# US 7,609,002 B2 · Plasma accelerating apparatus and plasma processing system having the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,609,002 B2 - Document ID: US7609002B2 - Status: Granted - Kind: B2 - Application number: 11/410,933 - Filed: 2006-04-26 - Published: 2007-02-01 - Granted: 2009-10-27 - Earliest claimed: 2005-07-29 - Assignees: Samsung Electronics Co., Ltd. - Inventors: Won-tae Lee - Web page: https://patentgrep.com/patent/US7609002B2 ## CPC - H05H 1/54: Plasma accelerators - H01J 27/024: {Extraction optics, e.g. grids} - H01J 27/143: {Hall-effect ion sources with closed electron drift} - H01J 37/321: {the radio frequency energy being inductively coupled to the plasma} - H01J 37/32357: {Generation remote from the workpiece, e.g. down-stream} - H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A plasma accelerating apparatus and a plasma processing system, which efficiently elevate a drift velocity of a plasma beam and are simple to manufacture and simple in construction. A channel includes an outlet port opening at an end of the channel. A gas supply portion supplies a gas in the channel. A plasma generator provides ionization energy to the gas in the channel to generate a plasma beam. A plasma accelerating portion includes a plurality of grids transversely arranged spaced apart from each other by a predetermined distance in the channel for accelerating the plasma beam generated by the plasma generator to the outlet port of the channel with an electric field. The plasma accelerating apparatus and the plasma processing system elevate a drift velocity of the plasma beam more efficiently than conventional accelerating apparatuses that use an electromagnetic force induced by a magnetic field and a secondary current. ## Claims ### Claim 1 A plasma accelerating apparatus, comprising: a channel comprising an outlet port opening at an end of the channel, wherein a plasma beam passes through the channel; and a plurality of grids; wherein the plurality of grids are transversely arranged; wherein the plurality of grids are spaced apart from each other by a predetermined distance; wherein the plurality of grids are provided in the channel; wherein the plurality of grids accelerate the plasma beam toward the outlet port of the channel with an electric field; wherein the plurality of grids comprises: a first grid comprising at least a first opening through which the plasma beam passes, and a second grid comprising at least a second opening through which the plasma beam passes; wherein the first opening and the second opening are formed opposite to each other so that at least a first portion of the first opening and a second portion of the second opening do not communicate with each other with respect to a moving direction of the plasma beam. ### Claim 2 (depends on 1) The plasma accelerating apparatus as claimed in claim 1, wherein a positive pulse voltage is applied to the first grid so that the first grid accelerates electrons of the plasma beam; and wherein a negative pulse voltage is applied to the second grid so that the second grid accelerates ions of the plasma beam. ### Claim 3 (depends on 2) The plasma accelerating apparatus as claimed in claim 2, wherein the positive pulse voltage and the negative pulse voltage are not simultaneously applied so that the positive pulse voltage accelerates electrons toward the grids and pushes ions away from the grids and so that the negative pulse voltage pushes electrons away from the grids and accelerates ions toward the grids. ### Claim 4 A plasma processing system, comprising: a channel comprising an outlet port opening at an end of the channel, wherein a plasma beam passes through the channel; a plasma accelerating portion comprising a plurality of grids; wherein the plurality of grids are transversely arranged; wherein the plurality of grids are spaced apart from each other by a predetermined distance; wherein the plurality of grids are provided in the channel; wherein the plurality of grids accelerate the plasma beam toward the outlet port of the channel with an electric field; and a process chamber communicating with the outlet port of the channel, wherein the process chamber comprises a substrate holder for fixing a substrate; wherein the plurality of grids comprises: a first grid comprising at least a first opening through which the plasma beam passes, and a second grid comprising at least a second opening through which the plasma beam passes; wherein the first opening and the second opening are formed opposite to each other so that at least a first portion of the first opening and a second portion of the second opening do not communicate with each other with respect to a moving direction of the plasma beam. ### Claim 5 (depends on 4) The plasma processing system as claimed in claim 4, wherein a positive pulse voltage is applied to the first grid so that the first grid accelerates electrons of the plasma beam; and wherein a negative pulse voltage is applied to the second grid so that the second grid accelerates ions of the plasma beam. ### Claim 6 (depends on 5) The system as claimed in claim 5, wherein the positive pulse voltage and the negative pulse voltage are not simultaneously applied so that the positive pulse voltage accelerates electrons toward the grids and pushes ions away from the grids and so that the negative pulse voltage pushes electrons away from the grids and accelerates ions toward the grids. ### Claim 7 (depends on 1) The plasma accelerating apparatus as claimed in claim 1, wherein the first grid and the second grid are spaced apart from each other by the predetermined distance of 10 cm to 70 cm. ### Claim 8 (depends on 4) The plasma accelerating apparatus as claimed in claim 4, wherein the first grid and the second grid are spaced apart from each other by the predetermined distance of 10 cm to 70 cm.