# US 7,609,479 B2 · Magnetic head for perpendicular magnetic recording and method of manufacturing same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,609,479 B2 - Document ID: US7609479B2 - Status: Granted - Kind: B2 - Application number: 11/372,259 - Filed: 2006-03-10 - Published: 2007-09-13 - Granted: 2009-10-27 - Earliest claimed: 2006-03-10 - Assignees: Headway Technologies, Inc. - Inventors: Yoshitaka Sasaki; Hiroyuki Itoh; Dong-Hong Li; Joseph Smyth; Lijie Guan; Yaw-Shing Tang - Web page: https://patentgrep.com/patent/US7609479B2 ## CPC - G11B 5/1278: {specially adapted for magnetisations perpendicular to the surface of the record carrier} - G11B 5/112: {Manufacture of shielding device} - G11B 5/3163: {Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers} - G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R) ## Abstract A pole layer has an end face located in a medium facing surface, allows a magnetic flux corresponding to a magnetic field generated by a coil to pass therethrough, and generates a write magnetic field for writing data on a recording medium by using a perpendicular magnetic recording system. A shield incorporates: a first layer having an end face located in a region of the medium facing surface forward of the end face of the pole layer along the direction of travel of the recording medium; a second layer disposed in a region sandwiching the pole layer with the first layer; a first coupling portion coupling the first layer to the second layer without touching the pole layer; and a second coupling portion coupling the pole layer to the second layer and located farther from the medium facing surface than the first coupling portion. ## Claims ### Claim 1 A magnetic head for perpendicular magnetic recording comprising: a medium facing surface that faces toward a recording medium; a coil for generating a magnetic field corresponding to data to be written on the recording medium; a pole layer having an end face located in the medium facing surface, allowing a magnetic flux corresponding to the field generated by the coil to pass therethrough, and generating a write magnetic field for writing the data on the recording medium by means of a perpendicular magnetic recording system; and a shield, wherein: the shield incorporates: a first layer having an end face located in a region of the medium facing surface forward of the end face of the pole layer along a direction of travel of the recording medium; a second layer disposed in a region sandwiching the pole layer with the first layer; a first coupling portion coupling the first layer to the second layer without touching the pole layer; and a second coupling portion coupling the pole layer to the second layer and located farther from the medium facing surface than the first coupling portion; the magnetic head further comprises a gap layer made of a nonmagnetic material and disposed between the pole layer and the first layer; in the medium facing surface, the end face of the first layer is located at a specific distance created by a thickness of the gap layer from the end face of the pole layer; the end face of the pole layer has a side located adjacent to the gap layer, the side defining a track width; part of the coil passes through a space surrounded by the pole layer, the second layer, the first coupling portion and the second coupling portion; the first coupling portion couples the first layer to the second layer on both sides of the pole layer opposed to each other in a direction of track width, the first coupling portion incorporating: a first portion and a second portion that are connected to the first layer and disposed on both sides of the pole layer opposed to each other in the direction of track width; and a third portion coupling the second layer to the first and second portions and disposed between the medium facing surface and the part of the coil; and the first layer is coupled to the pole layer through the first coupling portion, the second layer and the second coupling portion only, wherein the first coupling portion, the second layer and the second coupling portion form only one magnetic path for passing a magnetic flux between the first layer and the pole layer. ### Claim 2 (depends on 1) The magnetic head according to claim 1, wherein the gap layer has a thickness that falls within a range of 5 to 60 nm inclusive. ### Claim 3 (depends on 1) The magnetic head according to claim 1, wherein each of the second layer and the first coupling portion has an end face located in the medium facing surface. ### Claim 4 (depends on 1) The magnetic head according to claim 1, wherein the second layer has an end face closer to the medium facing surface, the end face being located at a distance from the medium facing surface. ### Claim 5 (depends on 1) The magnetic head according to claim 1, wherein the first coupling portion has an end face closer to the medium facing surface, the end face being located at a distance from the medium facing surface. ### Claim 6 (depends on 1) The magnetic head according to claim 1, wherein the shield further incorporates a first side shield layer and a second side shield layer that are connected to the first layer and disposed on both sides of the pole layer opposed to each other in a direction of track width; and each of the first and second side shield layers has an end face located in the medium facing surface. ### Claim 7 (depends on 1) The magnetic head according to claim 1, wherein the coil has a shape of flat whorl wound around the second coupling portion. ### Claim 8 (depends on 1) The magnetic head according to claim 1, wherein the coil has a helical shape wound around the pole layer. ### Claim 9 (depends on 1) The magnetic head according to claim 1, further comprising: an encasing layer made of a nonmagnetic material and having a groove that opens in a top surface thereof and accommodates at least part of the pole layer; and a nonmagnetic conductive layer made of a