# US 7,612,457 B2 · Semiconductor device including a stress buffer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,612,457 B2 - Document ID: US7612457B2 - Status: Granted - Kind: B2 - Application number: 11/766,404 - Filed: 2007-06-21 - Published: 2008-12-25 - Granted: 2009-11-03 - Earliest claimed: 2007-06-21 - Assignees: Infineon Technologies AG - Inventors: Joachim Mahler; Alfred Haimerl; Angela Wieneke Kessler; Michael Bauer - Web page: https://patentgrep.com/patent/US7612457B2 ## CPC - H10W 74/137: {the encapsulations being directly on the semiconductor body (H10W74/134 takes precedence)} - H10W 72/012: {of bump connectors, dummy bumps or thermal bumps} - H10W 72/019: {of bond pads} - H10W 72/90: Bond pads, in general - H10W 74/40: characterised by their materials - H10W 72/07533: {Ultrasonic bonding, e.g. thermosonic bonding} - H10W 72/251: {Materials} - H10W 72/29: Bond pads specially adapted therefor - H10W 72/59: Bond pads specially adapted therefor - H10W 72/932: {Plan-view shape, i.e. in top view} - H10W 72/983: {Reinforcing structures, e.g. collars} - H10W 90/754: {between a chip and a stacked insulating package substrate, interposer or RDL} - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract An integrated circuit includes a first surface configured for mounting to a carrier, an active area of the integrated circuit spaced from the first surface, a bond pad disposed over and in electrical communication with the active area, and a ceramic inorganic stress-buffering layer disposed between the active area and the bond pad. ## Claims ### Claim 1 An integrated circuit configured to be mounted to a carrier, the integrated circuit comprising: a first surface configured for mounting to the carrier; an active area of the integrated circuit spaced from the first surface; a bond pad disposed over and in electrical communication with the active area; and a ceramic inorganic stress-buffering layer disposed between the active area and the bond pad, the ceramic inorganic stress-buffering layer comprising a hardness of greater than about 500 Kgforce/mm2 that is configured to minimize stress delivered to the active area when attaching a connector to the bond pad. ### Claim 2 (depends on 1) The integrated circuit of claim 1, further comprising: a first metal layer in contact with the active area; a dielectric layer disposed over the first metal layer; and a metal contact layer disposed over the dielectric layer and over the active area of the integrated circuit, the metal contact layer defining an upper surface of the chip; wherein the ceramic inorganic stress-buffering layer comprises a non-electrically conductive stress-buffering layer that is disposed on the metal contact layer over the active area of the integrated circuit. ### Claim 3 (depends on 2) The integrated circuit of claim 2, wherein the dielectric layer, the metal contact layer, and the ceramic inorganic stress-buffering layer are fabricated to include a plurality of vias that define an electrical pathway between the bond pad and the first metal layer. ### Claim 4 (depends on 1) The integrated circuit of claim 1, wherein the first surface is a first surface of a silicon substrate, and the ceramic inorganic stress-buffering layer is configured to have a coefficient of thermal expansion (CTE) that is substantially similar to a CTE of the silicon substrate. ### Claim 5 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises a diamond-like carbon stress-buffering layer comprising an amorphous carbon having one of an sp2 lattice structure and an sp3 lattice structure. ### Claim 6 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises a diamond-like carbon stress-buffering layer comprising tetrahedral amorphous carbon. ### Claim 7 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises a diamond-like carbon stress-buffering layer comprising cubic boron nitride. ### Claim 8 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises a carbon material modified to include a diluent selected from the group consisting of hydrogen, carbon, silicon, oxygen, and fluorine. ### Claim 9 (depends on 8) The integrated circuit of claim 8, wherein the carbon material is defined by a carbon-hydrogen bond and the diluent is defined by X, such that the modified carbon material is defined by C:H:X bonds. ### Claim 10 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises an element from groups 4-6 of the periodic table of elements, nitrides of an element from groups 4-6, borides of an element from groups 4-6, and carbides of an element from groups 4-6. ### Claim 11 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises an electrical insulator. ### Claim 12 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer is characterized by an absence of tungsten. ### Claim 13 A semiconductor device comprising: a carrier; a chip including a first face and a second face opposite the first face, the first face coupled to the carrier and the second face including a metal contact layer disposed over an active area of the chip, a carbon stress-buffering layer disposed on the metal contact layer over the active area of the chip, and a bond pad disposed on the carbon stress-buffering layer. ### Claim 14 (depends on 13) The semiconductor device of claim 13, wherein the carbon stress-buffering layer comprises amorphous carbon including a hybridized carbon atom having one of an sp2 lattice structure and an sp3 lattice structure. ### Claim 15 (depends on 13) The semiconductor device of claim 13, wherein the carbon stress-buffering layer comprises a thickness of between about 5 nanometers-5 micrometers. ### Claim 16 (depends on 15) The semiconductor device of claim 15, wherein the carbon stress-buffering layer comprises plasma activated chemical vapor deposited DLC at a thickness of between about 0.5-5.0 micrometers. ### Claim 17 A semiconductor device comprising: a carrier; a chip including a first face and a second face opposite the first face, the first face coupled to the carrier and the second face including an active area of the chip, and a bond pad disposed over the second face in electrical communication with the active area of the chip; and amorphous carbon means disposed between the active area of the chip and the bond pad for minimizing connector stress at the active area of the chip when bonding an electrical connector to the bond pad; wherein the amorphous carbon means comprises an electrical insulator. ### Claim 18 (depends on 17) The semiconductor device of claim 17, wherein the amorphous carbon means is deposited to have a thickness of between about 5 nanometers-5 micrometers. ### Claim 19 (depends on 17) The semiconductor device of claim 17, wherein the amorphous carbon means comprises an element from groups 4-6 of the periodic table of elements, nitrides of an element from groups 4-6, borides of an element from groups 4-6, and carbides of an element from groups 4-6. ### Claim 20 A die package comprising: a carrier including contact pins; a chip including a first face and a second face opposite the first face, the first face coupled to the carrier and the second face including an active area of the chip, and a bond pad disposed over the second face in electrical communication with the active area of the chip; a connector extending between one of the contact pins and the bond pad; wherein the chip includes a ceramic inorganic material disposed between the active area of the chip and the bond pad, the ceramic inorganic material configured to minimize stress at the active area of the chip when connecting the connector to the bond pad. ### Claim 21 (depends on 20) The die package of claim 20, wherein the carrier comprises one of a leadframe, a ceramic carrier, and a printed circuit board, and the ceramic inorganic material comprises a hardness greater than the hardness of tungsten. ### Claim 22 (depends on 21) The die package of claim 21, wherein the ceramic inorganic material comprises diamond-like carbon having a Vickers hardness of between about 4000-10000 Kgforce/mm2. ### Claim 23 (depends on 20) The die package of claim 20, wherein the ceramic inorganic material comprises an electrical insulator. ### Claim 24 (depends on 20) The die package of claim 20, wherein the ceramic inorganic material comprises diamond-like carbon having an amorphous carbon having an sp3 lattice structure. ### Claim 25 (depends on 20) The die package of claim 20, wherein the ceramic inorganic material comprises one of a tetrahedral amorphous carbon and a cubic boron nitride. ### Claim 26 (depends on 1) The integrated circuit of claim 1, wherein the ceramic inorganic stress-buffering layer comprises a Vickers hardness of between about 4000-10000 Kgforce/mm2. ### Claim 27 (depends on 13) The semiconductor device of claim 13, wherein the chip comprises chip sides extending between the first and second faces, the carbon stress-buffering layer not disposed on the chip sides.