MEMS acoustic filter and fabrication of the same
AssigneeKolo Technologies, Inc.
InventorYongli Huang
Life of this patent
Estimating the term…
Abstract
A MEMS acoustic filter has a MEMS resonator and at least two acoustic I/O ports to alter an input acoustic signal to an output acoustic signal. The first I/O port is adapted for interfacing with a medium, and the second I/O port for passing an acoustic signal to an acoustic transducer. Multiple MEMS resonators may be stacked to form a high order acoustic filter. An array of MEMS acoustic filters may be designed to function as an acoustic lens. The MEMS acoustic filter is particularly useful with an ultrasonic transducer, such as PZT and MUT. Fabrication methods to make the same are also disclosed.
Claims34
A MEMS acoustic filter comprising:
- a MEMS resonator;
- and
- at least two acoustic I/O ports.
An ultrasonic transducer comprising:
- an ultrasonic transducer element;
- and
- a MEMS acoustic filter attached to the ultrasonic transducer element.
An ultrasonic transducer array comprising:
- an array of ultrasonic transducer elements;
- and
- an array of MEMS acoustic filters each attached to a respective one of the array of ultrasonic transducer elements.
A MEMS acoustic filter comprising:
- a MEMS resonator including a flexible membrane layer, a least one connector, and a base layer, wherein a bottom surface of the flexible membrane layer is connected to the base layer through the at least one connector;
- and
- at least two acoustic I/O ports.
A MEMS acoustic filter comprising:
- a MEMS resonator including a mass layer, a spring layer;
- and a base layer, wherein the mass layer has a bottom surface connected to a top surface of the spring layer through a spring-mass connector, and the spring membrane is connected to the base layer;
- and
- at least two acoustic I/O ports.
Dependencies are inferred from the claim text.