# US 7,611,758 B2 · Method of improving post-develop photoresist profile on a deposited dielectric film

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- Number: US 7,611,758 B2
- Document ID: US7611758B2
- Status: Granted
- Kind: B2
- Application number: 10/702,049
- Filed: 2003-11-06
- Published: 2005-05-12
- Granted: 2009-11-03
- Earliest claimed: 2003-11-06
- Assignees: Tokyo Electron Limited; International Business Machines Corporation
- Inventors: Noriaki Fukiage; Katherina Babich
- Web page: https://patentgrep.com/patent/US7611758B2

## CPC

- C23C 16/56: After-treatment
- C23C 16/401: {containing silicon}
- C23C 16/45523: {Pulsed gas flow or change of composition over time}
- C23C 16/5096: {Flat-bed apparatus}
- G03F 7/091: {characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement}
- H01J 2237/3321: CVD [Chemical Vapor Deposition]
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A method and apparatus for improving the post-development photoresist profile on a deposited dielectric film. The method includes depositing a TERA film having tunable optical and etch resistant properties on a substrate using a plasma-enhanced chemical vapor deposition process and post processing the TERA film using a plasma process. The apparatus includes a chamber having an upper electrode coupled to a first RF source and a substrate holder coupled to a second RF source; and a showerhead for providing multiple precursors and process gasses.

## Claims

### Claim 1

A method for depositing a material on a substrate, the method comprising:
placing a substrate on a substrate holder in a chamber having a plasma source, wherein the plasma source comprises an RF source coupled to an upper electrode and the substrate holder comprises a bottom electrode coupled to a second RF source;
introducing first processing gases into the chamber using a shower plate assembly coupled to the chamber, wherein the first processing gases include a trimethylsilane (3MS) precursor and Helium (He) gas;
establishing an operating pressure in the chamber, the operating pressure being established at approximately 5 Torr,
depositing a bottom layer portion of a Tunable Etch Resistant ARC (TERA) layer on the substrate, wherein the first processing gases are provided to the chamber, and the RF source is operated at a power level of approximately 800 watts, the second RF source is operated at a power level of approximately 30 watts, the shower plate assembly having a center region, an edge region, and a sub region configured to establish a first flow rate for the 3MS precursor between approximately 0 sccm and approximately 350 sccm and to establish another first flow rate for the He gas between approximately 0 sccm and approximately 600 sccm when the bottom layer portion is deposited;
introducing second processing gasses into the chamber using the shower plate assembly, the second processing gases including the 3MS precursor, CO2 gas, and the He gas;
depositing a top layer portion of the TERA layer on the substrate, wherein the second processing gases are provided to the chamber, and the RF source is operated at a power level of approximately 400 watts, the center region, the edge region, and the sub region being further configured to establish a second flow rate for the 3MS precursor between approximately 0 sccm and approximately 75 sccm to establish a flow rate for the CO2 gas between approximately 0 sccm and approximately 50 sccm and to establish a second flow rate for the He gas between approximately 0 sccm and approximately 600 sccm while depositing the top layer portion;
performing at least one purging process, wherein the RF source is operated at approximately zero watts, an ESC voltage is approximately 0 volts, and the center region, the edge region, and the sub region are further configured to establish a third flow rate for the He gas between approximately 0 sccm and approximately 300 sccm;
performing an evacuation process, wherein the RF source is operated at approximately zero watts, and the operating pressure is established below approximately 2 Torr;
introducing third processing gases into the chamber using the shower head assembly, the third processing gases including CO2 gas, and He gas;
establishing a post-processing pressure in the chamber, the post-processing pressure being established at approximately 2 Torr,
establishing a post-processing plasma in the chamber, wherein the third processing gases are provided to the chamber the RF source is operated at a power level of approximately 30 watts, and the center region, the edge region, and the sub region are further configured to establish a fourth flow rate for the CO2 gas between approximately 0 sccm and approximately 40 sccm and to establish another fourth flow rate for the He gas between approximately 0 sccm and approximately 600 sccm during the post-processing plasma;
modifying a top surface of the top layer portion of the deposited TERA layer by exposing the top layer portion of the deposited TERA layer to the post-processing plasma during the establishing step;
performing a pin up process while the post-processing plasma is established, wherein the substrate is lifted off the substrate holder using one or more lift pins; and
further modifying the top surface of the top layer portion of the deposited TERA layer by exposing the top surface of the top layer portion of the deposited TERA layer to the post-processing plasma during the pin up process step, wherein the modified top surface is created on the top surface of the top layer portion of the deposited TERA layer to prevent a photoresist problem during a subsequent lithographic operation.

