# US 7,608,814 B2 · Optical structure for localising an electromagnetic field and detector or emitter device including such a structure

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- Number: US 7,608,814 B2
- Document ID: US7608814B2
- Status: Granted
- Kind: B2
- Application number: 12/092,873
- Filed: 2006-11-10
- Published: 2008-10-16
- Granted: 2009-10-27
- Earliest claimed: 2005-11-10
- Assignees: Thales
- Inventors: Mathieu Carras; Alfredo De Rossi; Jean-Philippe Schnell
- Web page: https://patentgrep.com/patent/US7608814B2

## CPC

- G02B 6/1226: {involving surface plasmon interaction}
- B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals
- G02F 1/3534: {Three-wave interaction, e.g. sum-difference frequency generation (G02F1/3532 takes precedence)}
- H10F 77/70: Surface textures, e.g. pyramid structures
- G02B 2006/12107: {Grating}
- G02F 2203/13: involving THZ radiation
- Y02E 10/50: Photovoltaic [PV] energy
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

## Abstract

An optical structure enabling properties of the surface plasmons to be used is defined from a substantially binary, parameterizable unit pattern ME. The parameters a, b, c, d and hg of the pattern are chosen so as to maximize the complex amplitudes of the first two harmonics of the complex Fourier series describing the pattern ME. This structure is advantageously used in combination with a photodetector, an infrared or Terahertz optical wave emitter, or a field emission device.

## Claims

### Claim 1

Device including at least one active optical member provided in a medium of positive dielectric permeability and, in the proximity of said active member, an optical structure including a layer of a material of negative dielectric permeability, said layer having, located in an orthogonal reference frame 0xyz, a surface having a relief y=h(x,z) invariant along 0z and variable along 0x, the 0y axis being oriented from the positive dielectric permeability medium to said layer of negative dielectric permeability, said surface contacting said positive dielectric permeability medium and including a first relief area, having a profile in 0xy cross section that includes a periodic repetition of a unit pattern and a second relief area symmetrical to said first area with respect to a plane of symmetry parallel to 0yz, said first and second areas being separated by a third layer provided in the centre of the structure, giving rise, compared with said first and second areas, to a fault in periodicity of the relief surface, wherein said unit pattern is defined by four succeeding portions, a first portion of full width at half maximum a and a second portion of full width at half maximum b, a third portion of full width at half maximum c and a fourth portion of full width at half maximum d, said first and third portions having substantially the same height ht, said second and fourth portions having substantially the same height hd different from ht, with ht strictly higher than hd and in that a, b, c, d and hg=ht−hd are selected profile parameters such that:
each of them is not zero,
the sum a+b+c+d is equal to the period Λ and
at least a≠c or b≠d.

### Claim 2 (depends on 1)

Device according to claim 1, wherein said portions form a binary pattern.

### Claim 3 (depends on 1)

Device according to claim 1, wherein said third area has a length (l) equal to a non zero integer m of periods Λ.

### Claim 4 (depends on 3)

Device according to claim 3, wherein said third area has a relief substantially planar along 0xz throughout its length and in that the parameters a, b, c and d satisfy the following relationships:
a≠c and
b=d.

### Claim 5 (depends on 1)

Device according to claim 1, wherein said third area has a null length along 0x.

### Claim 6 (depends on 5)

Device according to claim 5, wherein said first area and second area are such that:
the first area includes a number N/2 times the replica of a pattern, said pattern being defined from a periodical sequence of the unit pattern between a point of position xp on the 0x axis and a point of position xp+Λ on the 0x axis, said point of position xp being such that the following equation is satisfied:
∫
x
p
x
p
+
Λ
⁢
h
II
⁡
(
x
)
·
sin
⁡
(
2
⁢
π
·
x
Λ
)
·
ⅆ
x
=
0
where hII(x) is the height along 0y of the profile in a point x of the interval [xp, xp+Λ];
the second area is obtained through duplicating the first area following a symmetry operation with respect to said plane of symmetry;
and in that said unit pattern can be described by a Fourier series with complex amplitudes, the parameters a, b, c, d and hg being chosen so that:
between an harmonic of first order f(x,y,Λ) and an harmonic of second order g(x,y, ½Λ) of said Fourier series, there is a relative phase shift δΛ substantially equal to Λ/4 and
the complex amplitude of at least one harmonic from the harmonics of order higher than two, is negligible with respect to the complex amplitudes of the harmonics of first order f(x,y,Λ) and of second order g(x,y, ½Λ).

