# US 7,611,394 B2 · Method of manufacturing electron-emitting element using catalyst to grow carbon fibers between opposite electrodes

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- Number: US 7,611,394 B2
- Document ID: US7611394B2
- Status: Granted
- Kind: B2
- Application number: 11/676,903
- Filed: 2007-02-20
- Published: 2007-06-21
- Granted: 2009-11-03
- Earliest claimed: 2000-09-01
- Assignees: Canon Kabushiki Kaisha
- Inventors: Shinichi Kawate; Takeo Tsukamoto
- Web page: https://patentgrep.com/patent/US7611394B2

## CPC

- H01J 1/304: Field-emissive cathodes
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- H01J 9/025: {of field emission cathodes}
- H01J 31/127: {using large area or array sources, i.e. essentially a source for each pixel group}
- H01J 2201/30469: Carbon nanotubes (CNTs)
- Y10S 977/842: for carbon nanotubes or fullerenes
- Y10S 977/843: Gas phase catalytic growth, i.e. chemical vapor deposition
- Y10S 977/939: Electron emitter, e.g. spindt emitter tip coated with nanoparticles
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

Provided are electron-emitting devices, electron sources, and image-forming apparatus improved in electron emission efficiency and in convergence of trajectories of emitted electrons. An electron-emitting device has a first electrode and a second electrode placed in opposition to each other with a gap between first and second electrodes on a surface of a substrate, and a plurality of fibers electrically connected to the first electrode and containing carbon as a main component, and the fibers are placed on a surface of the first electrode facing the second electrode.

## Claims

### Claim 1

A method for manufacturing an electron-emitting device comprising steps of:
preparing a substrate provided with a first electrode and a second electrode disposed in opposition to each other sandwiching a gap between the first and second electrodes;
forming a first layer on the first electrode and covering the first layer with a second layer of a material from which a fiber containing carbon can hardly be grown rather than a side of the first layer facing the second electrode so that the side of the first layer facing the second electrode is exposed; and
applying a catalyst to the side of the first layer facing the second electrode and forming the fiber containing carbon on the side of the first layer facing the second electrode.

### Claim 2 (depends on 1)

The method for manufacturing the electron-emitting device according to claim 1,
wherein the second layer is formed of at least one of Ta, Cr, Au, Ag, Pt and a material constituting the catalyst.

### Claim 3 (depends on 1)

The method for manufacturing the electron-emitting device according to claim 1,
wherein the catalyst is formed of Fe, Co, Pd, Ni or an alloy of materials selected from Fe, Co, Pd, Ni.

### Claim 4 (depends on 1)

The method for manufacturing the electron-emitting device according to claim 1,
wherein the first layer is formed of a mixture of Ti and an oxide of Ti, a titanium oxide semiconductor, a mixture of Zr and an oxide of Zr, a zirconium oxide semiconductor, a mixture of Nb and an oxide of Nb, or a niobium oxide semiconductor.

### Claim 5 (depends on 1)

The method for manufacturing the electron-emitting device according to claim 1,
wherein the first layer is constituted of a semiconductor of an oxygen deficient type formed from an oxide of Ti, Zr or Nb.