# US 7,612,932 B2 · Microelectromechanical device with optical function separated from mechanical and electrical function > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,612,932 B2 - Document ID: US7612932B2 - Status: Granted - Kind: B2 - Application number: 11/772,730 - Filed: 2007-07-02 - Published: 2008-01-17 - Granted: 2009-11-03 - Earliest claimed: 2004-09-27 - Assignees: Idc, LLC - Inventors: Clarence Chui; Denis Endisch; Lior Kogut; Ming-Hau Tung; Yeh-Jiun Tung; Chih-Wei Chiang - Web page: https://patentgrep.com/patent/US7612932B2 ## CPC - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - B81B 3/0086: {Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage} - B81B 2201/042: Micromirrors, not used as optical switches - Y10T 29/42: Piezoelectric device making - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element. ## Claims ### Claim 1 A microelectromechanical (MEMS) device comprising: a first reflective layer; a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and an actuation electrode between the deformable layer and the reflective element, wherein a voltage applied to the actuation electrode generates a first attractive force in a first direction on a first portion of the movable element and generates a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite the first direction, the first attractive force greater than the second attractive force, the movable element responsive to the first and second attractive forces by moving generally in the first direction. ### Claim 2 (depends on 1) The MEMS device of claim 1, wherein the first portion of the movable element comprises the deformable layer. ### Claim 3 (depends on 1) The MEMS device of claim 1, wherein the first portion of the movable element comprises the reflective element. ### Claim 4 (depends on 1) The MEMS device of claim 1, wherein a distance between the actuation electrode and the second portion of the movable element is greater than a distance between the actuation electrode and the first portion of the movable element. ### Claim 5 (depends on 1) The MEMS device of claim 1, wherein a distance between the actuation electrode and the second portion of the movable element is at least about 10% greater than a distance between the actuation electrode and the first portion of the movable element. ### Claim 6 (depends on 1) The MEMS device of claim 1, further comprising a conductive layer between the actuation electrode and the second portion. ### Claim 7 (depends on 1) The MEMS device of claim 1, further comprising a second actuation electrode. ### Claim 8 (depends on 7) The MEMS device of claim 7, wherein the movable element is responsive to voltages applied to the second actuation electrode by moving generally in the second direction. ### Claim 9 (depends on 1) The MEMS device of claim 1, wherein the first reflective layer is spaced from the reflective element when an actuation voltage is applied to the actuation electrode. ### Claim 10 (depends on 1) The MEMS device of claim 1, further comprising: a display; a processor that is configured to communicate with said display, said processor being configured to process image data; and a memory device that is configured to communicate with said processor. ### Claim 11 (depends on 10) The MEMS device of claim 10, further comprising a driver circuit configured to send at least one signal to the display. ### Claim 12 (depends on 11) The MEMS device of claim 11, further comprising a controller configured to send at least a portion of the image data to the driver circuit. ### Claim 13 (depends on 10) The MEMS device of claim 10, further comprising an image source module configured to send said image data to said processor. ### Claim 14 (depends on 13) The MEMS device of claim 13, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter. ### Claim 15 (depends on 10) The MEMS device of claim 10, further comprising an input device configured to receive input data and to communicate said input data to said processor. ### Claim 16 (depends on 1) The MEMS device of claim 1, wherein the first reflective layer is partially reflective and partially transparent. ### Claim 17 A microelectromechanical (MEMS) device comprising: a first reflective layer; a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and an actuation electrode between the deformable layer and the reflective element, wherein a lower surface of the deformable layer contacts a stationary portion of the device when an actuation voltage is applied to the actuation electrode. ### Claim 18 (depends on 17) The MEMS device of claim 17, wherein a voltage applied to the actuation electrode generates a first attractive force in a first direction on a first portion of the movable element and generates a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite the first direction, the first attractive force greater than the second attractive force, the movable element responsive to the first and second attractive forces by moving generally in the first direction. ### Claim 19 (depends on 18) The MEMS device of claim 18, wherein the first portion of the movable element comprises the deformable layer. ### Claim 20 (depends on 18) The MEMS device of claim 18, wherein a distance between the actuation electrode and the second portion of the movable element is greater than a distance between the actuation electrode and the first portion of the movable element. ### Claim 21 (depends on 18) The MEMS device of claim 18, wherein a distance between the actuation electrode and the second portion of the movable element is at least about 10% greater than a distance between the actuation electrode and the first portion of the movable element. ### Claim 22 (depends on 18) The MEMS device of claim 18, further comprising a conductive layer between the actuation electrode and the second portion. ### Claim 23 (depends on 17) The MEMS device of claim 17, further comprising a second actuation electrode. ### Claim 24 (depends on 23) The MEMS device of claim 23, wherein the movable element is responsive to voltages applied to the actuation electrode between the deformable layer and the reflective element by moving generally in a first direction and wherein the movable element is responsive to voltages applied to the second actuation electrode by moving generally in a second direction, the second direction substantially opposite the first direction. ### Claim 25 (depends on 17) The MEMS device of claim 17, wherein the first reflective layer is spaced from the reflective element when an actuation voltage is applied to the actuation electrode. ### Claim 26 (depends on 17) The MEMS device of claim 17, wherein the first reflective layer is partially reflective and partially transparent. ### Claim 27 A microelectromechanical (MEMS) device comprising: a first reflective layer; a movable element over the first reflective layer, the movable element comprising a deformable layer and a reflective element; and an actuation electrode between the deformable layer and the reflective element, wherein an upper surface of the reflective element contacts a stationary portion of the device when an actuation voltage is applied to the actuation electrode. ### Claim 28 (depends on 27) The MEMS device of claim 27, wherein a voltage applied to the actuation electrode generates a first attractive force in a first direction on a first portion of the movable element and generates a second attractive force in a second direction on a second portion of the movable element, the second direction substantially opposite the first direction, the first attractive force greater than the second attractive force, the movable element responsive to the first and second attractive forces by moving generally in the first direction. ### Claim 29 (depends on 28) The MEMS device of claim 28, wherein the first portion of the movable element comprises the reflective element. ### Claim 30 (depends on 28) The MEMS device of claim 28, wherein a distance between the actuation electrode and the second portion of the movable element is greater than a distance between the actuation electrode and the first portion of the movable element. ### Claim 31 (depends on 28) The MEMS device of claim 28, wherein a distance between the actuation electrode and the second portion of the movable element is at least about 10% greater than a distance between the actuation electrode and the first portion of the movable element. ### Claim 32 (depends on 28) The MEMS device of claim 28, further comprising a conductive layer between the actuation electrode and the second portion. ### Claim 33 (depends on 27) The MEMS device of claim 27, further comprising a second actuation electrode. ### Claim 34 (depends on 33) The MEMS device of claim 33, wherein the movable element is responsive to voltages applied to the actuation electrode between the deformable layer and the reflective element by moving generally in a first direction and wherein the movable element is responsive to voltages applied to the second actuation electrode by moving generally in a second direction, the second direction substantially opposite the first direction. ### Claim 35 (depends on 27) The MEMS device of claim 27, wherein the first reflective layer is spaced from the reflective element when an actuation voltage is applied to the actuation electrode. ### Claim 36 (depends on 27) The MEMS device of claim 27, wherein the first reflective layer is partially reflective and partially transparent.