# US 7,612,484 B2 · High-deformation composite microresonator

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- Number: US 7,612,484 B2
- Document ID: US7612484B2
- Status: Granted
- Kind: B2
- Application number: 11/630,773
- Filed: 2005-06-29
- Published: 2009-05-07
- Granted: 2009-11-03
- Earliest claimed: 2004-07-01
- Assignees: Commissariat a l'Energie Atomique
- Inventors: Amyot Tripard; Yves Brechet
- Web page: https://patentgrep.com/patent/US7612484B2

## CPC

- H03H 3/0072: {of microelectro-mechanical resonators or networks (micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C)}
- B81B 3/0078: {Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075}
- H03H 9/2436: {Disk resonators}
- B81B 2201/0271: Resonators; ultrasonic resonators
- B81B 2203/0118: Cantilevers
- H03H 2009/02503: {Breath-like, e.g. Lam? mode, wine-glass mode}
- Y10T 29/42: Piezoelectric device making
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An electromechanical resonator including a vibrating body, at least one excitation electrode, and at least one detection electrode. The vibrating body includes a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus, less than the first Young's modulus, the second part being at least partially located facing the detection electrode.

## Claims

### Claim 1

An electromechanical resonator comprising:
a vibrating body;
at least one excitation electrode and at least one detection electrode,
wherein the vibrating body comprises a first part made of a first material with a first Young's modulus and a second part made of a second material with a second Young's modulus less than the first Young's modulus, the second part being located in a cavity of the first material and at least partially located facing the detection electrode.

### Claim 2 (depends on 1)

A resonator according to claim 1, wherein the first Young's modulus is greater than 100 GPa.

### Claim 3 (depends on 1)

A resonator according to claim 1, wherein the second Young's modulus is less than 100 GPa.

### Claim 4 (depends on 1)

A resonator according to claim 1, wherein the first material is made of monocrystalline silicon or nickel or diamond.

### Claim 5 (depends on 1)

A resonator according to claim 1, wherein the second material is made of aluminium or gold or zinc or magnesium.

### Claim 6 (depends on 1)

A resonator according to claim 1, wherein the vibrating body is circular.

### Claim 7 (depends on 1)

A resonator according to claim 1, wherein the vibrating body is square.

### Claim 8 (depends on 1)

A resonator according to claim 1, comprising two excitation electrodes and two detection electrodes, arranged at 90° from each other.

### Claim 9 (depends on 1)

A resonator according to claim 1, comprising two electrodes, each being an excitation and detection electrode, the two electrodes being diametrically arranged.

### Claim 10 (depends on 1)

A resonator according to claim 1, wherein the second material is present locally over a thickness of between 70% and 100% of the thickness of the vibrating body.

### Claim 11 (depends on 1)

A resonator according to claim 1, further comprising an anchor or a single base connecting it to a substrate.

### Claim 12

A process for making an electromechanical resonator including a vibrating body itself including a first part made of a first material with a first Young's modulus, and a second part made of a second material with a second Young's modulus less than the first Young's modulus, at least one excitation electrode and at least one detection electrode, the second part of the vibrating body at least partially facing the detection electrode, the process comprising:
etching at least one cavity in a base made of the first material with a first Young's modulus; and
depositing the second material in the cavity with a second Young's modulus less than the first Young's modulus.

### Claim 13 (depends on 12)

A process according to claim 12, further comprising producing electrodes facing the second material.

### Claim 14 (depends on 12)

A process according to claim 12, further comprising etching to release the resonator from a substrate only leaving a connection base to the substrate.

### Claim 15 (depends on 12)

A process according to claim 12, wherein each cavity is etched over a thickness between 70% and 95% of the thickness of the base.

### Claim 16 (depends on 12)

A process according to claim 12, wherein the base is obtained by etching an epitaxied layer on an SOI substrate.

### Claim 17 (depends on 12)

A process according to claim 12, wherein the base is made of monocrystalline silicon.