Plasma source and applications thereof
AssigneeMcGill University
InventorsSylvain Coulombe, Sara Yonson, Valerie Leveille, Richard Leask
Life of this patent
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Abstract
A low-power atmospheric pressure plasma source, comprising a plasma-forming region for injection of a plasma-forming gas; an excitation region for injection of a source of reactive species downstream of the plasma-forming region; and a narrow converging plasma exit for producing a narrow plasma jet, the source being electrically decoupled from a substrate under treatment by the plasma jet. The present source may find applications for example for skin treatment, etching of skin cancer cells, detachment of cells, removal of skin pigmentation and deposition of temporary organic films.
Claims16
A low-power atmospheric pressure plasma source, comprising:
- a ground electrode, provided on an external surface of a dielectric plasma confinement tube;
- and
- a capillary electrode centered inside said ground electrode;
- wherein a space, along the length of said confinement tube, between said capillary electrode and said ground electrode, defines a plasma-forming and plasma-confinement region, a plasma-forming gas being injected in said plasma-forming region;
- said capillary electrode being able to receive a source of reactive species for injection downstream of the plasma-forming and plasma-confinement region independently of the plasma-forming gas injected in said plasma-forming and plasma-confinement region and said source of reactive species is capable of producing reactive species from a variety of gas, said plasma source producing a plasma jet through a converging plasma exit.
Dependencies are inferred from the claim text.