# US 7,612,348 B1 · Transverse magnetic field voltage isolator > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,612,348 B1 - Document ID: US7612348B1 - Status: Granted - Kind: B1 - Application number: 12/125,863 - Filed: 2008-05-22 - Granted: 2009-11-03 - Earliest claimed: 2004-06-30 - Assignees: KLA-Technologies Corporation - Inventors: Alexander Jozef Gubbens; Niles Kenneth MacDonald; Mehran Nasser-Ghodsi; Rudy Flores Garcia; Doug Keith Masnaghetti - Web page: https://patentgrep.com/patent/US7612348B1 ## CPC - C09K 11/773: {with zinc or cadmium} - H01J 2237/038: Insulating - H01J 2237/16: Vessels - H01J 2237/26: Electron or ion microscopes - C09K: MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field across its passageway, which reduces the potential energy of charged particles (e.g., electrons) passing through the passageway. The voltage-isolating passageway includes a passageway and at least two magnets. The passageway has two openings and the two magnets are positioned along opposite and exterior surfaces of the passageway wherein the first and second magnets impose a magnetic field in a transverse direction with respect to a lengthwise axis of the passageway. In one embodiment, each of the passageways have small diameters and transfer gases at small flow rates. A support structure secures the passageways and magnets in position relative to each other and a magnetic shield encases the components to prevent the magnetic field from affecting external components. ## Claims ### Claim 1 A voltage-isolating apparatus comprising: at least two passageways, each passageway having two openings wherein each opening is configured to be connected to a vacuum pump and a vacuum chamber and capable of being sealed such that a low pressure environment can be sustained within each passageway, each passageway being suitable for transferring gas at a relatively low flow rate, and each passageway is configured to be connected to the same vacuum pump and the same vacuum chamber; and a first and a second magnet positioned along opposite and exterior surfaces of each of the passageways wherein the first and second magnets impose a magnetic field in a transverse direction with respect to a lengthwise axis of each of the passageways, the transverse magnetic field tending to reduce the potential energy of charged particles traveling through each of the passageways. ### Claim 2 (depends on 1) A voltage-isolating apparatus as recited in claim 1 wherein the first and second magnets are oriented such that opposite poles face each other across the passageway. ### Claim 3 (depends on 1) A voltage-isolating apparatus as recited in claim 1 further comprising a fifth and a sixth magnet that are positioned along opposite and exterior surfaces of the passageways, wherein the first and second magnet are positioned at top and bottom regions of the voltage-isolating apparatus, respectively, and the fifth and sixth magnet are positioned at opposing side regions of the voltage-isolating apparatus. ### Claim 4 A method for voltage isolation comprising: guiding a gas along at least two pathways such that the gas flows from a vacuum chamber to a vacuum pump at a relatively low flow rate, where each pathway is configured to be connected to the vacuum chamber and the vacuum pump; and directing a magnetic field through each of the pathways in a transverse direction with respect to a lengthwise axis of each of the pathways in order to reduce the potential energy of charged particles within the gas as the gas travels through each of the pathways. ### Claim 5 (depends on 4) A method as recited in claim 4 wherein the flow rate is approximately in the range of 0.5-10 sccm. ### Claim 6 (depends on 4) A method as recited in claim 4 further comprising: providing at least two continuous tubular structures that each define a respective one of the pathways. ### Claim 7 (depends on 6) A method as recited in claim 6 wherein the outer diameter of each tubular structure is approximately in the range of 0.0625-0.25 inches. ### Claim 8 (depends on 6) A method as recited in claim 6 wherein the operation of directing a magnetic field is performed by a first and a second magnet positioned along opposite and exterior surfaces of each of the continuous tubular structures. ### Claim 9 (depends on 6) A method as recited in claim 6 further comprising: configuring each of the continuous tubular structures to substantially run along side of each other. ### Claim 10 (depends on 8) A method as recited in claim 8 further comprising: securing each of the continuous tubular structures and each of the magnets in position with respect to each other using a support structure. ### Claim 11 (depends on 10) A method as recited in claim 10 further comprising: containing the magnetic field within a magnetic shield to prevent exposure of external devices to the magnetic field, the magnetic shield being configured to enclose the support structure, each of the continuous tubular structures, and each of the magnets. ### Claim 12 (depends on 4) A method as recited in claim 4 wherein the first external component is a gas-feed system. ### Claim 13 A voltage-isolating apparatus comprising: at least two passageways, each passageway having two openings wherein each opening is configured to be connected to a vacuum pump and a vacuum chamber and capable of being sealed such that a low pressure environment can be sustained within each passageway, each passageway being suitable for transferring gas at a relatively low flow rate, and each passageway is configured to be connected to the same vacuum pump and the same vacuum chamber; at least two magnets, where a first and a second magnet are positioned along opposite and exterior surfaces of each of the passageways wherein the first and second magnets impose a magnetic field in a transverse direction with respect to a lengthwise axis of each of the passageways, the transverse magnetic field tending to reduce the potential energy of charged particles traveling through each of the passageways; a support structure configured for holding the at least two passageways in position relative to each other and relative to the first magnet and the second magnet; a magnetic shield, the magnetic shield including a cylindrical structure configured to surround the support structure, the at least two magnets, and the at least two passageways; and a cap, where the cap includes a magnetic field shielding component configured to lock support structure within the magnetic shield.