# US 7,610,814 B2 · Micromechanical device comprising a mobile beam > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,610,814 B2 - Document ID: US7610814B2 - Status: Granted - Kind: B2 - Application number: 11/794,807 - Filed: 2006-02-02 - Published: 2008-06-26 - Granted: 2009-11-03 - Earliest claimed: 2005-02-08 - Assignees: Commissariat a l'Energie Atomique - Inventors: Gatien Fleury; Pierre-Louis Charvet - Web page: https://patentgrep.com/patent/US7610814B2 ## CPC - B81C 1/00666: {Treatments for controlling internal stress or strain in MEMS structures} - B81B 2201/016: having a bridge fixed on two ends and connected to one or more dimples - B81C 2201/0167: by adding further layers of materials having complementary strains, i.e. compressive or tensile strain - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract The micromechanical device comprises a mobile beam attached via the two ends thereof to a rigid frame comprising two arms each having two ends. The ends of an arm are respectively secured to the two ends of the mobile beam. Each arm has a middle part arranged between the two ends of the corresponding arm. A rear face of the middle part of each arm is attached to a base support. The frame comprises at least one stressed element enabling the state of stress of the beam to be adjusted. The stressed element can be centered between the front face and the rear face of the corresponding arm. The frame can comprise pairs of front and rear stressed elements arranged facing one another respectively on the front face and on the rear face of the arms. ## Claims ### Claim 1 A micromechanical device comprising: a base support; an annular frame parallel to the base support; a mobile beam having two ends and forming a portion of the micromechanical device that can sag, the beam being attached via the two ends thereof to the annular frame, the beam having a predetermined stressed state; and means for controlling the sag of the beam, perpendicular to the base support, comprising at least one stressed element belonging to the annular frame and enabling the state of stress of the beam to be adjusted, wherein the annular frame is more rigid than the beam and comprises two arms, each arm of the annular frame having two ends respectively secured to the two ends of the mobile beam and each arm of the annular frame having a middle part arranged between the two ends of the corresponding arm, the arms and the middle parts of the arms presenting a front face and a rear face, the rear face of the middle part of each arm being attached to the base support and the ends of the arms being free from attachment to the base support. ### Claim 2 (depends on 1) The device according to claim 1, wherein the stressed element is formed by a tensile stressed thin layer. ### Claim 3 (depends on 1) The device according to claim 1, wherein the stressed element is formed by a compressive stressed thin layer. ### Claim 4 (depends on 1) The device according to claim 1, wherein the stressed element comprises a first actuator. ### Claim 5 (depends on 4) The device according to claim 4, wherein the first actuator is chosen from thermal actuators, piezoelectric actuators and electrostatic, electrostrictive, electromagnetic and magnetostrictive actuators. ### Claim 6 (depends on 4) The device according to claim 4, wherein the first actuator is formed by at least one thin layer. ### Claim 7 (depends on 6) The device according to claim 6, comprising means for applying an electric voltage between two ends of the thin layer constituting the first actuator. ### Claim 8 (depends on 1) The device according to claim 1, wherein the stressed element is centered between the front face and the rear face of the corresponding arm. ### Claim 9 (depends on 1) The device according to claim 1, wherein the annular frame comprises at least one pair of stressed elements, a front element and a rear element disposed facing one another respectively on the front face and on the rear face of the arms. ### Claim 10 (depends on 9) The device according to claim 9, wherein, the front and rear stressed elements of a pair of elements respectively exerting front and rear forces respectively on the front and rear faces of the corresponding arm, the front and rear forces exerted by the elements of a pair of elements are substantially equal. ### Claim 11 (depends on 9) according to claim 9, wherein each arm comprises two pairs of stressed elements, a front element and a rear element, respectively located on each side of the middle part of the corresponding arm. ### Claim 12 (depends on 1) The device according to claim 1, wherein the middle part of each arm comprises a lateral extension attached to the base support. ### Claim 13 (depends on 1) The device according to claim 1, wherein the rear face of the middle part of each arm is arranged on a support block securely affixed to the base support. ### Claim 14 (depends on 1) The device according to claim 1, wherein conducting elements are arranged respectively on a bottom face of the beam and on the base support so as to enable an electric contact to be established between said conducting elements, the device forming a microswitch.