# US 7,610,111 B2 · Method and system for wafer lot order

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- Number: US 7,610,111 B2
- Document ID: US7610111B2
- Status: Granted
- Kind: B2
- Application number: 11/705,636
- Filed: 2007-02-13
- Published: 2008-08-14
- Granted: 2009-10-27
- Earliest claimed: 2007-02-13
- Assignees: TECH Semiconductor Singapore Pte Ltd
- Inventors: Cheng Lin; Nurulhuda Binte Jumahri
- Web page: https://patentgrep.com/patent/US7610111B2

## CPC

- G05B 19/41865: {characterised by job scheduling, process planning, material flow}
- G05B 2219/32265: Waiting, queue time, buffer
- G05B 2219/32266: Priority orders
- G05B 2219/45031: Manufacturing semiconductor wafers
- Y02P 90/02: Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
- Y02P 90/80: Management or planning
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

Methods and systems for wafer lot ordering using including estimation of allowable queue time based on utilization loss and rework percentage have been achieved. The method invented comprises steps of ranking lots, allocating equipment to the exit step of queue time, calculating and determining the optimal allowable queue time based on utilization loss and rework percentage, calculating the next available time for equipment, calculating earliest release time, and releasing lot/batch and pre-assign it to the equipment at exit step. The present invention can be applied to other manufacturing lines than semiconductor manufacturing.

## Claims

### Claim 1

A method to establish a wafer lot order of a semiconductor manufacturing line by controlling queue time of wafer lots, comprising the steps of
(1) ranking lots of semiconductor wafers waiting at gate step of queue time control and ordering said ranked lots on a lot list;
(2) allocating equipment to an exit step of queue time control and ranking said equipment according to priority on an equipment list;
(3) selecting equipment having highest priority as current equipment;
(4) selecting a lot having highest priority;
(5) checking a resource and process constraint database if said equipment selected is qualified to run said lot selected and if resources required are available and select another equipment as current equipment from said equipment list if said check is negative;
(6) calculating minimal batch size if the equipment of said exit step is a batch tool;
(7) determining optimal allowable queue time of said lot selected based on utilization loss and rework percentage;
(8) calculating the earliest release time for the equipment selected; and
(9) releasing the lot selected and assigning it to the equipment selected if the current time is not later than the calculated earliest release time otherwise select the next lot on the lot list and go to step (5), if there are no more lots on the lot list go to exit.

### Claim 2 (depends on 1)

The method of claim 1 wherein all lots are ranked according their priority.

### Claim 3 (depends on 2)

The method of claim 2 wherein said priority is defined using a composite rule of Bottleneck Pull rule and Output Driven rule.

### Claim 4 (depends on 1)

The method of claim 1 wherein said allocation of equipment is performed by excluding equipment being down and equipment going to preventive maintenance after finishing lots already assigned to them.

### Claim 5 (depends on 1)

The method of claim 1 wherein said ranking of equipment is performed using a wafer move target and available work-in-process, wherein said wafer move target is the difference between target downstream work-in-process required to meet the output target and actual downstream work-in-process.

### Claim 6 (depends on 5)

The method of claim 5 wherein an algorithm to perform said ranking is installed in a Computer Integrated Manufacturing System.

### Claim 7 (depends on 1)

The method of claim 1 wherein said optimal allowable queue time is determined by offline simulation.

### Claim 8 (depends on 7)

The method of claim 7 wherein said offline simulation is performed in different simulation runs with time window constraint and different allowable queue time settings.

### Claim 9 (depends on 8)

The method of claim 8 wherein simulated utilization loss percentages and rework percentages are collected for each allowable queue time setting.

### Claim 10 (depends on 9)

The method of claim 9 wherein said simulated utilization loss percentages and rework percentages are the basis of an user defined objective function to determine said optimal allowable queue time setting.

### Claim 11 (depends on 10)

the method of claim 10 wherein said objective function defines a trade-off between utilization loss percentage and rework percentage, which is determined by Manufacturing and capacity planning providing a high weightage for rework percentage for those queue time steps which can not afford rework and providing a high weightage for utilization loss for those queue time steps with very tight capacity.

### Claim 12 (depends on 1)

The method of claim 1 wherein said optimal allowable queue time is determined by online simulation.

### Claim 13 (depends on 12)

The method of claim 12 wherein real time work-in-process profiles and equipment states are fed to online simulation model.

### Claim 14 (depends on 1)

The method of claim 1 wherein, if an exit step of queue time is a batch process, more than one lot are assigned to a batch and batch priority is equal to the highest priority of the lots belonging to the batch.

