# US 7,612,895 B2 · Apparatus and method for in-situ monitoring of wafer bonding time > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,612,895 B2 - Document ID: US7612895B2 - Status: Granted - Kind: B2 - Application number: 12/118,100 - Filed: 2008-05-09 - Published: 2008-11-20 - Granted: 2009-11-03 - Earliest claimed: 2007-05-18 - Assignees: Suss Microtec Inc - Inventors: Markus Gabriel; Matthew Stiles - Web page: https://patentgrep.com/patent/US7612895B2 ## CPC - H10P 74/207: {Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An apparatus and a method for semiconductor wafer bonding provide in-situ and real time monitoring of semiconductor wafer bonding time. Deflection of the wafer edges during the last phase of the direct bonding process indicates the end of the bonding process. The apparatus utilizes a distance sensor to measure the deflection of the wafer edges and the bonding time is measured as the time between applying the force (bonding initiation) and completion of the bonding process. The bonding time is used as a real-time quality control parameter for the wafer bonding process. ## Claims ### Claim 1 A method for measuring the bonding time between two semiconductor structures in-situ and in real time during a bonding operation comprising: positioning a first surface of a first semiconductor structure directly opposite and in contact with a first surface of a second semiconductor structure; initiating bonding between said first surfaces of said first and second semiconductor structures by applying a force at a first point of a second surface of said first semiconductor and thereby forming a bond interface between said first surfaces of said first and second semiconductor structures, wherein said second surface is opposite to said first surface of said first semiconductor structure; measuring a deflection of a second point of said second surface of said first semiconductor away from said first surface of said second semiconductor structure during the propagation of said bond interface throughout the entire first surface areas of said first and second semiconductor structures, wherein said second point is positioned at a first distance from said first point; and measuring said bonding time by taking the difference between the time said deflection reaches a minimum value and the time said force is applied. ### Claim 2 (depends on 1) The method of claim 1, wherein said second point is positioned diametrically opposite to said first point. ### Claim 3 (depends on 1) The method of claim 1, wherein said first point is located at the center of said second surface of said first semiconductor structure and said second point is located at an edge of said second surface. ### Claim 4 (depends on 1) The method of claim 1, wherein said deflection of said second point of said second surface of said first semiconductor away from said first surface of said second semiconductor structure initially increases and then decreases to said minimum value. ### Claim 5 (depends on 1) The method of claim 1 wherein said deflection is measured with a distance sensor. ### Claim 6 (depends on 5) The method of claim 5 wherein said distance sensor comprises a laser distance sensor operating on the principle of laser triangulation. ### Claim 7 (depends on 1) The method of claim 1 further comprising calculating a bond propagation speed by dividing said first distance between said first and second points by said bonding time. ### Claim 8 (depends on 1) The method of claim 1 further comprising calculating a bond quality value by taking the difference between the measured bonding time and a previously determined optimum bonding time. ### Claim 9 An apparatus for measuring the bonding time between two semiconductor structures in-situ and in real time during a bonding operation comprising: equipment for positioning a first surface of a first semiconductor structure directly opposite and in contact with a first surface of a second semiconductor structure; equipment for initiating bonding between said first surfaces of said first and second semiconductor structures by applying a force at a first point of a second surface of said first semiconductor and thereby forming a bond interface between said first surfaces of said first and second semiconductor structures, wherein said second surface is opposite to said first surface of said first semiconductor structure; equipment for measuring a deflection of a second point of said second surface of said first semiconductor away from said first surface of said second semiconductor structure, during the propagation of said bond interface throughout the entire first surface areas of said first and second semiconductor structures, wherein said second point is positioned at a distance from said first point; and equipment for measuring said bonding time by taking the difference between the time said deflection reaches a minimum value and the time said force is applied. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein said second point is positioned diametrically opposite to said first point. ### Claim 11 (depends on 9) The apparatus of claim 9, wherein said first point is located at the center of said second surface of said first semiconductor structure and said second point is located at an edge of said second surface. ### Claim 12 (depends on 9) The apparatus of claim 9, wherein said deflection of said second point of said second surface of said first semiconductor away from said first surface of said second semiconductor structure initially increases and then decreases to said minimum value. ### Claim 13 (depends on 9) The apparatus of claim 9, wherein said deflection is measured with a distance sensor. ### Claim 14 (depends on 13) The apparatus of claim 13, wherein said distance sensor comprises a laser distance sensor operating on the principle of laser triangulation. ### Claim 15 (depends on 9) The apparatus of claim 9 further comprising equipment for calculating a bond propagation speed by dividing said first distance between said first and second points by said bonding time. ### Claim 16 (depends on 9) The apparatus of claim 9 further comprising equipment for calculating a bond quality value by taking the difference between the measured bonding time and a previously determined optimum bonding time.