# US 7,611,827 B2 · Photosensitive resin composition, ink jet head using photosensitive resin composition, and process for manufacturing ink jet head

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- Number: US 7,611,827 B2
- Document ID: US7611827B2
- Status: Granted
- Kind: B2
- Application number: 10/577,255
- Filed: 2005-06-24
- Published: 2007-04-12
- Granted: 2009-11-03
- Earliest claimed: 2004-06-28
- Assignees: Canon Kabushiki Kaisha
- Inventors: Hiroe Ishikura; Shoji Shiba; Akihiko Okano
- Web page: https://patentgrep.com/patent/US7611827B2

## CPC

- G03F 7/0392: {the macromolecular compound being present in a chemically amplified positive photoresist composition}
- B41J 2/1603: {of the front shooter type}
- B41J 2/1631: {photolithography}
- B41J 2/1639: {sacrificial molding}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A positive type photosensitive resin composition comprises a polyacrylate resin having, in the structure, at least a structural unit represented by the following general formula (1): wherein X represents a hydroxyl group, an alkylol group having 2 to 4 carbon atoms, or a methylolamino group; R1 and R2 independently represents a hydrogen atom, or an alkyl group having 1 to 3 carbon atoms; R3 represents an alkyl group having 1 to 3 carbon atoms, an alkoxyl group having 1 to 3 carbon atoms, or an aralkyl group having an aryl group or alkyl group with 1 to 2 carbon atoms; n represents a positive integer; and m represents 0 or a positive integer, and a condensable crosslinker.

## Claims

### Claim 1

A process for manufacturing an ink jet head comprising a discharge port for discharging an ink, an ink flow path communicated with said discharge port, and a substrate provided with an energy generating element for generating energy for discharging ink from the discharge port, characterized in that the process comprises:
providing a precursor comprising a first photosensitive resin layer laminated by a second photosensitive resin layer on said substrate, the second photosensitive resin layer including a composition comprising (a) a polyacrylate resin having structural unit represented by the following general formula (1), wherein the first photosensitive resin layer is positioned on the side of the substrate
wherein, X represents a hydroxyl group or a methylolamino group; R1 and R2 independently represent a hydrogen atom, or an alkyl group having 1 to 3 carbon atoms; R3 represents an alkyl group having 1 to 3 carbon atoms, an alkoxyl group having 1 to 3 carbon atoms, or an aralkyl group having an aryl group or alkyl group with 1 to 2 carbon atoms; n represents a positive integer; and m represents 0 or a positive integer, and (b) a compound represented by the following general formula (2)
wherein R1 to R6 independently represents a hydrogen atom, a methylol group, or an alkoxymethyl group to which an alkoxy group having 1 to 4 carbon atoms is bonded; provided that, at least two of R1 to R6 represent methylol groups, or alkoxymethyl groups to which an alkoxy group having 1 to 4 carbon atoms is bonded;
patterning, by a photolithographic process, said second photosensitive resin layer to form a second ink flow path pattern which has a shape of a portion of the ink flow path;
patterning said first photosensitive resin layer to form a first ink flow path pattern which has a shape of another portion of the ink flow path;
providing a coating resin layer for forming the wall of the ink flow path on said first ink flow path pattern and the second flow path pattern;
forming an ink discharge port in the coating resin layer; and
removing the first ink flow path pattern and the second ink flow path pattern to form the ink flow path.

### Claim 2 (depends on 1)

The process for manufacturing an ink jet head according to claim 1 characterized in that the second photosentive resin layer further comprises a photoacid generator.

### Claim 3 (depends on 2)

The process for manufacturing an ink jet head according to claim 2 characterized in that the photoacid generator is at least one selected from the group consisting of aromatic sulfonium salts, aromatic iodonium salts and triazine compounds.

### Claim 4 (depends on 1)

The process for manufacturing an ink jet head according to claim 1, wherein the coating resin contains a curable epoxy compound.

### Claim 5 (depends on 1)

The process for manufacturing an ink jet head according to claim 1, wherein the coating resin contains a cationic photopolymerization initiator.

### Claim 6

A process for manufacturing an ink jet head comprising a discharge port for discharging an ink, an ink flow path communicated with said discharge port, and an energy generating element for generating energy for discharging the ink, characterized in that the process comprises:
preparing a substrate provided with an energy generating element;
forming a first layer on the substrate;
forming a second layer on the first layer,
wherein the second resin layer comprises
a plurality of first compounds, the first compound having one selected from following structural units
wherein m and n represent positive integers, and a compound represented by the following general formula (2)
wherein R1 to R6 independently represents a hydrogen atom, a methylol group, or an alkoxymethyl group to which an alkoxy group having 1 to 4 carbon atoms is bonded; provided that, at least two of R1 to R6 represent methylol groups, or alkoxymethyl groups to which an alkoxy group having 1 to 4 carbon atoms is bonded;
heating the second layer so as to crosslink the plurality of the first compounds each other;
patterning said second layer to form an ink flow path pattern;
patterning said first layer to form an ink flow path pattern;
forming a coating resin layer for forming the wall of the ink flow path, by solvent coating, on said ink flow path pattern;
forming an ink discharge port in the coating resin layer; and
removing the ink flow path pattern to form the ink flow path.

### Claim 7 (depends on 6)

The process for manufacturing an ink jet head according to claim 6, characterized in that said second layer comprises a photoacid generator, and patterning said second layer is performed by irradiating light to said second layer.

### Claim 8 (depends on 7)

The process for manufacturing an ink jet head according to claim 7, characterized in that when said second layer is patterned, said crosslinked portions are decomposed by an acid generated in a reaction of said photoacid generator by irradiating said light to said second layer.

### Claim 9 (depends on 1)

A process according to claim 1, wherein the first photosensitive resin is polymethyl isopropenyl ketone.

### Claim 10 (depends on 1)

A process according to claim 1, wherein the polyacrylate resin having structural unit represented by the following general formula (1) is one selected from following structural units