nonmagnetic conductive material and disposed in the groove of the encasing layer between the encasing layer and the pole layer. ### Claim 10 (depends on 1) The magnetic head according to claim 1, wherein: the pole layer has a surface that bends, the surface touching the gap layer; and the gap layer bends along the surface of the pole layer that bends. ### Claim 11 (depends on 1) The magnetic head according to claim 1, wherein: the first layer incorporates: a middle portion including a portion facing toward the pole layer with the gap layer disposed in between; and two side portions located at positions outside the middle portion along a direction of track width; and a maximum length of each of the side portions taken in a direction orthogonal to the medium facing surface is greater than a length of the middle portion taken in the direction orthogonal to the medium facing surface. ### Claim 12 A method of manufacturing a magnetic head for perpendicular magnetic recording, the magnetic head comprising: a medium facing surface that faces toward a recording medium; a coil for generating a magnetic field corresponding to data to be written on the recording medium; a pole layer having an end face located in the medium facing surface, allowing a magnetic flux corresponding to the field generated by the coil to pass therethrough, and generating a write magnetic field for writing the data on the recording medium by means of a perpendicular magnetic recording system; and a shield, wherein: the shield incorporates: a first layer having an end face located in a region of the medium facing surface forward of the end face of the pole layer along a direction of travel of the recording medium; a second layer disposed in a region sandwiching the pole layer with the first layer; a first coupling portion coupling the first layer to the second layer without touching the pole layer; and a second coupling portion coupling the pole layer to the second layer and located farther from the medium facing surface than the first coupling portion; the magnetic head further comprises a gap layer made of a nonmagnetic material and disposed between the pole layer and the first layer; in the medium facing surface, the end face of the first layer is located at a specific distance created by a thickness of the gap layer from the end face of the pole layer; the end face of the pole layer has a side located adjacent to the gap layer, the side defining a track width; and part of the coil passes through a space surrounded by the pole layer, the second layer, the first coupling portion and the second coupling portion; the first coupling portion couples the first layer to the second layer on both sides of the pole layer opposed to each other in a direction of track width, the first coupling portion incorporating: a first portion and a second portion that are connected to the first layer and disposed on both sides of the pole layer opposed to each other in the direction of track width; and a third portion coupling the second layer to the first and second portions and disposed between the medium facing surface and the part of the coil; and the first layer is coupled to the pole layer through the first coupling portions, the second layer and the second coupling portion only, wherein the first coupling portion, the second layer and the second coupling portion form only one magnetic path for passing a magnetic flux between the first layer and the pole layer, the method comprising the steps of: forming the second layer; forming the coil; forming the first and second coupling portions; forming the pole layer; forming the gap layer on the pole layer; and forming the first layer on the gap layer. ### Claim 13 (depends on 12) The method according to claim 12, wherein the gap layer has a thickness that falls within a range of 5 to 60 nm inclusive. ### Claim 14 (depends on 12) The method according to claim 12, wherein each of the second layer and the first coupling portion has an end face located in the medium facing surface. ### Claim 15 (depends on 12) The method according to claim 12, wherein the second layer has an end face closer to the medium facing surface, the end face being located at a distance from the medium facing surface. ### Claim 16 (depends on 12) The method according to claim 12, wherein the first coupling portion has an end face closer to the medium facing surface, the end face being located at a distance from the medium facing surface. ### Claim 17 (depends on 12) The method according to claim 12, wherein the shield further incorporates a first side shield layer and a second side shield layer that are connected to the first layer and disposed on both sides of the pole layer opposed to each other in a direction of track width; and each of the first and second side shield layers has an end face located in the medium facing surface, the method further comprising the step of forming the first and second side shield layers performed between the step of forming the second layer and the step of forming the gap layer. ### Claim 18 (depends on 12) The method according to claim 12, wherein the coil has a shape of flat whorl wound around the second coupling portion. ### Claim 19 (depends on 12) The method according to claim 12, wherein the coil has a helical shape wound around the pole layer. ### Claim 20 (depends on 12) The method according to claim 12, wherein the magnetic head further comprises: an encasing layer made of a nonmagnetic material and having a groove that opens in a top surface thereof and accommodates at least part of the pole layer; and a nonmagnetic conductive layer made of a nonmagnetic conductive material and disposed in the groove of the encasing layer between the encasing layer and the pole layer, the method further comprising the steps of forming the encasing layer and forming the nonmagnetic conductive layer. ### Claim 21 (depends on 20) The method according to claim 20, wherein the nonmagnetic conductive layer is