# US 7,609,547 B2 · Biosensor and sensing cell array using the same

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- Number: US 7,609,547 B2
- Document ID: US7609547B2
- Status: Granted
- Kind: B2
- Application number: 11/963,614
- Filed: 2007-12-21
- Published: 2008-05-01
- Granted: 2009-10-27
- Earliest claimed: 2002-12-21
- Assignees: Hynix Semiconductor Inc.
- Inventors: Hee Bok Kang; Dong Yun Jeong; Jae Hyoung Lim; Young Jin Park; Kye Nam Lee; In Woo Jang; Seaung Suk Lee; Chang Shuk Kim
- Web page: https://patentgrep.com/patent/US7609547B2

## CPC

- G01N 27/76: by investigating susceptibility
- G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)}
- G01R 33/1284: {Spin resolved measurements; Influencing spins during measurements, e.g. in spintronics devices}
- G11C 11/16: using elements in which the storage effect is based on magnetic spin effect
- G11C 11/1653: {Address circuits or decoders}
- G11C 11/1657: {Word-line or row circuits}
- G11C 11/1659: {Cell access}
- G11C 11/1673: {Reading or sensing circuits or methods}
- G11C 11/1693: {Timing circuits or methods}
- H01F 10/325: {the spacer being noble metal}
- G01N 33/49: Blood {(chemical methods for determining blood cell populations G01N33/5094; chemical analysis of blood groups or blood types G01N33/80)}
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- G11C: STATIC STORES (semiconductor memory devices H10B)
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A biosensor and a sensing cell array using a biosensor are disclosed. Adjacent materials containing a plurality of different ingredients are analyzed to determine the ingredients based on their magnetic susceptibility or dielectric constant. A sensing cell array includes such as a magnetization pair detection sensor including a MTJ (Magnetic Tunnel Junction) or GMR (Giant Magnetoresistive) device, a magnetoresistive sensor including a MTJ device and a magnetic material (current line), a dielectric constant sensor including a sensing capacitor and a switching device, a magnetization hole detection sensor including a MTJ or GMR device, a current line, a free ferromagnetic layer and a switching device, and a giant magnetoresistive sensor including a GMR device, a switching device and a magnetic material (or forcing wordline). Ingredients of adjacent materials are separated based on electrical characteristics of ingredients by sensing magnetic susceptibility and dielectric constant depending on the sizes of the ingredients.

## Claims

### Claim 1

A biosensor comprising:
a GMR device comprising a free ferromagnetic layer, a conductive resistor and a fixed ferromagnetic layer;
a magnetic material formed on the free ferromagnetic layer for forming a magnetic field depending on magnetic coupling with the free ferromagnetic layer;
a sense wordline formed on a first portion of the conductive resistor and configured to receive a sense wordline voltage; and
a switching device formed under a second portion of the conductive resistor and configured to output current sensed in the GMR device into a sense bitline,
wherein the current outputted from the switching device varies according to magnetoresistive values of adjacent materials in the magnetic field.

### Claim 2 (depends on 1)

The biosensor according to claim 1, further comprising a barrier conductive layer formed under the sense bitline.

### Claim 3 (depends on 1)

The biosensor according to claim 1, wherein the switching device comprises:
a drain connected to the sense bitline;
a source connected to the second portion of the conductive resistor; and
a gate connected to a wordline.

### Claim 4 (depends on 1)

The biosensor according to claim 1, further comprising an oxide protective layer formed on the GMR device, the sense wordline, the switching device and the magnetic material.