# US 7,612,485 B2 · Ultrasonic sensor

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- Number: US 7,612,485 B2
- Document ID: US7612485B2
- Status: Granted
- Kind: B2
- Application number: 11/898,521
- Filed: 2007-09-13
- Published: 2008-03-27
- Granted: 2009-11-03
- Earliest claimed: 2006-09-26
- Assignees: Denso Corporation
- Inventors: Makiko Sugiura; Kazuaki Watanabe; Yasuyuki Okuda
- Web page: https://patentgrep.com/patent/US7612485B2

## CPC

- G10K 11/004: {Mounting transducers, e.g. provided with mechanical moving or orienting device (mountings specially adapted to a particular sound-producing device, see the preceding groups G10K1/00 - G10K9/00, e.g. G10K1/26, G10K1/28, G10K9/22; arrangements of sonic watch equipment on submarines B63G8/39; buoys B63B22/00)}
- B06B 1/0648: {of rectangular shape}
- G01S 7/521: Constructional features
- G10K: SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R)
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES

## Abstract

An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor includes: an acoustic matching layer having a first surface and a second surface, the first surface which receives the ultrasonic wave, and the second surface which is opposite to the first surface; and an ultrasonic detection element including a vibration member. The vibration member is coupled with the second surface of the acoustic matching layer. The acoustic matching layer is repeatedly deformable in accordance with a standing wave, which is generated in the acoustic matching layer by the received ultrasonic wave. The vibration member resonates with the repeat deformation of the acoustic matching layer.

## Claims

### Claim 1

An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor comprising:
an acoustic matching layer having a first surface and a second surface, the first surface which receives the ultrasonic wave, and the second surface which is opposite to the first surface;
an ultrasonic detection element including a vibration member; and
a transmission member disposed between the vibration member and the acoustic matching layer member, wherein
the vibration member is coupled with the second surface of the acoustic matching layer,
the acoustic matching layer is repeatedly deformable in accordance with a standing wave, which is generated in the acoustic matching layer by the received ultrasonic wave,
the vibration member resonates with the repeat deformation of the acoustic matching layer, and
the transmission member transmits the repeat deformation of the acoustic matching layer to the vibration member.

### Claim 2 (depends on 1)

The ultrasonic sensor according claim 1, wherein
the ultrasonic detection element is provided by a Micro Electro Mechanical System, and the vibration member is provided by a thin portion of a semiconductor substrate.

### Claim 3 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the vibration member includes a piezoelectric vibration detection element made from piezoelectric material, and
the piezoelectric vibration detection element detects the repeat deformation based on strain in the piezoelectric vibration detection element, the strain which is caused by the repeat deformation.

### Claim 4 (depends on 3)

The ultrasonic sensor according to claim 3, wherein
the piezoelectric material is lead zirconate titanate.

### Claim 5 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the vibration member includes a capacitor type vibration detection element including a pair of electrodes and a capacitor between the pair of electrodes, and
the capacitor has a capacitance changeable in accordance with displacement of the electrodes caused by the repeat deformation.

### Claim 6 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the transmission member provides a support for supporting a periphery of the vibration member in such a manner that the support lifts up the vibration member.

### Claim 7 (depends on 6)

The ultrasonic sensor according to claim 6, wherein
the vibration member is cantilevered from the support.

### Claim 8 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the acoustic matching layer is made from resin material.

### Claim 9 (depends on 8)

The ultrasonic sensor according to claim 8, wherein
the resin material is polycarbonate resin.

### Claim 10

An ultrasonic sensor for detecting an ultrasonic wave, which is output from an ultrasonic generator and reflected by an object to be detected, the ultrasonic sensor comprising:
an acoustic matching layer having a first surface and a second surface, the first surface which receives the ultrasonic wave, and the second surface which is opposite to the first surface; and
an ultrasonic detection element including a vibration member, wherein
the vibration member is coupled with the second surface of the acoustic matching layer,
the acoustic matching layer is repeatedly deformable in accordance with a standing wave, which is generated in the acoustic matching layer by the received ultrasonic wave,
the vibration member resonates with the repeat deformation of the acoustic matching layer, and
the vibration member is almost perpendicular to the second surface of the acoustic matching layer.

### Claim 11 (depends on 1)

The ultrasonic sensor according to claim 1, wherein
the ultrasonic sensor is mounted to at least one part of a vehicle, the one part which is selected from the group consisting of a headlamp cover, a rear lamp cover, a blinker cover, a back-up light cover, a side mirror and a bumper.

### Claim 12 (depends on 10)

The ultrasonic sensor according to claim 10, wherein the ultrasonic sensor is mounted to at least one part of a vehicle, the one part which is selected from the group consisting of a headlamp cover, a rear lamp cover, a blinker cover, a back-up light cover, a side mirror and a bumper.