formed by chemical vapor deposition in which formation of a single atomic layer is repeated. ### Claim 22 (depends on 21) The method according to claim 21, wherein the nonmagnetic conductive material is Ta or Ru. ### Claim 23 (depends on 12) The method according to claim 12, wherein: the pole layer has a surface that bends, the surface touching the gap layer; and the gap layer bends along the surface of the pole layer that bends. ### Claim 24 (depends on 23) The method according to claim 23, wherein the gap layer is formed by chemical vapor deposition in which formation of a single atomic layer is repeated. ### Claim 25 (depends on 24) The method according to claim 24, wherein the nonmagnetic material forming the gap layer is Ta, Ru or Al2O3. ### Claim 26 (depends on 12) The method according to claim 12, wherein: the first layer incorporates: a middle portion including a portion facing toward the pole layer with the gap layer disposed in between; and two side portions located at positions outside the middle portion along a direction of track width; and a maximum length of each of the side portions taken in a direction orthogonal to the medium facing surface is greater than a length of the middle portion taken in the direction orthogonal to the medium facing surface. ### Claim 27 A magnetic head for perpendicular magnetic recording comprising: a medium facing surface that faces toward a recording medium; a coil for generating a magnetic field corresponding to data to be written on the recording medium; a pole layer having an end face located in the medium facing surface, allowing a magnetic flux corresponding to the field generated by the coil to pass therethrough, and generating a write magnetic field for writing the data on the recording medium by means of a perpendicular magnetic recording system; and a shield, wherein: the shield incorporates: a first layer having an end face located in a region of the medium facing surface forward of the end face of the pole layer along a direction of travel of the recording medium; a second layer disposed in a region sandwiching the pole layer with the first layer; a first coupling portion coupling the first layer to the second layer without touching the pole layer; and a second coupling portion coupling the pole layer to the second layer and located farther from the medium facing surface than the first coupling portion; the magnetic head further comprises a gap layer made of a nonmagnetic material and disposed between the pole layer and the first layer; in the medium facing surface, the end face of the first layer is located at a specific distance created by a thickness of the gap layer from the end face of the pole layer; the end face of the pole layer has a side located adjacent to the gap layer, the side defining a track width; part of the coil passes through a space surrounded by the pole layer, the second layer, the first coupling portion and the second coupling portion; the first coupling portion incorporates: a first portion and a second portion that are connected to the first layer and disposed on both sides of the pole layer opposed to each other in a direction of track width; and a third portion coupling the second layer to the first and second portions and disposed between the medium facing surface and the part of the coil; and the first coupling portion couples the first layer to the second layer on both sides of the pole layer opposed to each other in the direction of track width. ### Claim 28 A method of manufacturing a magnetic head for perpendicular magnetic recording, the magnetic head comprising: a medium facing surface that faces toward a recording medium; a coil for generating a magnetic field corresponding to data to be written on the recording medium; a pole layer having an end face located in the medium facing surface, allowing a magnetic flux corresponding to the field generated by the coil to pass therethrough, and generating a write magnetic field for writing the data on the recording medium by means of a perpendicular magnetic recording system; and a shield, wherein: the shield incorporates: a first layer having an end face located in a region of the medium facing surface forward of the end face of the pole layer along a direction of travel of the recording medium; a second layer disposed in a region sandwiching the pole layer with the first layer; a first coupling portion coupling the first layer to the second layer without touching the pole layer; and a second coupling portion coupling the pole layer to the second layer and located farther from the medium facing surface than the first coupling portion; the magnetic head further comprises a gap layer made of a nonmagnetic material and disposed between the pole layer and the first layer; in the medium facing surface, the end face of the first layer is located at a specific distance created by a thickness of the gap layer from the end face of the pole layer; the end face of the pole layer has a side located adjacent to the gap layer, the side defining a track width; and part of the coil passes through a space surrounded by the pole layer, the second layer, the first coupling portion and the second coupling portion, the method comprising the steps of: forming the second layer; forming the coil; forming the first and second coupling portions; forming the pole layer; forming the gap layer on the pole layer; and forming the first layer on the gap layer, wherein: the first coupling portion incorporates: a first portion and a second portion that are connected to the first layer and disposed on both sides of the pole layer opposed to each other in a direction of track width; and a third portion coupling the second layer to the first and second portions and disposed between the medium facing surface and the part of the coil; and the first coupling portion couples the first layer to the second layer on both sides of the pole layer opposed to each other in the direction of track width.