# US 7,608,838 B1 · Electron optical component

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- Number: US 7,608,838 B1
- Document ID: US7608838B1
- Status: Granted
- Kind: B1
- Application number: 11/623,258
- Filed: 2007-01-15
- Granted: 2009-10-27
- Earliest claimed: 2007-01-15
- Inventors: Raymond Browning
- Web page: https://patentgrep.com/patent/US7608838B1

## CPC

- H01J 37/05: Electron or ion-optical arrangements for separating electrons or ions according to their energy {or mass}(particle separator tubes H01J49/00)
- H01J 37/285: Emission microscopes, e.g. field-emission microscopes
- H01J 2237/2855: Photo-emission
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

An electron optical component used to improve the spatial resolution in magnetic projection electron lenses or other electron optical devices by filtering the cyclotron orbit radii of electron trajectories in the lens magnetic field.

## Claims

### Claim 1

A charged particle optical device comprising:
(a) a first means having a magnetic field;
(b) a conducting plate with a plurality of apertures;
(c) said apertures having similar predetermined dimensions;
(d) said apertures sit within said magnetic field with said apertures depths being approximately aligned to the direction of said magnetic field;
(e) a second means to change a forward distance for one cyclotron orbit of charged particles so that said forward distance for one cyclotron orbit of said charged particles is similar to said aperture depths;
whereby cyclotron orbit radii of said charged particles traveling within said magnetic field are filtered by said dimensions of said apertures.

### Claim 2 (depends on 1)

The charged particle optical device of claim 1 having a third means to change the apparent electron optical position of said conducting plate.

### Claim 3

A method of filtering cyclotron orbital radii, comprising:
(a) providing a magnetic field means;
(b) providing a conducting plate with a plurality of apertures;
(c) said apertures having similar predetermined dimensions;
(d) said apertures sit within said magnetic field with said apertures depths being approximately aligned to the direction of said magnetic field;
(e) providing a second means to change a forward distance for one cyclotron orbit of charged particles so that said forward distance for one cyclotron orbit of said charged particles is similar to said aperture depths;
whereby cyclotron orbit radii of said charged particles traveling within said magnetic field are filtered by said dimensions of said apertures.

### Claim 4 (depends on 3)

The method of filtering cyclotron orbital radii of claim 3 providing a third means to change the apparent electron optical position of said conducting plate.