# US 7,608,974 B2 · Diamond-like carbon devices and methods for the use and manufacture thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,608,974 B2 - Document ID: US7608974B2 - Status: Granted - Kind: B2 - Application number: 11/304,064 - Filed: 2005-12-14 - Published: 2006-12-21 - Granted: 2009-10-27 - Earliest claimed: 2005-06-20 - Inventors: Chien-Min Sung - Web page: https://patentgrep.com/patent/US7608974B2 ## CPC - H01J 63/06: Lamps with luminescent screen excited by the ray or stream - H10N 15/00: Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect (integrated devices or assemblies of multiple devices H10N19/00) - H01J 2201/30457: Diamond - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR ## Abstract Diamond-like carbon based devices and methods of making and using the same which have improved electron emission and increased reliability. The device can include an anode with a layer of diamond-like carbon material such as amorphous diamond coated over at least a portion of the anode and a cathode. An intermediate member can be electrically coupled between the diamond-like carbon material and the cathode. Various additional layers and configurations can allow for improved performance such as multiple cathode layers and/or multiple intermediate layers. The presence of diamond-like carbon on the anode provides significantly improved electron emission with or without diamond-like carbon on the cathode. The devices can be configured as thermoelectric conversion devices such as an electrical generator or a cooling device, light emitting devices, or other electronic devices and can be conveniently formed. ## Claims ### Claim 1 A diamond-like carbon electrical device, comprising: a) an anode with a layer of diamond-like carbon material coated over at least a portion thereof; b) an intermediate member electrically coupled to the diamond-like carbon material, wherein the intermediate member is a solid material; and c) a cathode electrically coupled to the intermediate member opposite the diamond-like carbon material, said cathode having a base member opposite the intermediate member. ### Claim 2 (depends on 1) The device of claim 1, wherein the base member comprises a first conductive cathode layer and a second layer, said second layer having a work function less than a work function of the first conductive cathode layer. ### Claim 3 (depends on 2) The device of claim 2, wherein the second layer comprises a member selected from the group consisting of Cs, Sm, Al—Mg, Li, Na, K, Rb, Be, Mg, Ca, Sr, Ba, B, Ce, Al, La, Eu, and mixtures or alloys thereof. ### Claim 4 (depends on 1) The device of claim 1, wherein the diamond-like carbon material includes asperities which are directed toward the anode. ### Claim 5 (depends on 1) The device of claim 1, wherein the intermediate member has a thermal conductivity less than about 200 W/mK. ### Claim 6 (depends on 1) The device of claim 1, wherein the intermediate member has a thickness from about 0.2 μm to about 100 μm. ### Claim 7 (depends on 1) The device of claim 1, wherein the intermediate member comprises a member selected from the group consisting of a vacuum, a gas, a dielectric material, a low work function material, and combinations or composites thereof. ### Claim 8 (depends on 7) The device of claim 7, wherein the intermediate member comprises a dielectric material which is a polymer, a glass, a ceramic, graphite, or a mixture or composite thereof. ### Claim 9 (depends on 7) The device of claim 7, wherein the intermediate member comprises a dielectric material selected from the group consisting of BaTiO3, PZT, Ta2O3, PET, PbZrO3, PbTiO3, NaCl, LiF, MgO, TiO2, Al2O3, BaO, KCl, Mg2SO4, fused silica glass, soda lime silica glass, high lead glass, graphite, hexagonal boron nitride, metal matrix composite, reverse metal matrix composite, BiSb, Bi2T23, PbTe, SiGe, Bi2Te3, Zn4Sb3, La2Te3, and mixtures, composites or combinations thereof. ### Claim 10 (depends on 7) The device of claim 7, wherein the intermediate member comprises a dielectric material which supports a voltage from about 0.1 V to about 6 V across the intermediate member. ### Claim 11 (depends on 7) The device of claim 7, wherein the intermediate member comprises a low work function material having a work function from about 1.5 eV to about 4.0 eV. ### Claim 12 (depends on 1) The device of claim 1, further comprising an energy collector coupled to the cathode opposite the intermediate member to form a thermoelectric conversion device, such that the thermoelectric conversion device is configured as an electrical generator. ### Claim 13 (depends on 1) The device of claim 1, further comprising a voltage source operatively connected between the anode and the cathode to form a thermoelectric conversion device such that the thermoelectric conversion device is configured as a cooling device. ### Claim 14 (depends on 1) The device of claim 1, further comprising a luminescent material electrically coupled between the anode and the cathode such that upon receiving electrons the luminescent material luminesces and wherein the intermediate material comprises a dielectric material. ### Claim 15 (depends on 14) The device of claim 14, wherein the luminescent material is either dispersed in the dielectric material or is a layer disposed between the intermediate layer and the anode. ### Claim 16 (depends on 14) The device of claim 14, wherein at least one of the anode and the cathode are configured to transmit light. ### Claim 17 (depends on 1) The device of claim 1, wherein the anode and the cathode are flexible. ### Claim 18 (depends on 1) The device of claim 1, wherein the diamond-like carbon material is amorphous carbon. ### Claim 19 (depends on 1) The device of claim 1, wherein the diamond-like carbon material includes at least about 80% carbon atoms with at least about 20% of said carbon atoms being bonded with distorted tetrahedral coordination. ### Claim 20 (depends on 1) The device of claim 1, wherein the electron emission surface has an average asperity height from about 10 nm to about 10,000 nm. ### Claim 21 (depends on 1) A method of making a diamond-like carbon device as recited in claim 1, comprising: a) forming the diamond-like layer on the anode, said diamond-like carbon material having an electron emission surface opposite the anode; b) forming the intermediate member on the electron emission surface; and c) forming the cathode on the intermediate member opposite the diamond-like layer. ### Claim 22 (depends on 21) The method of claim 21, further, comprising subjecting the diamond-like carbon device to a heat treatment to consolidate interfacial boundaries and reduce material defects. ### Claim 23 (depends on 1) A method of making a diamond-like carbon device as recited in claim 1, comprising: a) forming the cathode and the intermediate member adjacent the cathode; b) forming the diamond-like layer on the intermediate member opposite the cathode, said diamond-like carbon material having an electron emission surface opposite the intermediate member; and c) forming the anode on the electron emission surface such that asperities on the diamond-like carbon layer are directed toward the anode.