# US 7,608,975 B2 · Piezoelectrically-controlled integrated magnetic device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,608,975 B2 - Document ID: US7608975B2 - Status: Granted - Kind: B2 - Application number: 11/898,331 - Filed: 2007-09-11 - Published: 2008-03-20 - Granted: 2009-10-27 - Earliest claimed: 2006-09-12 - Assignees: Commissariat a l'Energie Atomique; STMicroelectronics S.r.l. - Inventors: Bastien Orlando; Bernard Viala; Sébastien Hentz - Web page: https://patentgrep.com/patent/US7608975B2 ## CPC - H01F 21/08: by varying the permeability of the core, e.g. by varying magnetic bias - H01F 17/0006: {Printed inductances (printed coils for dynamo-electric machines H02K3/26; printed circuits H05K)} - H01F 27/022: {Encapsulation} - H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES ## Abstract The magnetic device according to the invention is integrated on a substrate and comprises at least one element made of piezoelectric material associated with actuating electrodes, and at least one magnetic element able to deform under the stress of the piezoelectric material element. The device has the form of a beam movable with respect to the substrate, and comprises two transverse parts of predetermined width, along a reference longitudinal axis. The piezoelectric material element is formed by at least a part of a transverse part and each transverse part comprises a zone for mechanical anchoring on the substrate. The transverse parts are connected by at least one central branch, of predetermined width, on which the magnetic element is arranged. ## Claims ### Claim 1 A variable-response magnetic device integrated on a substrate and comprising at least one element made of piezoelectric material associated with actuating electrodes, and at least one magnetic element able to deform under the stress of the element made of piezoelectric material, wherein the device is in the form of a beam, movable with respect to the substrate and comprising two transverse parts of predetermined width, along a reference longitudinal axis, and wherein: the piezoelectric material element is formed by at least one part of a transverse part, each transverse part comprises a zone for mechanical anchoring on the substrate, and the transverse parts are connected by at least one central branch of predetermined width on which the magnetic element is arranged. ### Claim 2 (depends on 1) The device according to claim 1, wherein the width of the central branch is smaller than the width of the transverse parts. ### Claim 3 (depends on 1) The device according to claim 1, wherein the two transverse parts are made of piezoelectric material. ### Claim 4 (depends on 1) The device according to claim 1, wherein the central branch is made of piezoelectric material. ### Claim 5 (depends on 1) The device according to claim 1, wherein the actuating electrodes extend partially on the surface of the transverse parts of the beam. ### Claim 6 (depends on 5) The device according to claim 5, wherein the actuating electrodes are situated on each side of the piezoelectric material element. ### Claim 7 (depends on 1) The device according to claim 1, wherein each transverse part is extended by a transition zone extending up to the corresponding central branch. ### Claim 8 (depends on 7) The device according to claim 7, wherein the transition zone is of variable cross-section. ### Claim 9 (depends on 7) The device according to claim 7, wherein the transition zone has an elliptical shape tangent to the associated transverse part and central branch. ### Claim 10 (depends on 7) The device according to claim 7, wherein the transition zone comprises a plurality of holes. ### Claim 11 (depends on 1) The device according to claim 1, wherein each transverse part comprises a plurality of holes. ### Claim 12 (depends on 1) The device according to claim 1, wherein the magnetic element comprises a uniaxial magnetic material having an axis of anisotropy parallel to the reference axis of the beam. ### Claim 13 (depends on 1) The device according to claim 1, wherein the magnetic element comprises a uniaxial magnetic material having an axis of anisotropy perpendicular to the reference axis of the beam. ### Claim 14 (depends on 1) The device according to claim 1, wherein the magnetic element has a cross-section of substantially rectangular shape. ### Claim 15 (depends on 1) The device according to claim 1, wherein the magnetic element has a cross-section of substantially ellipsoid shape. ### Claim 16 (depends on 1) The device according to claim 1, wherein the magnetic element is composed of a plurality of non-joined elemental magnetic elements arranged side by side on the central branch of the beam. ### Claim 17 (depends on 1) The device according to claim 1, comprising at least one electrically conducting element associated with the magnetic element. ### Claim 18 (depends on 17) The device according to claim 17, wherein the electrically conducting element is a solenoid coil. ### Claim 19 (depends on 18) The device according to claim 18, wherein the coil surrounds the magnetic element. ### Claim 20 (depends on 17) The device according to claim 17, wherein the electrically conducting element is a wire in the form of a serpentine. ### Claim 21 (depends on 17) The device according to claim 17, wherein the electrically conducting element is a wire in the form of lines. ### Claim 22 (depends on 17) The device according to claim 17, wherein the electrically conducting element is a wire in the form of a spiral. ### Claim 23 (depends on 20) The device according to claim 20, wherein the electrically conducting element is located at a distance from the magnetic element. ### Claim 24 (depends on 23) The device according to claim 23, wherein the electrically conducting element is arranged on one side of the magnetic element only. ### Claim 25 (depends on 17) The device according to claim 17, wherein the electrically conducting element is arranged on both sides of and in contact with the magnetic element. ### Claim 26 (depends on 1) The device according to claim 1, wherein the beam is encapsulated in a soft insulating material.