# US 7,610,794 B2 · Particle detection sensor, method for manufacturing particle detection sensor, and method for detecting particle using particle detection sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,610,794 B2 - Document ID: US7610794B2 - Status: Granted - Kind: B2 - Application number: 11/467,320 - Filed: 2006-08-25 - Published: 2007-03-01 - Granted: 2009-11-03 - Earliest claimed: 2005-08-26 - Assignees: Semiconductor Energy Laboratory Co., Ltd. - Inventors: Mayumi Yamaguchi; Konami Izumi; Fuminori Tateishi - Web page: https://patentgrep.com/patent/US7610794B2 ## CPC - G01N 15/1031: by measuring electrical or magnetic effects - G01N 15/1023: {Microstructural devices for non-optical measurement} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A compact sensor with which particles floating in the air can be easily detected. A sensor having a microstructure which detects a detection object by contact is used. A microstructure has an opening to be a detection hole corresponding to the size of a detection object, and a pair of electrodes having a bridge structure are provided thereabove or thereunder so as to partially contact with each other. ## Claims ### Claim 1 A particle detection sensor comprising: a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact; wherein the detector comprises a base having an opening; wherein the base with the opening are over the pair of electrodes; and wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening. ### Claim 2 (depends on 1) A particle detection sensor according to claim 1, wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening. ### Claim 3 (depends on 1) A particle detection sensor according to claim 1, wherein the particle detection sensor further comprises a communication device. ### Claim 4 (depends on 1) A particle detection sensor according to claim 1, wherein the opening is one of openings are arranged in matrix. ### Claim 5 (depends on 1) A particle detection sensor according to claim 1, wherein the pair of electrodes have a bridge structure. ### Claim 6 A particle detection sensor comprising: a detecting element comprising a pair of electrodes and a base having an opening over the pair of electrodes; and a circuit for determining whether the pair of electrodes are in contact or out of contact, wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening. ### Claim 7 (depends on 6) A particle detection sensor according to claim 6, wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening. ### Claim 8 (depends on 6) A particle detection sensor according to claim 6, wherein the particle detection sensor further comprises a communication device. ### Claim 9 (depends on 6) A particle detection sensor according to claim 6, wherein the opening is one of openings are arranged in matrix. ### Claim 10 (depends on 6) A particle detection sensor according to claim 6, wherein the pair of electrodes have a bridge structure. ### Claim 11 A particle detection sensor comprising: a detector for detecting a detection object by determining whether the pair of electrodes are in contact or out of contact; wherein the detector comprises: an insulating layer; a pair of electrodes over the insulating layer; and a base having an opening over the pair of electrodes, wherein one of the pair of electrodes overlaps with the other of the pair of electrodes under the opening. ### Claim 12 (depends on 11) A particle detection sensor according to claim 11, wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening. ### Claim 13 (depends on 11) A particle detection sensor according to claim 11, wherein the particle detection sensor further comprises a communication device. ### Claim 14 (depends on 11) A particle detection sensor according to claim 11, wherein the opening is one of openings are arranged in matrix. ### Claim 15 (depends on 11) A particle detection sensor according to claim 11, wherein the pair of electrodes have a bridge structure. ### Claim 16 A particle detection sensor comprising: a detecting element comprising: an insulating layer; a pair of electrodes over the insulating layer; and a base having an opening over the pair of electrodes; and a circuit for determining whether the pair of electrodes are in contact or out of contact. ### Claim 17 (depends on 16) A particle detection sensor according to claim 16, wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening. ### Claim 18 (depends on 16) A particle detection sensor according to claim 16, wherein the particle detection sensor further comprises a communication device. ### Claim 19 (depends on 16) A particle detection sensor according to claim 16, wherein the opening is one of openings are arranged in matrix. ### Claim 20 (depends on 16) A particle detection sensor according to claim 16, wherein the pair of electrodes have a bridge structure. ### Claim 21 A particle detection sensor comprising: a detector, wherein the detector comprises at least one conductor capable of transforming and a base with an opening; and wherein the one conductor is under the base and the opening. ### Claim 22 (depends on 21) A particle detection sensor according to claim 21, wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening. ### Claim 23 (depends on 21) A particle detection sensor according to claim 21, wherein the particle detection sensor further comprises a communication device. ### Claim 24 (depends on 21) A particle detection sensor according to claim 21, wherein the opening is one of openings are arranged in matrix. ### Claim 25 (depends on 21) A particle detection sensor according to claim 21, wherein the pair of electrodes have a bridge structure. ### Claim 26 A particle detection sensor comprising: a detector for detecting a detection object by determining whether a pair of electrodes are in contact or out of contact; wherein the detector comprises a base having an opening; and wherein the base with the opening are over the pair of electrodes. ### Claim 27 (depends on 26) A particle detection sensor according to claim 26, wherein the particle detection sensor further comprises an intake unit for reducing pressure in the opening, which is connected to the opening. ### Claim 28 (depends on 26) A particle detection sensor according to claim 26, wherein the particle detection sensor further comprises a communication device. ### Claim 29 (depends on 26) A particle detection sensor according to claim 26, wherein the opening is one of openings are arranged in matrix. ### Claim 30 (depends on 26) A particle detection sensor according to claim 26, wherein the pair of electrodes have a bridge structure.