# US 7,608,902 B2 · Nanowire composite and preparation method thereof

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- Number: US 7,608,902 B2
- Document ID: US7608902B2
- Status: Granted
- Kind: B2
- Application number: 11/441,989
- Filed: 2006-05-26
- Published: 2007-10-11
- Granted: 2009-10-27
- Earliest claimed: 2006-04-06
- Assignees: Samsung Electronics Co., Ltd.
- Inventors: Soon Jae Kwon; Byoung Lyong Choi; Eun Kyung Lee; Kyung Sang Cho; In Taek Han; Jae Ho Lee; Seong Jae Choi
- Web page: https://patentgrep.com/patent/US7608902B2

## CPC

- C30B 29/62: Whiskers or needles
- C23C 16/045: {Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates}
- C30B 25/005: {Growth of whiskers or needles}
- Y10S 977/764: with specified packing density
- Y10S 977/784: Electrically conducting, semi-conducting, or semi-insulating host material
- Y10S 977/785: Electrically insulating host material
- Y10S 977/953: Detector using nanostructure
- Y10S 977/957: Of chemical property or presence
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A nanowire composite and a method of preparing the nanowire composite comprise a template having a plurality of hollow channels, nanowires formed within the respective channels of the template, and a functional element formed by removing a portion of the template so that one or more of the nanowires formed within the portion of the template are exposed. Since the nanowire composite can be prepared in a simple manner at low costs and can be miniaturized, the nanowire composite finds application in resonators and a variety of sensors.

## Claims

### Claim 1

A nanowire composite comprising:
a template having a first surface, a second surface opposite to and parallel to the first surface, and a third surface extending from the first surface to the second surface:
a plurality of hollow channels disposed in the template and extending therein from the first surface and the second surface;
nanowires disposed in the plurality of hollow channels; and
a functional element comprising a portion of one or more of the nanowires exposed through an etched portion of the third surface of the template,
wherein the functional element does not directly touch the first surface or the second surface of the template.

### Claim 2 (depends on 1)

The nanowire composite according to claim 1, wherein the template is made of a material selected from the group consisting of glass, silica, and metal oxides.

### Claim 3 (depends on 1)

The nanowire composite according to claim 1, wherein the nanowires are made of a metal, a metal alloy, a metal sulfide, a metal chalcogenide, a metal halogenide or a semiconductor.

### Claim 4 (depends on 1)

The nanowire composite according to claim 1, wherein the nanowires are made of at least one material selected from the group consisting of Fe, Pt, Ni, Co, Al, Ag, Au, Cu, Si, Ge, CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, GaN, GaP, GaAs, GaSb, AlN, AlP, AlAs, AlSb, lnP, InAs, JnSb, SiC, FePt, Fe2O3 and Fe3O4.

### Claim 5 (depends on 1)

The nanowire composite according to claim 1, wherein the template has a diameter of about 10 nm to about 1 mm and a length of about 100 nm to about 1 mm, and the channels have a diameter of about 1 nm to about 100 nm and a spacing of about 2 nm to about 1 μm.

### Claim 6 (depends on 1)

The nanowire composite according to claim 1, wherein the functional element is composed of a single strand or a plurality of strands of the nanowires.

### Claim 7

A resonator comprising:
a nanowire composite including:
a template having a first surface, a second surface opposite to and parallel to the first surface, and a third surface extending from the first surface to the second surface:
a plurality of hollow channels disposed in the template and extending therein from the first surface and the second surface;
nanowires disposed in the plurality of hollow channels; and
a functional element comprising a portion of one or more of the nanowires exposed through an etched portion of the third surface of the template,
wherein the functional element does not directly touch the first surface or the second surface of the template.

### Claim 8

A sensor comprising:
a nanowire composite including:
a template having a first surface, a second surface opposite to and parallel to the first surface, and a third surface extending from the first surface to the second surface;
a plurality of hollow channels disposed in the template and extending therein from the first surface and the second surface;
nanowires disposed in the plurality of hollow channels; and
a functional element comprising a portion of one or more of the nanowires exposed through an etched portion of the third surface of the template,
wherein the functional element does not directly touch the first surface or the second surface of the template.

### Claim 9 (depends on 8)

The sensor according to claim 8, wherein the sensor comprises electrodes coated on both sides of the nanowire composite.

### Claim 10 (depends on 8)

The sensor according to claim 8, wherein the sensor is a gas sensor, a chemical sensor, a photosensor or a biosensor.