### Claim 2 (depends on 1)

The method as claimed in claim 1, wherein the first processing gases, the second processing gases, and/or the third processing gases comprise a hydrogen-containing gas having an additional flow rate ranging from approximately 0.0 sccm to approximately 10000 sccm, wherein the hydrogen-containing gas comprises at least one of H2O and H2.

### Claim 3 (depends on 1)

The method as claimed in claim 1, wherein the first processing gases, the second processing gases, and/or the third processing gases comprise an inert gas having an additional flow rate ranging from approximately 0.0 sccm to approximately 10000 sccm, wherein the inert gas comprises at least one of Ar, and N2.

### Claim 4 (depends on 1)

The method as claimed in claim 1, wherein the
RF source operates in a frequency range from approximately 0.1 MHz. to approximately 200 MHz
and the second RF source operates in a frequency range from approximately 0.1 MHz. to approximately 200 MHz.

### Claim 5 (depends on 1)

The method as claimed in claim 1, wherein the establishing the post-processing plasma step has a lifetime time that varies from approximately 2 seconds to approximately 180 seconds.

### Claim 6 (depends on 1)

The method as claimed in claim 1, wherein
the bottom layer portion comprises a material having a refractive index (n) ranging from approximately 1.5 to approximately 2.5 when measured at a wavelength of at least one of: 248 nm, 193 nm, and 157 nm, and an extinction coefficient (k) ranging from approximately 0.10 to approximately 0.9 when measured at a wavelength of at least one of: 248 nm, 193 nm, and 157 nm.

### Claim 7 (depends on 1)

The method as claimed in claim 1, wherein the depositing of the bottom layer portion of the TERA layer occurs at a rate from approximately 100 A/mm to approximately 10000 A/mm.

### Claim 8 (depends on 1)

The method as claimed in claim 1, wherein a deposition time for the bottom layer portion of the TERA layer ranges from approximately 5 seconds to approximately 180 seconds.

### Claim 9 (depends on 1)

The method as claimed in claim 1, wherein the first processing gases, the second processing gases, and/or the third processing gases
comprises at least one of a silicon-containing precursor and a carbon-containing precursor.

### Claim 10 (depends on 9)

The method as claimed in claim 9, wherein the flow rate of the silicon-containing precursor and/or the carbon-containing precursor ranges from approximately 0.0 sccm to approximately 5000 sccm.

### Claim 11 (depends on 1)

The method as claimed in claim 1, wherein the first processing gases, the second processing gases, and/or the third processing gases further comprises at least one of monosilane (SiH4), tetraethylorthosilicate (TEOS), monomethylsilane (1MS), dimethylsilane (2MS), tetramethylsilane (4MS), octamethylcyclotetrasiloxane (OMCTS), and tetramethylcyclotetrasilane (TMCTS).

### Claim 12 (depends on 1)

The method as claimed in claim 1, wherein the first processing gases, the second processing gases, and/or the third processing gases further comprises at least one of CH4, C2H4, C2H2, C6H6 and C6H5OH.

### Claim 13 (depends on 1)

The method as claimed in claim 1, wherein
the top layer portion comprises material having a refractive index (n) ranging from approximately 1.5 to approximately 2.5 when measured at a wavelength of at least one of: 248 nm, 193 nm, and 157 nm, and an extinction coefficient (k) ranging from approximately 0.10 to approximately 0.9 when measured at a wavelength of at least one of: 248 nm, 193 nm, and 157 nm.

### Claim 14 (depends on 1)

The method as claimed in claim 1, wherein the depositing of the top layer portion of the TERA layer occurs at a rate from approximately 10 A/min to approximately 5000 A/min.

### Claim 15 (depends on 1)

The method as claimed in claim 1, wherein a deposition time for the bottom layer portion of the TERA layer ranges from approximately 5 seconds to approximately 180 seconds.

### Claim 16 (depends on 1)

The method as claimed in claim 1, wherein the first processing gases, the second processing gases, and/or the third processing gases further comprises at least one of tetramethylcyclotetrasilane (TMCTS) tetraethylorthosilicate (TEOS) precursor, a dimethyldimethoxysilane (DMDMOS) precursor, and an octamethylcyclotetrasiloxane (OMCTS) precursor.

### Claim 17 (depends on 1)

The method as claimed in claim 1, wherein the substrate temperature ranges from approximately 0° C. to approximately 500° C. during the depositing of the bottom layer portion of the TERA layer.

### Claim 18 (depends on 1)

The method as claimed in claim 1, wherein a temperature of the shower plate assembly ranges from approximately 0° C. to approximately 500° C.