# US 7,609,931 B2 · Planar waveguide structure with tightly curved waveguides

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 7,609,931 B2
- Document ID: US7609931B2
- Status: Granted
- Kind: B2
- Application number: 11/473,242
- Filed: 2006-06-23
- Published: 2007-02-08
- Granted: 2009-10-27
- Earliest claimed: 2003-04-18
- Assignees: Enablence Inc.
- Inventors: Yury Logvin; Serge Grabtchak; Kirill Pimenov
- Web page: https://patentgrep.com/patent/US7609931B2

## CPC

- G02B 6/125: Bends, branchings or intersections
- G02B 2006/12097: {Ridge, rib or the like}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

Ridge and buried waveguide structures feature a plurality of trenches disposed proximate the waveguides in order to enhance confinement of an optical signal propagating within the waveguide are described. Additionally, an adiabatic transition region where the distance between trenches and waveguide is featured.

## Claims

### Claim 1

A waveguide structure comprising:
a substrate;
an integrated waveguide, defined by a core surrounded by cladding supported by the substrate, comprising:
a first straight waveguide for receiving an optical signal for propagation in a direction of propagation;
a curved waveguide having a local radius of curvature, an input optically coupled to the straight waveguide, and an output; and
a second straight waveguide optically coupled to the output of the curved waveguide and for the optical signal propagated through the first straight waveguide and curved waveguide; and,
a plurality of first trenches spaced apart in the direction of propagation disposed in the cladding along a first side of at least the curved waveguide, the first trenches disposed substantially the same distance from the curved waveguide, the plurality of spaced apart first trenches defining trenched and untrenched sections of the cladding, whereby light in the curved waveguide propagates alternately past trenched and untrenched sections, the trenched sections having a material within where the material has a lower index of refraction than at least one of a waveguide core of the curved waveguide and a waveguide cladding of the curved waveguide, at least some of the plurality of first trenches disposed to provide enhanced confinement of the optical signal in a region proximate the curved waveguide, said enhanced confinement being higher than a confinement of the curved waveguide absent said trenches.

### Claim 2 (depends on 1)

A waveguide structure according to claim 1, further comprising: a plurality of second trenches disposed substantially the same distance from the curved waveguide along an other side of the curved waveguide, the plurality of spaced apart second trenches defining trenched and untrenched sections, whereby light in the curved waveguide propagates alternately past trenched and untrenched sections, the plurality of second trenches having a material therein having a lower index of refraction than at least one of the waveguide core and waveguide cladding, and wherein, at least some of the plurality of second trenches disposed to provide enhanced confinement of the optical signal in a region proximate the curved waveguide, said enhanced confinement being higher than a confinement of the curved waveguide absent said second trenches.

### Claim 3 (depends on 1)

A waveguide structure according to claim 1, wherein the first trenches are arranged in at least one of the arrangements selected from the group consisting of: the length of each of the first trenches is constant, while lengths of the untrenched sections between the first trenches vary; and the lengths of the untrenched sections between each of the adjacent first trenches is constant, while lengths of the first trenches vary.

### Claim 4 (depends on 1)

A waveguide structure according to claim 1, wherein the plurality of first trenches provide a variation in confinement along the waveguide structure by an arrangement selected from the group consisting of: each of the first trenches having different lengths; and the lengths of the untrenched sections between the first trenches being different.

### Claim 5 (depends on 4)

A waveguide structure according to claim 4, wherein the variation of the confinement is from a first increase of confinement at the input port of the curved waveguide to a second higher increase of confinement at the middle of the curved waveguide and to a third increase of confinement at the output port of the curved waveguide, wherein the third increase in confinement is less than the second increase in confinement.

### Claim 6 (depends on 4)

A waveguide structure according to claim 4, wherein the variation of the confinement is from a first increase of confinement at the first straight waveguide to a second higher increase of confinement at the output port of the curved waveguide.

### Claim 7 (depends on 4)

A waveguide structure according to claim 4, wherein the variation of confinement is dependent upon of the local radius of the curved waveguide.

### Claim 8 (depends on 1)

A waveguide structure according to claim 1, further comprising: a second waveguide disposed on a side of the plurality of first trenches opposite the curved waveguide, the second waveguide integrated with the waveguide structure.

### Claim 9 (depends on 8)

A waveguide structure according to claim 8, further comprising: a plurality of third trenches disposed along a second side of the second waveguide, the plurality of third trenches having a material disposed therein in which said material has a lower index of refraction than at least one of the waveguide core and waveguide cladding of the second waveguide; wherein, at least some of the plurality of third trenches are disposed to provide enhanced confinement of the optical signal, said enhanced confinement being higher than a confinement of the optical signal within the second waveguide absent said plurality of third trenches.

### Claim 10 (depends on 1)

A waveguide structure according to claim 1, further comprising: a third waveguide disposed on a side of the plurality of second trenches opposite the curved waveguide, the third waveguide integrated with the waveguide structure.

