# US 7,611,945 B2 · Method and resulting structure for fabricating DRAM capacitor structure

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 7,611,945 B2
- Document ID: US7611945B2
- Status: Granted
- Kind: B2
- Application number: 11/853,347
- Filed: 2007-09-11
- Published: 2008-07-03
- Granted: 2009-11-03
- Earliest claimed: 2006-12-27
- Assignees: Semiconductor Manufacturing International (Shanghai) Corporation
- Inventors: Jeong Gi Kim
- Web page: https://patentgrep.com/patent/US7611945B2

## CPC

- H10D 1/711: {having non-planar surfaces, e.g. formed by texturisation}
- H10B 12/033: {the capacitor extending over the transistor}
- H10B 12/09: {with simultaneous manufacture of the peripheral circuit region and memory cells}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

A method for forming a capacitor structure for a dynamic random access memory device. The method includes forming a device layer overlying a semiconductor substrate, e.g., silicon wafer. The method includes forming a first interlayer dielectric overlying the device layer and forming a via structure within the first interlayer dielectric layer. The method includes forming a first oxide layer overlying the first interlayer dielectric layer and forming a stop layer overlying the first oxide layer. The method includes forming a second oxide layer overlying the first stop layer and forming a trench region through a portion of the second oxide layer, through a portion of the stop layer, and a portion of the second oxide layer. A bottom electrode structure is formed to line the trench region. The bottom electrode structure includes an inner region. The bottom electrode structure is coupled to the via structure. The method includes protecting the bottom electrode structure with a masking layer and selectively removing the second oxide layer to the stop layer, the stop layer acts as an etch stop, to expose an outer region of the bottom electrode structure. The method includes forming a capacitor dielectric layer overlying the outer region of the bottom electrode structure and overlying the inner region of the bottom electrode structure. The method includes forming an upper capacitor plate overlying the capacitor dielectric layer to form a capacitor structure.

## Claims

### Claim 1

A method for forming a capacitor structure for a dynamic random access memory device, the method comprising:
forming a device layer overlying a semiconductor substrate;
forming a first interlayer dielectric overlying the device layer;
forming a via structure within the first interlayer dielectric layer;
forming a first oxide layer overlying the first interlayer dielectric layer;
forming a stop layer overlying the first oxide layer;
forming a second oxide layer overlying the first stop layer;
forming a trench region through a portion of the second oxide layer, through a portion of the stop layer, and a portion of the first oxide layer;
forming a bottom electrode structure to line the trench region, the bottom electrode structure including an inner region, the bottom electrode structure being coupled to the via structure;
protecting the bottom electrode structure with a masking layer, the masking layer filling an entirety of the trench region and overlying the second oxide layer;
selectively removing the second oxide layer to the stop layer, the stop layer acting as an etch stop, to expose an outer region of the bottom electrode structure, while maintaining the masking layer within the trench region;
forming a capacitor dielectric layer overlying the outer region of the bottom electrode structure and overlying the inner region of the bottom electrode structure; and
forming an upper capacitor plate overlying the capacitor dielectric layer to form a capacitor structure.

### Claim 2 (depends on 1)

The method of claim 1 wherein the trench region has an aspect ratio greater than 10 (height to width).

### Claim 3 (depends on 1)

The method of claim 1 wherein the stop layer comprises a silicon nitride layer.

### Claim 4 (depends on 1)

The method of claim 1 further comprising depositing hemispherical grain silicon material overlying the inner region of the bottom electrode after forming the bottom electrode structure and the masking layer is formed within the entirety of the trench region overlying the bottom electrode including the hemispherical grain silicon.

### Claim 5 (depends on 1)

The method of claim 1 wherein the first oxide layer is selected from BPSG, FSG, tetraethyl orthosilicate (TEOS).

### Claim 6 (depends on 1)

The method of claim 1 wherein the second oxide layer is selected from BPSG, FSG, tetraethyl orthosilicate (TEOS).

### Claim 7 (depends on 1)

The method of claim 1 wherein the via structure comprises a plug structure.

### Claim 8 (depends on 1)

The method of claim 1 wherein the selectively removing comprises wet etching using buffered oxide etch.

### Claim 9 (depends on 1)

The method of claim 1 wherein the stop layer comprises a thickness of about 50 to about 100 Angstroms.

### Claim 10 (depends on 1)

The method of claim 1 wherein the upper capacitor plate comprises a polysilicon material.

### Claim 11

A method for forming a plurality of capacitor structures for a dynamic random access memory device, the method comprising:
forming a device layer comprising a plurality of MOS devices overlying a semiconductor substrate;
forming a first interlayer dielectric overlying the device layer;
forming a via structure within the first interlayer dielectric layer, the via structure being coupled to at least one of the MOS devices;
forming a first oxide layer overlying the first interlayer dielectric layer;
forming a stop layer overlying the first oxide layer;
forming a second oxide layer overlying the first stop layer;
forming a trench region through a portion of the second oxide layer, through a portion of the stop layer, and a portion of the first oxide layer, the trench region being defined by a width and length ratio of ten and greater;
forming a bottom electrode structure to line the trench region and coupled to the via structure, the bottom electrode structure including an inner region;
protecting the bottom electrode structure including the hemispherical grain silicon material with a masking layer, the masking layer filling an entirety of the trench region and overlying the second oxide layer;
selectively removing the second oxide layer to the stop layer, the stop layer acting as an etch stop, to expose an outer region of the bottom electrode structure, while maintaining the masking layer within the trench region;
forming a capacitor dielectric layer overlying the outer region of the bottom electrode structure and overlying the inner region of the bottom electrode structure; and
forming an upper capacitor plate overlying the capacitor dielectric layer to form a capacitor structure.

### Claim 12 (depends on 11)

The method of claim 11 wherein the trench region has an aspect ratio greater than 15 (height to width).

### Claim 13 (depends on 11)

The method of claim 11 wherein the stop layer comprises a silicon nitride layer.

### Claim 14 (depends on 11)

The method of claim 11 further comprising depositing hemispherical grain silicon material overlying the inner region of the bottom electrode after forming the bottom electrode structure, the masking layer is formed within the entirety of the trench region overlying the bottom electrode including the hemispherical grain silicon, and the second oxide layer is selectively removed to the stop layer to expose an outer region of the bottom electrode structure, while maintaining the masking layer within the trench region.

### Claim 15 (depends on 11)

The method of claim 11 wherein the first oxide layer is selected from BPSG, FSG, tetraethyl orthosilicate (TEOS).

### Claim 16 (depends on 11)

The method of claim 11 wherein the second oxide layer is selected from BPSG, FSG, tetraethyl orthosilicate (TEOS).

### Claim 17 (depends on 11)

The method of claim 11 wherein the via structure comprises a plug structure.

### Claim 18 (depends on 11)

The method of claim 11 wherein the selectively removing comprises wet etching using buffered oxide etch.

### Claim 19 (depends on 11)

The method of claim 11 wherein the stop layer comprises a thickness of about 50 to about 100 Angstroms.

### Claim 20 (depends on 11)

The method of claim 11 wherein the upper capacitor plate comprises a polysilicon material.