# US 7,609,383 B2 · Optical spectrum analyzer

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- Number: US 7,609,383 B2
- Document ID: US7609383B2
- Status: Granted
- Kind: B2
- Application number: 12/165,721
- Filed: 2008-07-01
- Published: 2008-10-23
- Granted: 2009-10-27
- Earliest claimed: 2006-01-17
- Assignees: Murata Manufacturing Co., Ltd.
- Inventors: Kiyokazu Yamada; Shinji Tanaka; Hideaki Kobayashi
- Web page: https://patentgrep.com/patent/US7609383B2

## CPC

- G01J 3/1256: {using acousto-optic tunable filter; (acousto-optic elements or systems G02F1/11, G02F1/33)}
- G01J 3/02: Details
- G01J 3/0256: {Compact construction}
- G01J 9/0246: {Measuring optical wavelength}
- G01J 9/04: by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

An optical spectrum analyzer detects a light output that is dependent on the frequency of light in a wavelength range of light to be measured. The optical spectrum analyzer includes a waveguide acousto-optic tunable filter including a piezoelectric substrate, optical waveguides, and an IDT, a light source for providing, to the waveguide acousto-optic tunable filter, reference light having a particular wavelength outside the wavelength range, a driving circuit for providing, to the waveguide acousto-optic tunable filter, a high frequency signal for exciting an IDT, and an arithmetic device that, on the basis of the wavelength of selected light when reference light is incident, and an exciting frequency, corrects the wavelength of the selected light, which is obtained from the light to be measured.

## Claims

### Claim 1

An optical spectrum analyzer for detecting a light output that is dependent on the frequency of light in a wavelength range of light to be measured, comprising:
a waveguide acousto-optic tunable filter including a piezoelectric substrate, an optical waveguide provided on the piezoelectric substrate, and an IDT arranged to convert a mode of light being propagated in an approximate middle portion of the optical waveguide;
a light source arranged to provide reference light having a specific wavelength outside of the wavelength range to the waveguide acousto-optic tunable filter;
a driving circuit arranged to excite the IDT of the waveguide acousto-optic tunable filter by supplying a high frequency signal to the IDT;
a photoreceptor that receives light that is output from the waveguide acousto-optic tunable filter; and
an arithmetic device arranged to make a correction, based on the wavelength of selected light that is output when a mode of the reference light is converted by causing the reference light to be incident on the waveguide acousto-optic tunable filter and by applying high frequency waves having a predetermined frequency to the IDT and exciting the IDT, to a relationship between the frequency of the high frequency waves applied to the IDT and the wavelength of the selected light selected from the light to be measured.

### Claim 2 (depends on 1)

The optical spectrum analyzer according to claim 1, wherein the light source includes a light generator arranged to generate light having various wavelengths, and a fiber Bragg grating arranged to enable output of only light having a specific wavelength from the light generated from the light generator.

### Claim 3 (depends on 1)

The optical spectrum analyzer according to claim 1, wherein the light source is a laser source.

### Claim 4 (depends on 1)

The optical spectrum analyzer according to claim 1, wherein the light source is arranged such that first and second types of light having different wavelengths are provided as the reference light, and the relationship between the frequency of the high frequency waves applied to the IDT and the wavelength of the selected light is corrected by the first and second types of light.

### Claim 5 (depends on 1)

An apparatus comprising:
the optical spectrum analyzer according to claim 1; and
an optical sensor arranged to detect a predetermined physical quantity and including a light source and an optical detecting unit; wherein
the light source of the optical spectrum analyzer is shared with the light source of the optical sensor.

### Claim 6 (depends on 5)

The apparatus according to claim 5, wherein the light source includes a light generator arranged to generate light having various wavelengths, and a fiber Bragg grating arranged to enable output of only light having a specific wavelength from the light generated from the light generator.

### Claim 7 (depends on 5)

The apparatus according to claim 5, wherein the light source is a laser source.

### Claim 8 (depends on 5)

The apparatus according to claim 5, wherein the light source is arranged such that first and second types of light having different wavelengths are provided as the reference light, and the relationship between the frequency of the high frequency waves applied to the IDT and the wavelength of the selected light is corrected by the first and second types of light.

### Claim 9

An optical spectrum analyzer for detecting a light output that is dependent on the frequency of light in a wavelength range of light to be measured, comprising:
a waveguide non-polarization-dependent acousto-optic tunable filter including a piezoelectric substrate, an optical waveguide provided on the piezoelectric substrate, and an IDT arranged to convert a mode of light being propagated in an approximate middle portion of the optical waveguide;
a light source arranged to provide reference light having a specific wavelength outside of the wavelength range to the waveguide non-polarization-dependent acousto-optic tunable filter;
a driving circuit arranged to excite the IDT of the waveguide non-polarization-dependent acousto-optic tunable filter by supplying a high frequency signal to the IDT;
a photoreceptor arranged to receive light that is output from the waveguide non-polarization-dependent acousto-optic tunable filter; and
an arithmetic device arranged to make a correction, based on the wavelength of selected light that is output when a mode of the reference light is converted by causing the reference light to be incident on the waveguide non-polarization-dependent acousto-optic tunable filter and by applying high frequency waves having a predetermined frequency to the IDT and exciting the IDT, to a relationship between the frequency of the high frequency waves applied to the IDT and the wavelength of the selected light selected from the light to be measured.

### Claim 10 (depends on 9)

The optical spectrum analyzer according to claim 9, wherein the light source includes a light generator arranged to generate light having various wavelengths, and a fiber Bragg grating arranged to enable output of only light having a specific wavelength from the light generated from the light generator.

### Claim 11 (depends on 9)

The optical spectrum analyzer according to claim 9, wherein the light source is a laser source.

### Claim 12 (depends on 9)

The optical spectrum analyzer according to claim 9, wherein the light source is arranged such that first and second types of light having different wavelengths are provided as the reference light, and the relationship between the frequency of the high frequency waves applied to the IDT and the wavelength of the selected light is corrected by the first and second types of light.

### Claim 13 (depends on 9)

An apparatus comprising:
the optical spectrum analyzer according to claim 9; and
an optical sensor arranged to detect a predetermined physical quantity and including a light source and an optical detecting unit; wherein
the light source of the optical spectrum analyzer is shared with the light source of the optical sensor.

### Claim 14 (depends on 13)

The apparatus according to claim 13, wherein the light source includes a light generator arranged to generate light having various wavelengths, and a fiber Bragg grating arranged to enable output of only light having a specific wavelength from the light generated from the light generator.

### Claim 15 (depends on 13)

The apparatus according to claim 13, wherein the light source is a laser source.

### Claim 16 (depends on 13)

The apparatus according to claim 13, wherein the light source is arranged such that first and second types of light having different wavelengths are provided as the reference light, and the relationship between the frequency of the high frequency waves applied to the IDT and the wavelength of the selected light is corrected by the first and second types of light.