### Claim 11 (depends on 10)

A waveguide structure according to claim 10, further comprising: a plurality of fourth trenches disposed along a side of the third waveguide opposite the second trenches, the plurality of fourth trenches having a material disposed therein where the material has a lower index of refraction than at least one of the waveguide core and waveguide cladding; wherein, at least some of the plurality of fourth trenches disposed to provide enhanced confinement of the optical signal in a region proximate the curved waveguide, said enhanced confinement being higher than a confinement of the curved waveguide absent said trenches.

### Claim 12 (depends on 1)

A waveguide structure according to claim 1, wherein the local radius of curvature of the curved waveguide when expressed as a function of a distance that light propagates within the curved waveguide has an approximately continuous first order derivative.

### Claim 13 (depends on 1)

A waveguide structure according to claim 1, wherein the local radius of curvature of the curved waveguide when expressed as a function of a distance that light propagates within the curved waveguide has an approximately continuous second order derivative.

### Claim 14 (depends on 1)

A waveguide structure according to claim 1, wherein the substrate comprises at least one of indium phosphide, gallium arsenide, and silicon.

### Claim 15 (depends on 1)

A waveguide structure according to claim 1, wherein the waveguide is at least one of a ridge wave guide and a buried waveguide.

### Claim 16 (depends on 1)

A waveguide structure according to claim 1, wherein at least one of the plurality of first trenches perforates at least one of the surface of the structure and the substrate.

### Claim 17 (depends on 2)

A waveguide structure according to claim 2, wherein at least one of the plurality of second trenches perforates at least one of the surface of the structure and the substrate.

### Claim 18 (depends on 8)

A waveguide structure according to claim 8, wherein at least one of the plurality of third trenches perforates at least one of the surface of the structure and the substrate.

### Claim 19 (depends on 11)

A waveguide structure according to claim 11, wherein at least one of the plurality of fourth trenches perforates at least one of the surface of the structure and the substrate.

### Claim 20 (depends on 1)

A waveguide structure according to claim 1, wherein at least one of the plurality of first trenches is covered by at least one of a cladding layer and a passivation layer, such that the at least one of the plurality of first trenches does not perforate the surface of the structure.

### Claim 21 (depends on 2)

A waveguide structure according to claim 2, wherein at least one of the plurality of second trenches is covered by at least one of a cladding layer and a passivation layer, such that the at least one of the plurality of second trenches does not perforate the surface of the structure.

### Claim 22 (depends on 8)

A waveguide structure according to claim 8, wherein at least one of the plurality of third trenches is covered by at least one of a cladding layer and a passivation layer, such that the at least one of the plurality of third trenches does not perforate the surface of the structure.

### Claim 23 (depends on 11)

A waveguide structure according to claim 11, wherein at least one of the plurality of fourth trenches is covered by at least one of a cladding layer and a passivation layer, such that the at least one of the plurality of fourth trenches does not perforate the surface of the structure.

### Claim 24 (depends on 1)

A waveguide substrate according to the claim 1, wherein the material with a low index of refraction comprises at least one of air and a material forming at least part of a passivation layer.

### Claim 25 (depends on 2)

A waveguide substrate according to the claim 2, wherein the material with a low index of refraction comprises at least one of air and a material forming at least part of a passivation layer.

### Claim 26 (depends on 8)

A waveguide substrate according to the claim 8, wherein the material with a low index of refraction comprises at least one of air and a material forming at least part of a passivation layer.

### Claim 27 (depends on 11)

A waveguide substrate according to the claim 11, wherein the material with a low index of refraction comprises at least one of air and a material forming at least part of a passivation layer.

### Claim 28 (depends on 1)

A waveguide structure according to claim 1, wherein the resulting waveguide propagates an optical signal with minimal polarization dependent loss.

### Claim 29 (depends on 2)

A waveguide structure according to claim 2, wherein the resulting waveguide propagates an optical signal with minimal polarization dependent loss.

### Claim 30 (depends on 1)

A waveguide structure according to claim 1, wherein the resulting waveguide propagates an optical signal with a predetermined polarization dependent loss.

### Claim 31 (depends on 2)

A waveguide structure according to claim 2, wherein the resulting waveguide propagates an optical signal with a predetermined polarization dependent loss.

### Claim 32 (depends on 1)

A waveguide structure according to claim 1, further comprising: at least one fifth trench spaced apart from the first trenches in the direction of propagation disposed along a first side of the curved waveguide, each of the fifth trenches disposed at a distance from the curved waveguide farther than the first trenches, the spaced apart first and fifth trenches defining trenched and untrenched sections, whereby light in the curved waveguide propagates alternately past trenched and untrenched sections.

### Claim 33 (depends on 2)

A waveguide structure according to claim 2, further comprising: at least one sixth trench spaced apart from the second trenches in the direction of propagation disposed along the other side of the curved waveguide, each of the sixth trenches disposed at a distance from the curved waveguide farther than the second trenches, the spaced apart second and sixth trenches defining trenched and untrenched sections, whereby light in the curved waveguide propagates alternately past trenched and untrenched sections.