# US 7,610,177 B2 · Manufacturing execution system, equipment interface and method of operating a manufacturing execution system

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- Number: US 7,610,177 B2
- Document ID: US7610177B2
- Status: Granted
- Kind: B2
- Application number: 11/588,833
- Filed: 2006-10-27
- Published: 2008-05-01
- Granted: 2009-10-27
- Earliest claimed: 2006-10-27
- Assignees: Hewlett-Packard Development Company, L.P.
- Inventors: Jayaraman Subramanian; Akhauri Prakash Kumar
- Web page: https://patentgrep.com/patent/US7610177B2

## CPC

- G06Q 10/06: Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q: INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR

## Abstract

A manufacturing execution system for manufacturing a product is provided. The manufacturing execution system includes a manufacturing execution plan having a set of manufacturing steps to be executed for manufacturing the product, a planning component for determining a data collection plan of data to be collected during the execution of one of the manufacturing steps, a service interface for providing the data collection plan in response to a service request, and a database for storing data that has been collected in accordance with the determined data collection plan.

## Claims

### Claim 1

A manufacturing execution system comprising:
a manufacturing execution plan indicative of manufacturing steps to be executed for manufacturing a product,
a planning component for determining a context-specific data collection plan for data to be collected during execution of at least one of the manufacturing steps,
a service interface for providing the data collection plan in response to a service request,
a database for storing data that has been collected in accordance with a context-specific data collection plan; and
an analytical component for analytically processing the data stored in the database, the planning component being operable to determine a modified context-specific data collection plan depending on a result of the analytical processing,
wherein the modified context-specific data collection plan is provided in response to a subsequent service request relating to the same context as a previous service request that resulted in the modification of the context-specific data collection plan.

### Claim 2 (depends on 1)

The manufacturing execution system of claim 1, the context-specific data collection plan being specified by a set of objects.

### Claim 3 (depends on 1)

The manufacturing execution system of claim 1, the context-specific data collection plan being a predefined default data collection plan.

### Claim 4 (depends on 1)

The manufacturing execution system of claim 1, the modified context-specific data collection plan being provided by replacing or modifying at least one of the objects of the set of objects.

### Claim 5 (depends on 1)

The manufacturing execution system of claim 1, further comprising a storage component for storing a predefined criterion and an action related to the criterion, wherein the action is triggered if the predefined criterion is not met by the data.

### Claim 6 (depends on 5)

The manufacturing execution system of claim 5, the action being a maintenance action for a manufacturing tool used for the manufacturing of the product.

### Claim 7 (depends on 6)

The manufacturing execution system of claim 6, the service interface being adapted to send a maintenance request indicative of the action to a maintenance workflow manager.

### Claim 8 (depends on 1)

The manufacturing execution system of claim 1, the service interface being adapted to be coupled to a communication network.

### Claim 9

A method of operating a manufacturing execution system, the manufacturing execution system comprising a manufacturing execution plan indicative of manufacturing steps to be executed by manufacturing tools for manufacturing a product, the method comprising:
receiving a request for a context-specific data collection plan from at least one of the manufacturing too1s;
determining the context-specific data collection plan for data to be collected during execution of one of the manufacturing steps depending on the context of the one of the manufacturing steps;
sending the context-specific data collection plan to the at least one of the manufacturing tools in response to the request;
acquiring data in accordance with the data collection plan;
processing the acquired data to provide a result; and
determining a modified data collection plan depending on the result,
wherein the modified data collection plan is sent to a requester in response to a subsequent service request relating to the same context.

### Claim 10 (depends on 9)

The method of claim 9, wherein the context-specific data collection plan is sent to the at least one of the manufacturing tools via an interface.

### Claim 11 (depends on 9)

The method of claim 9, the context-specific data collection plan being a default data collection plan.

### Claim 12 (depends on 9)

The method of claim 9, further comprising triggering an action that is assigned to a predefined criterion if the acquired data does not meet the predefined criterion.

### Claim 13 (depends on 12)

The method of claim 12, the action being a maintenance action for maintenance of the one of the manufacturing tools.

### Claim 14 (depends on 9)

The method of claim 9, wherein the data collection plan is provided as an extended markup language (XML) document.

### Claim 15 (depends on 9)

The method of claim 9, wherein the product is selected from a group comprising semiconductor products, automotive products, pharmaceutical products, solar cells, electronic devices, hard discs, consumer electronics products, and integrated electronic circuits.

### Claim 16 (depends on 9)

A computer program product comprising computer executable instructions for performing a method in accordance with claim 9.
