claim 4 (depends on 1) The device of claim 1, wherein the device reflects blue light when the movable reflector is at the third position, and wherein the spacing layer comprises SiO2 and a thickness of the spacing layer is at least 210 nm. ### Claim 5 (depends on 1) The device of claim 1, wherein the device reflects green light when the movable reflector is at the third position, and wherein the spacing layer comprises SiO2 and a thickness of the spacing layer is at least 190 nm. ### Claim 6 (depends on 1) The device of claim 1, wherein the device reflects white light when the movable reflector is at the first position and does not reflect light when the movable reflector is at the second position. ### Claim 7 (depends on 1) The device of claim 1, wherein the filtering cavity comprises another interferometric modulation cavity that is defined between the fixed reflector and the electrode. ### Claim 8 (depends on 1) The device of claim 1, further comprising: a display; a processor that is configured to communicate with the display, the processor being configured to process image data; and a memory device that is configured to communicate with the processor. ### Claim 9 (depends on 8) The device of claim 8, further comprising a driver circuit configured to send at least one signal to the display. ### Claim 10 (depends on 9) The device of claim 9, further comprising a controller configured to send at least a portion of the image data to the driver circuit. ### Claim 11 (depends on 8) The device of claim 8, further comprising an image source module configured to send the image data to the processor. ### Claim 12 (depends on 11) The device of claim 11, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter. ### Claim 13 (depends on 8) The device of claim 8, further comprising an input device configured to receive input data and to communicate the input data to the processor. ### Claim 14 A device comprising: an electrode; a fixed reflector; a movable reflector comprising an electrically conductive material, wherein an interferometric modulating cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and a spacing layer positioned between the fixed reflector and the electrode, the spacing laying being greater than or equal to 160 nm in thickness from a cross-sectional view of the device, wherein the spacing layer comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity. ### Claim 15 (depends on 14) The device of claim 14, wherein the spacing layer filtering cavity comprises another interferometric modulating cavity that is defined between the fixed reflector and the electrode. ### Claim 16 A device comprising: an electrode; first means for reflecting light, the first reflecting means being fixed; second means for reflecting light, the second reflecting means being movable and comprising an electrically conductive material, wherein an interferometric modulating cavity is defined between the first reflecting means and the second reflecting means, the second reflecting means being movable between at least a first position, a second position, and a third position; and means for separating the first reflecting means and the electrode, wherein the means for separating the first reflecting means and the electrode comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity. ### Claim 17 (depends on 16) The device of claim 16, wherein the thickness of the separating means is at least 160 nm. ### Claim 18 (depends on 16) The device of claim 16, wherein the device reflects red light when the second reflecting means is at the third position, and wherein the separating means comprises SiO2 and a thickness of the separating means is at least 140 nm. ### Claim 19 (depends on 16) The device of claim 16, wherein the device reflects blue light when the second reflecting means is at the third position, and wherein the separating means comprises SiO2 and a thickness of the separating means is at least 210 nm. ### Claim 20 (depends on 16) The device of claim 16, wherein the device reflects green light when the second reflecting means is at the third position, and wherein the separating means comprises SiO2 and a thickness of the separating means is at least 190 nm. ### Claim 21 (depends on 16) The device of claim 16, wherein the device reflects white light when the second reflecting means is at the first position and does not reflect light when the second reflecting means is at the second position. ### Claim 22 (depends on 16) The device of claim 16, wherein the filtering cavity comprises another interferometric modulating cavity that is defined between the first reflecting means and the electrode. ### Claim 23 A method of making a device for modulating light, the method comprising: forming an electrode; forming a spacing layer; forming a fixed reflector; and forming a movable reflector comprising an electrically conductive material; wherein an interferometric modulating cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position; and wherein the spacing layer provides comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity. ### Claim 24 (depends on 23) The method of claim 23, wherein the thickness of the spacing layer is at least 160 nm. ### Claim 25 (depends on 23) The method of claim 23, wherein the device reflects red light when the movable reflector is at the third position, and wherein the spacing layer comprises SiO2 and a thickness of the spacing layer is at least 140 nm. ### Claim 26 (depends on 23) The method of claim 23, wherein the device reflects blue light when the movable reflector is at the third position, and wherein the spacing layer comprises SiO2 and a thickness of the spacing layer is at least 210 nm. ### Claim 27 (depends on 23) The method of claim 23, wherein the device reflects green light when the movable reflector is at the third position, and wherein the spacing layer comprises SiO2 and a thickness of the spacing layer is at least 190 nm. ### Claim 28 (depends on 23) The method of claim 23, wherein the device reflects white light when the movable reflector is at the first position and does not reflect light when the movable reflector is at the second position. ### Claim 29 (depends on 23) The method of claim 23, wherein the filtering cavity comprises another interferometric modulating cavity that is defined between the fixed reflector and the electrode.