# US 7,609,464 B2 · Holding device for an optical element with support force equalization

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- Number: US 7,609,464 B2
- Document ID: US7609464B2
- Status: Granted
- Kind: B2
- Application number: 11/840,568
- Filed: 2007-08-17
- Published: 2008-02-21
- Granted: 2009-10-27
- Earliest claimed: 2006-08-17
- Assignees: Carl Zeiss SMT GmbH
- Inventors: Klaus Rief; Yuanbo Kong
- Web page: https://patentgrep.com/patent/US7609464B2

## CPC

- G02B 7/02: for lenses {(supports for magnifying lenses G02B25/002)}
- G02B 7/026: {using retaining rings or springs (G02B7/027 takes precedence)}
- G03F 7/70825: {Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

Holding devices for optical elements, as well as related modules, systems and methods are disclosed. The devices, modules, systems and methods may, for example, be used in the context of microlithography used in manufacturing microelectronic circuits.

## Claims

### Claim 1

A device, comprising:
a ring shaped base element;
contact elements; and
a connecting device
wherein:
the device is configured to hold an optical element;
the ring shaped base element has a plane of main extension defined by a circumferential direction and a radial direction;
the contact elements are configured to contact the optical element;
the contact elements are distributed at a circumference of the base element and connected with the base element so that the contact elements are movable in the radial direction of the base element;
the contact elements are connected in the circumferential direction of the base element via the connecting device; and
the connecting device couples forces acting on the contact elements in the radial direction of the base element when holding the optical element.

### Claim 2 (depends on 1)

The device according to claim 1, wherein the connecting device couples shifts introduced into the contact elements in the radial direction of the base element upon holding the optical element in opposite directions.

### Claim 3 (depends on 1)

The device according to claim 1, wherein the connecting device is arranged to substantially equalize forces acting on the contact elements in the radial direction of the base element.

### Claim 4 (depends on 1)

The device according to claim 1, wherein the connecting device couples forces acting on the contact elements via tensile force.

### Claim 5 (depends on 1)

The device according to claim 1, wherein the connecting device is arranged to be substantially rigid in the circumferential direction of the base element and to be at least section wise compliant to bending in the radial direction of the base element.

### Claim 6 (depends on 1)

The device according to claim 1, wherein the connecting device is connected to one of the contact elements via a first hinge device comprising at least one linking hinge.

### Claim 7 (depends on 6)

The device according to claim 6, wherein the linking hinge defines a pivot axis running transverse to the plane of main extension of the base element.

### Claim 8 (depends on 6)

The device according to claim 6, wherein the first hinge device comprises at least three linking hinges, and the at least three linking hinges are arranged in a non collinear manner.

### Claim 9 (depends on 8)

The device according to claim 8, wherein:
for a first contact element, a first hinge device is linked via a first linking hinge to the first contact element;
for a second contact element adjacent the first contact element, a second hinge device is linked via a second linking hinge to the second contact element;
the first and second hinge devices are connected via a connecting element of the connecting device; and
the connecting element is respectively connected to a second linking hinge of the first hinge device.

### Claim 10 (depends on 1)

The device according to claim 1, wherein two adjacent contact elements are connected via a connecting element of the connecting device, and the connecting element is configured to:
equalize distance differences between the two adjacent contact elements;
equalize distance differences upon shifting at least one of the contact elements in the radial direction of the base element; or
both equalize distance differences between the two adjacent contact elements and equalize distance differences upon shifting at least one of the contact elements in the radial direction of the base element.

### Claim 11 (depends on 10)

The device according to claim 10, wherein the connecting element, in an unloaded state, is shaped in the manner of an arc, and the equalising of distance differences occurs by at least local modification of a curvature of the connecting element.

### Claim 12 (depends on 1)

The device according to claim 1, wherein the connecting device, in the radial direction of the base element, is arranged on an outer side of the contact elements.

### Claim 13 (depends on 1)

The device according to claim 1, wherein the connecting device is connected in a monolithic manner to at least one of the contact elements.

### Claim 14 (depends on 1)

The device according to claim 1, wherein a contact element is connected to the base element via a hinge device, the hinge device comprises at least one member selected from the group consisting of a connecting hinge and a flexure, and the connecting hinge has a pivot axis running tangentially to the circumferential direction of the base element.

### Claim 15 (depends on 14)

The device according to claim 14, wherein the contact element is a separate element from the hinge device, the contact element contacts a support surface of the hinge device, and the support surface runs tangentially to the circumferential direction of the base element and transverse to the radial direction of the base element and faces outward in the radial direction of the base element.

### Claim 16 (depends on 15)

The device according to claim 15, wherein the contact element contacts the support surface with an at least single-curved contact surface.

### Claim 17 (depends on 14)

The device according to claim 14, wherein the contact element is monolithic with the hinge device.

### Claim 18 (depends on 14)

The device according to claim 14, wherein the hinge device comprises at least one resilient element connected to the base element, and the at least one resilient element is resilient in the radial direction of the base element.

### Claim 19 (depends on 18)

The device according to claim 18, wherein the at least one resilient element forms the connecting hinge of the second hinge device.

