# US 7,610,673 B2 · Method of manufacturing a vertical recording magnetic head

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- Number: US 7,610,673 B2
- Document ID: US7610673B2
- Status: Granted
- Kind: B2
- Application number: 11/098,223
- Filed: 2005-04-04
- Published: 2005-10-06
- Granted: 2009-11-03
- Earliest claimed: 2004-04-05
- Assignees: TDK Corporation
- Inventors: Toru Takahashi
- Web page: https://patentgrep.com/patent/US7610673B2

## CPC

- G11B 5/1278: {specially adapted for magnetisations perpendicular to the surface of the record carrier}
- Y10T 29/49032: Fabricating head structure or component thereof
- Y10T 29/49043: Depositing magnetic layer or coating
- Y10T 29/49046: with etching or machining of magnetic material
- Y10T 29/49048: Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T 29/49052: by etching
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A vertical recording magnetic head and a method of manufacturing the same is provided. The magnetic head includes a main magnetic pole layer on a surface opposite to a recording medium and a pair of neck height markers which is exposed on the surface around the main magnetic pole layer and which indicates a neck height position of the main magnetic pole layer by way of inter-exposure area ratios. The neck height markers have one cross sections that increases and the other that decreases even though the cross sections in a plane parallel to the surface are oriented toward forward or backward directions in a neck height direction. The neck height markers have the same cross sections at a specific cross sectional position parallel to the surface.

## Claims

### Claim 1

A method of manufacturing a vertical recording magnetic head including a main magnetic pole layer formed with a track width on a surface opposite to a recording medium, the method comprising the steps of:
forming a pair of neck height markers so that when a plane, that intersects the pair of neck height markers, moves from a shallow side to a deep side, an area of a portion of the plane that intersects the first of the pair of neck height markers increases while an area of a portion of the plane that intersects the second of the pair of neck height markers decreases, wherein
the first and the second of the pair of neck height markers are disposed spaced apart and not in contact with each other
the first of the pair of neck height markers has a first side in a cross section perpendicular to the surface opposite to the recording medium and parallel to the direction in which the first and the second of the pair of neck height markers are separated, the second of the pair of neck height markers has a second side in the cross section perpendicular to the surface opposite to the recording medium and parallel to the direction in which the first and the second pair of neck height markers are separated, and
the first side and the second side face each other and are in parallel; and
controlling a neck height position of the main magnetic pole layer based on exposure area ratios of the pair of neck height markers in the surface opposite to the recording medium.

### Claim 2 (depends on 1)

The method of manufacturing a vertical recording magnetic head according to claim 1, the vertical recording magnetic head further including a yoke portion formed successively to the main magnetic pole layer so as to extend in a direction further away from the surface opposite to the recording medium and having a width which becomes wider as the distance from the surface opposite to the recording medium becomes greater.

### Claim 3 (depends on 1)

The method of manufacturing a vertical recording magnetic head according to claim 1, further comprising polishing the surface opposite to the recording medium in the neck height direction such that a surface to be polished becomes parallel to the surface opposite to the recording medium before controlling the neck height position.

### Claim 4

A method of manufacturing a vertical recording magnetic head including a main magnetic pole layer formed with a track width on a surface opposite to a recording medium, the method comprising the steps of:
forming a pair of neck height markers so that when a plane, that intersects the pair of neck height markers, moves from a shallow side to a deep side, an area of a portion of the plane that intersects the first of the pair of neck height markers increases while an area of a portion of the plane that intersects the second of the pair of neck height markers decreases, wherein
the first and the second of the pair of neck height markers are disposed spaced apart and not in contact with each other,
the first of the pair of neck height markers has a first side in a cross section perpendicular to the surface opposite to the recording medium and parallel to the direction in which the first and the second of the pair of neck height markers are separated, the second of the pair of neck height markers has a second side in the cross section perpendicular to the surface opposite to the recording medium and parallel to the direction in which the first and the second pair of neck height markers are separated, and
the first side and the second side face each other and are in parallel; and
determining whether a neck height position of the main magnetic pole layer falls within an adequate position range based on exposure area ratios of the pair of neck height markers interposing the main magnetic pole layer therebetween in a surface to be polished.

### Claim 5 (depends on 4)

The method of manufacturing a vertical recording magnetic head according to claim 4,
wherein the pair of height markers has cross sections at a specific cross sectional position parallel to the surface opposite to the recording medium with the cross sections equal to each other, and determining that when the exposure areas of the pair of height markers in the surface opposite to the recording medium are substantially equal to each other, the neck height position of the main magnetic pole layer is adequate.

### Claim 6 (depends on 4)

The method of manufacturing a vertical recording magnetic head according to claim 4, the vertical recording magnetic head including a yoke portion formed successively to the main magnetic pole layer so as to extend in a direction further away from the surface opposite to the recording medium and having a width which becomes wider as the distance from the surface opposite to the recording medium becomes greater.

### Claim 7 (depends on 4)

The method of manufacturing a vertical recording magnetic head according to claim 4, further comprising polishing the surface opposite to the recording medium in the neck height direction such that a surface to be polished becomes parallel to the surface opposite to the recording medium before determining the neck height position.

### Claim 8

A method of manufacturing a vertical recording magnetic head including a main magnetic pole layer formed with a track width on a surface opposite to a recording medium, the method comprising the steps of:
forming a pair of neck height markers so that when a plane, that intersects the pair of neck height markers, moves from a shallow side to a deep side, an area of a portion of the plane that intersects the first of the pair of neck height markers increases while an area of a portion of the plane that intersects the second of the pair of neck height markers decreases, wherein
the first and the second of the pair of neck height markers are disposed spaced apart and not in contact with each other,
the first of the pair of neck height markers has a first side in a cross section perpendicular to the surface opposite to the recording medium and parallel to the direction in which the first and the second of the pair of neck height markers are separated, the second of the pair of neck height markers has a second side in the cross section perpendicular to the surface opposite to the recording medium and parallel to the direction in which the first and the second pair of neck height markers are separated, and
the first side and the second side face each other and are in parallel; and
after polishing the surface opposite to the recording medium to define a size of a height direction of the read element, determining whether a neck height position of the main magnetic pole layer falls within an adequate range based on exposure area ratios of the pair of neck height markers exposed on the surface to be polished.

### Claim 9 (depends on 8)

The method of manufacturing a vertical recording magnetic head according to claim 8,
wherein the pair of height markers has cross sections at a specific cross sectional position parallel to the surface opposite to the recording medium with the cross sections equal to each other, and determining that when the exposure areas of the pair of height markers in the surface opposite to the recording medium are substantially equal to each other, the neck height position of the main magnetic pole layer is adequate.

### Claim 10 (depends on 8)

The method of manufacturing a vertical recording magnetic head according to claim 8, the vertical recording magnetic head further including a yoke portion formed successively to the main magnetic pole layer so as to extend in a direction further away from the surface opposite to the recording medium and having a width which becomes wider as the distance from the surface opposite to the recording medium becomes greater.

### Claim 11 (depends on 8)

The method of manufacturing a vertical recording magnetic head according to claim 8, wherein the surface opposite to the recording medium in the neck height direction is polished such that a surface to be polished becomes parallel to the surface opposite to the recording medium.