### Claim 15 (depends on 14)

The method of claim 14 wherein a batching algorithm determines optimal batch size to minimize average waiting cost using information of future lots arrivals.

### Claim 16 (depends on 1)

The method of claim 1 wherein said calculation of earliest release time is performed using said optimal allowable queue time and the result of a calculation of a next available time of a equipment selected.

### Claim 17 (depends on 16)

The method of claim 16 wherein said calculation of a next available time of an equipment selected comprises steps of:
(1) selecting equipment having highest priority from said equipment list as current equipment;
(2) selecting a lot as current lot from top of a lot list assigned to said current equipment;
(3) checking if arrival time of said current lot is later than said next available time of current equipment and, if the check is positive, defining next available time of said current equipment=said arrival time of the current lot+raw process time of said current lot, otherwise defining next available time of said current equipment=next available time of said current equipment+raw process time of said current lot;
(4) checking if there are more lots on said lot list and, if positive, selecting next lot on the lot list as current lot and go to step (3), otherwise, checking if there are more equipments on said equipment list and, if positive, selecting next equipment as current equipment from said equipment list and go to step (2), otherwise go to exit.

### Claim 18 (depends on 16)

The method of claim 16 wherein, in case only one exit tool has to be considered, the earliest release time is calculated using the equation:
earliest release time=next available time of exit tool−raw process time of current lot-allowable queue time.

### Claim 19 (depends on 16)

The method of claim 16 wherein, in case the lots have to go to a first exit tool and then a defined second exit tool and queue time constraints exist between both exit tools, the earliest release time is calculated using the equation:
ERT=max(release time 1, release time 2),
wherein
release time 1=NAT(ET1)−RPT−AQT1, and
release time 2=NAT(ET2)−AQTL−RPT(1)−RPT−AQT(2),
wherein NAT (ET1) represents the next available time for exit tool1, NAT(ET2) represents the next available time for exit tool2, RPT represents the raw process time of the gate tool, RPT(1) represents the raw process time of exit tool 1, AQT(1) represents the allowable queue time between gate and exit tool 1, and AQT(2) represents the allowable queue time between exit tool 1 and exit tool 2.

### Claim 20 (depends on 16)

The method of claim 16 wherein, in case the lots have to go to either a first exit tool or to a second exit tool and queue time constraints exist between gate tool and both exit tools, the earliest release time is calculated using the equation:
ERT=max(release time 1, release time 2),
wherein
release time 1=NAT(ET1)−RPT−AQT(1), and
release time 2=NAT(ET2)−RPT−AQT(2),
wherein NAT(ET1) represents the next available time for exit tool 1, NAT(ET2) represents the next available time for exit tool 2, RPT represents the raw process time of the gate tool, AQT(1) represents the allowable queue time between gate and exit tool 1, and AQT(2) represents the allowable queue time between gate and exit tool 2.

### Claim 21 (depends on 1)

The method of claim 1 wherein queue time control is performed decentrally between each pair of a gate step and an exit step having time constraints.

### Claim 22 (depends on 1)

The method of claim 1 wherein queue time control is performed centrally by one control unit for a manufacturing line as a whole.

### Claim 23 (depends on 1)

The method of claim 1 wherein said assignment of a lot to an equipment selected can be modified in case the equipment selected is not available in the meantime until the lot arrives at its exit.

### Claim 24

A system to establish a wafer lot order of a semiconductor manufacturing line by controlling queue time of wafer lots, comprising:
means to create a list of all production lots waiting at a gate step of queue time control, wherein said lots are ranked according their priority;
means to create a list of all manufacturing equipments allocated to exit steps of queue time control, wherein said equipments are ranked according their priority;
means of a resource and process constraint database, which is used to check if said manufacturing equipments are qualified to run a production lot and if said equipment has production resources required for said lot;
means to determine optimal allowable queue time by running a simulation with different allowable queue time settings of said production lots considering utilization loss and rework required;
means to calculate earliest release time for production lots based on said optimal allowable queue time and based on calculated next available time of exit equipment; and
means to release and to assign production lots to manufacturing equipment.

### Claim 25 (depends on 24)

The system of claim 24 wherein said queue time control is performed by a computer decentrally between each pair of a gate step and an exit step having time constraints.

### Claim 26 (depends on 24)

The system of claim 24 wherein said queue time control is performed by one computer centrally for the semiconductor manufacturing line as a whole.