Materials purification by treatment with hydrogen-based plasma
AssigneeMax-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorsAnastasia Alekseeva, Kirill Kovnir, Pavel Chizhov, Michael Baitinger, Yuri Grin
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Abstract
The present invention relates to a purification method for removing impurities containing oxygen from materials, especially boron, by hydrogen-based plasma treatment. The present procedure allows for efficient removal of oxygen while avoiding a thermal treatment that would substantially change the structure of the treated material, or a treatment leaving a reducing agent within the treated material.
Claims19
A purification method for removing oxygen from a material comprising subjecting a material containing oxygen impurities to a treatment with a hydrogen-based plasma wherein the material is amorphous boron.
Dependencies are inferred from the claim text.