### Claim 20 (depends on 14)

The device according to claim 14, wherein a second hinge device is connected in a monolithic manner to the base element.

### Claim 21 (depends on 1)

The device according to claim 1, further comprising a damping device having at least one clamping element is provided, wherein the damping device is configured to clamp the optical element between the clamping element and at least one of the contact elements.

### Claim 22 (depends on 21)

The device according to claim 21, wherein the clamping device is connected to the base element.

### Claim 23 (depends on 1)

The device according to claim 1, wherein the optical element is configured to be used in a microlithography system.

### Claim 24 (depends on 1)

A microlithography system comprising the device of claim 1.

### Claim 25

An optical module, comprising:
a holding device, comprising:
a ring shaped base element having a plane of main extension being defined by a circumferential direction and a radial direction of the base element; and
contact elements configured to contact the optical element;
a connecting device; and
an optical element held by the holding device,
wherein:
the contact elements are distributed at a circumference of the base element and connected with the base element so that the contact elements are movable in the radial direction of the base element;
the contact elements are connected in the circumferential direction of the base element the connecting device; and
the connecting device coupling forces acting on the contact elements in the radial direction of the base element when holding the optical element.

### Claim 26 (depends on 25)

The optical module according to claim 25, wherein each of the contact elements of contacts the optical element in a contact area, and the contact elements are connected to the optical element in the contact area via an adhesive connection.

### Claim 27 (depends on 25)

The optical module according to claim 25, wherein the contact elements are connected to each other via a stiffening ring.

### Claim 28 (depends on 25)

The optical module according to claim 25, further comprising a clamping device with a clamping element, and the clamping device is arranged to clamp the optical element between the clamping element and at least one of the contact elements.

### Claim 29 (depends on 28)

The optical module according to claim 28, wherein:
the holding device is a first holding device;
the clamping device is formed by a second holding device;
the second holding device comprises a ring shaped second base element having a plane of main extension being defined by a circumferential direction and a radial direction of the second base element and a plurality of second contact elements for contacting the optical element;
the second contact elements are distributed at a circumference of the second base element and connected with the second base element in such a manner that the second contact elements are movable in the radial direction of the second base element;
the second contact elements are connected in the circumferential direction of the second base element via at least one second connecting device;
the second connecting device couples forces acting on the second contact elements in the radial direction of the second base element when holding the optical element; and
the optical element being clamped between a least one of the contact elements of the first holding device and at least one of the second contact elements of the second holding device.

### Claim 30 (depends on 25)

The optical module according to claim 25, wherein the optical module is configured to be used in a microlithography system.

### Claim 31 (depends on 25)

A microlithography system comprising the optical module of claim 25.

### Claim 32

A device, comprising:
a mask device configured to receive a mask comprising a projection pattern;
a substrate device configured to receive a substrate; and
a projection device, comprising:
an optical element group configured to project an image of the projection pattern onto the substrate; and
an optical module comprising a holding device and an optical element held by the holding device,
wherein:
the holding device comprises:
a ring shaped base element having a plane of main extension being defined by a circumferential direction and a radial direction of the base element; and
a plurality of contact elements configured to contact the optical element;
the contact elements are distributed at a circumference of the base element and connected with the base element so that the contact elements are movable in the radial direction of the base element;
the contact elements are connected in the circumferential direction of the base element via at least one connecting device; and
the connecting device coupling forces acting on the contact elements in the radial direction of the base element when holding the optical element.

### Claim 33 (depends on 32)

The device according to claim 32, wherein the device is configured to be used in a microlithography system.

### Claim 34 (depends on 32)

A microlithography system comprising the device of claim 32.

### Claim 35

A method, comprising:
holding an optical element via a plurality of contact elements of a holding device distributed at a circumference of the optical element,
wherein:
the optical element has a plane of main extension defined by a circumferential direction and a radial direction of the optical element; and
the contact elements are held in such a manner that they are movable in the radial direction of the optical element when coupling the optical element to the holding device; and
via a connecting device connecting the contact elements, a coupling of forces is provided, the forces act on the contact elements in the radial direction of the optical element when holding the optical element.

### Claim 36 (depends on 35)

The method according to claim 35, wherein, via the connecting device, shifts introduced into the contact elements in the radial direction of the base element upon holding the optical element are coupled in opposite directions.

### Claim 37 (depends on 35)

The method according to claim 35, wherein via the connecting device the forces acting on the contact elements in the radial direction when holding the optical element are substantially equalized.

### Claim 38 (depends on 35)

The method according to claim 35, wherein the connecting device is configured to use tensile force to act on the contact elements.

### Claim 39 (depends on 35)

The method according to claim 35, wherein the connecting device at least partially equalizes distance differences between adjacent ones of the contact elements caused by shifts of the contact elements.

### Claim 40 (depends on 35)

The method according to claim 35, wherein the contact elements are at least one of connected and adhesively bonded to the optical element, and, subsequently, the contact elements are connected to each other via a stiffening ring.

### Claim 41 (depends on 40)

The method according to claim 40, wherein the stiffening ring is adhesively bonded to the contact elements.

### Claim 42 (depends on 35)

The method of claim 35, wherein the optical element is configured to be used in a microlithography system.