# US 7,611,318 B2 · Overhead transfer flange and support for suspending a substrate carrier

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- Number: US 7,611,318 B2
- Document ID: US7611318B2
- Status: Granted
- Kind: B2
- Application number: 10/764,820
- Filed: 2004-01-26
- Published: 2005-02-24
- Granted: 2009-11-03
- Earliest claimed: 2003-01-27
- Assignees: Applied Materials, Inc.
- Inventors: Michael R. Rice; Martin R. Elliott; Robert B. Lowrance; Jeffrey C. Hudgens; Eric A. Englhardt
- Web page: https://patentgrep.com/patent/US7611318B2

## CPC

- H10P 72/3218: {Conveying cassettes, containers or carriers}
- H10P 72/3221: {Overhead conveying}
- H10P 72/3404: {Storage means}
- H10P 72/3411: {involving loading and unloading of wafers}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.

## Claims

### Claim 1

An apparatus for use in supporting a substrate carrier comprising:
an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support of an overhead transfer conveyor, the overhead transfer flange having:
a flange plate adapted to couple to the substrate carrier;
a first side;
a second side opposite the first side that is wider than the first side;
a third side extending from the first side to the second side and including a blade adapted to engage supporting features of the overhead carrier support; and
a fourth side opposite the third side extending from the first side to the second side and including a blade adapted to engage supporting features of the overhead carrier support;
wherein the blades of the third side and the fourth side of the overhead transfer flange extend from the first side to the second side along non-parallel paths and wherein a medial surface of each blade forms an oblique angle with a plane defined by the first, second, third and fourth sides of the transfer flange and wherein the blades of the third side and the fourth side extend down from lower surfaces of the flange plate located adjacent to, and between the blades, and the blades include a blade edge terminating below the lower surfaces.

### Claim 2 (depends on 1)

The apparatus of claim 1 wherein the third side and the fourth side are separated by an angle of about 60 degrees.

### Claim 3 (depends on 1)

The apparatus of claim 1 wherein each blade has a blunted blade edge.

### Claim 4 (depends on 3)

The apparatus of claim 3 wherein each blade has a radiused blade edge.

### Claim 5 (depends on 1)

The apparatus of claim 1 wherein:
the blade of the third side of the overhead transfer flange has a surface that is angled so as to mate with an angled surface of a first supporting feature of the overhead carrier support; and
the blade of the fourth side of the overhead transfer flange has a surface that is angled so as to mate with an angled surface of a second supporting feature of the overhead carrier support.

### Claim 6 (depends on 1)

The apparatus of claim 1 wherein surfaces forming each respective blade are non-parallel to each other.