# US 7,612,311 B2 · Methods and systems for controlling electric heaters

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 7,612,311 B2
- Document ID: US7612311B2
- Status: Granted
- Kind: B2
- Application number: 11/561,323
- Filed: 2006-11-17
- Published: 2008-05-22
- Granted: 2009-11-03
- Earliest claimed: 2006-11-17
- Assignees: Lam Research Corporation
- Inventors: Peter Norton; John Distinti
- Web page: https://patentgrep.com/patent/US7612311B2

## CPC

- G05B 11/28: using pulse-height modulation; using pulse-width modulation
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)

## Abstract

Systems and methods for controlling a heater to drive a load temperature to approximate a setpoint. At the beginning of each ½ AC cycle, a sigma delta modulation algorithm is computed to determine whether the AC cycle should be turned on or off. The running estimate of the past actual duty cycle is compared to the desired output duty cycle, and the difference between the two is used to adjust the next ½ cycle's output. This results in a pseudo-random pulse sequence output which does not contain significant periodic components that could cause undesirable small periodic thermal ‘ripples’ on the element being heated.

## Claims

### Claim 1

In a plasma processing system, a method for controlling an electric heater, the method comprising:
a) receiving a setpoint temperature;
b) comparing said setpoint temperature with a load temperature, said load temperature representing a temperature measured for a load that is most recently measured;
c) generating a duty cycle command responsive to said comparing;
d) updating said duty cycle command using a cumulative duty cycle error after step c);
e) quantizing said duty cycle command to a PWM (Pulse Width Modulation) signal after step d), said PWM signal comprising a plurality of on pulses and a plurality of off pulses;
f) employing said PWM signal to trigger a solid state relay (SSR) circuit, thereby energizing said electric heater responsive to said PWM signal;
g) interrupting said SSR circuit in accordance with a predefined interval that is less than a 60 Hz AC cycle; and
h) accumulating a duty cycle error into said cumulative duty cycle error after step d), said duty cycle error being a difference between said duty cycle command after said updating and an ideal duty cycle command,
wherein said steps a) through h) are repetitively performed.

### Claim 2 (depends on 1)

The method of claim 1 further comprising adding a value representative of said PWM signal to said cumulative cycle error prior to performing another set of steps a) through h).

### Claim 3 (depends on 1)

The method of claim 1, wherein said predefined interval represents ½ said 60 Hz AC cycle.

### Claim 4 (depends on 1)

The method of claim 1 wherein said predefined interval represents one of ⅓ of said AC cycle and a ⅙ of said 60 Hz AC cycle.

### Claim 5 (depends on 1)

The method of claim 1 wherein said load represents a structure disposed in a plasma processing chamber.

### Claim 6 (depends on 5)

The method of claim 5 wherein said structure represents a substrate being processed in said plasma processing chamber.

### Claim 7 (depends on 1)

The method of claim 1 wherein said structure represents a component of said plasma processing chamber.

### Claim 8

An article of manufacture comprising a program storage medium for storing computer readable code configured for controlling an electrical heater in a plasma processing system, the article of manufacture comprising:
computer readable code for receiving a setpoint temperature;
computer readable code for comparing said setpoint temperature with a load temperature, said load temperature representing a temperature measured for a load that is most recently measured;
computer readable code for generating a duty cycle command responsive to said comparing;
computer readable code for updating said duty cycle command using a cumulative duty cycle error after said generating;
computer readable code for accumulating a duty cycle error into said cumulative duty cycle error after said updating, said duty cycle error being a difference between said duty cycle command after said updating and an ideal duty cycle command;
computer readable code for quantizing said duty cycle command to a PWM (Pulse Width Modulation) signal after said updating, said PWM signal comprising a plurality of on pulses and a plurality of off pulses, wherein said PWM signal is employed to trigger a solid state relay (SSR) circuit, thereby energizing said electric heater responsive to said PWM signal; and
computer readable code for interrupting said SSR circuit in accordance with a predefined interval that is less than a 60 Hz AC cycle.

### Claim 9 (depends on 8)

The article of manufacture of claim 8 further comprising computer readable code for adding a value representative of said PWM signal to said cumulative cycle error prior.

### Claim 10 (depends on 8)

The article of manufacture of claim 8 wherein said predefined interval represents ½ of said 60 Hz AC cycle.

### Claim 11 (depends on 8)

The article of manufacture of claim 8 wherein said predefined interval represents one of ⅓ of said AC cycle and a ⅙ of said 60 Hz C cycle.

### Claim 12 (depends on 8)

The article of manufacture of claim 8 wherein said load represents a structure disposed in a plasma processing chamber.

### Claim 13 (depends on 12)

The article of manufacture of claim 12 wherein said structure represents a substrate being processed in said plasma processing chamber.

### Claim 14 (depends on 8)

The article of manufacture of claim 8 wherein said structure represents a component of said plasma processing chamber.

### Claim 15

An electronic system for controlling an electric heater in a plasma processing system, the electronic system comprising:
logic for receiving a setpoint temperature;
logic for comparing said setpoint temperature with a load temperature, said load temperature representing a temperature measured for a load that is most recently measured;
logic for generating a duty cycle command responsive to said comparing;
logic for updating said duty cycle command using a cumulative duty cycle error after said generating;
logic for accumulating a duty cycle error into said cumulative duty cycle error after said updating, said duty cycle error being a difference between said duty cycle command after said updating and an ideal duty cycle command;
logic for quantizing said duty cycle command to a PWM (Pulse Width Modulation) signal after said updating, said PWM signal comprising a plurality of on pulses and a plurality of off pulses, wherein said PWM signal is employed to trigger a solid state relay (SSR) circuit, thereby energizing said electric heater responsive to said PWM signal;
logic for adding a value representative of said PWM signal to said cumulative cycle error; and
logic for interrupting said SSR circuit in accordance with a predefined interval that is less than a 60 Hz AC cycle, wherein said steps a) through g) are repetitively performed.

### Claim 16 (depends on 15)

The electronic system of claim 15 wherein said predefined interval represents ½ said 60 Hz AC cycle.

### Claim 17 (depends on 15)

The electronic system of claim 15 wherein said predefined interval represents one of ⅓ of said CC cycle and a ⅙ of said 60 Hz AC cycle.

### Claim 18 (depends on 15)

The electronic system of claim 15 wherein said load represents a structure disposed in a plasma processing chamber.

### Claim 19 (depends on 18)

The electronic system of claim 18 wherein said structure represents a substrate being processed in said plasma processing chamber.

### Claim 20 (depends on 15)

The electronic system of claim 15 wherein said structure represents a component of said plasma processing chamber.