### Claim 7 (depends on 1)

Device according to claim 1, wherein:
said medium of positive dielectric permeability is a semi-conductor type material;
said active optical member is a photodetecting area provided in a layer of said material, centred with respect to said third area, able to provide an electrical signal corresponding to the detection of an electromagnetic wave of a determined wavelength, and
the period Λ of the optical structure, multiplied by refractive index of said layer, is close to said wavelength.

### Claim 8 (depends on 7)

Device according to claim 7, wherein said wavelength belongs to an infrared domain.

### Claim 9 (depends on 8)

Device according to claim 8, wherein the optical structure includes a doped semi-conducting layer of positive dielectric permeability, and a first layer and a second layer of a material of negative dielectric permeability, said first layer having a relief surface in which the third area is formed by a hole in this layer and in that the active optical member is directly provided on said layer of doped semi-conducting material, said layer being at a level above the first layer in this third area and second layer of a material of negative dielectric permeability being provided above the active optical member, and electrically isolated from the first layer.

### Claim 10 (depends on 7)

Photosensitive matrix including a plurality of photodetectors, wherein said photodetectors are devices according to claim 7.

### Claim 11 (depends on 1)

Device according to claim 1, wherein:
the medium of positive dielectric permeability is a semi-conductor type material,
said active optical member is an active layer of said material allowing an optical gain and a laser emission,
the period Λ, multiplied by the refractive index of the layer 20, is close to the wavelength emitted,
said device allows a vertical extraction of the laser emission.

### Claim 12 (depends on 3)

Device according to claim 3, wherein the parameters a, b, c, d and hg of said optical structure are chosen so that the second harmonic of 2nd order g(x,y,½Λ) of Fourier series associated to the profile of the unit pattern has a complex amplitude β much higher than the complex amplitude α of the harmonic of 1st order f(x,y,Λ);
wherein said third area has a length (l) equal to a non zero integer m of periods Λ;
wherein said third area starts in a point of position x1 on the 0x axis substantially corresponding to the middle of a first portion of a unit pattern of said first area and ends in a point of position x2 in the 0x axis substantially corresponding to the middle of a first portion of a unit pattern of said second area, and wherein said unit pattern (ME) can be described by a Fourier series with complex amplitudes, the parameters a, b, c, d and hg being chosen so that:
between an harmonic of first order f(x,y,Λ) and an harmonic of second order g(x,y, ½Λ) of said Fourier series, there is a relative phase shift δΛ substantially null and
the complex amplitude of the first non zero harmonic of order higher than 2 is negligible with respect to the complex amplitudes of the harmonics of first order f (x,y,Λ) and of second order g(x,y, ½Λ).

### Claim 13 (depends on 11)

Device according to claim 11, including at least a layer having an optical index lower than the refractive index of the active layer.

### Claim 14 (depends on 11)

Photo-emitting matrix including a plurality of photo-emitting devices of a laser beam made on a same substrate, wherein said photo-emitting devices are devices according to claim 11.

### Claim 15 (depends on 1)

Device according to claim 1, wherein:
the medium of positive dielectric permeability is a semi-conductor type material,
said material including an active optical member made up of a layer of a non linear material transparent to wavelengths of an infrared and terahertz range, said layer including a non linear waveguide transparent to said wavelengths, and having a positive dielectric permeability higher than that of said layer,
the period Λ, multiplied par an average refractive index of said layer, has a value close to a terahertz wavelength,
said device allowing a vertical emission of a terahertz wave at said terahertz wavelength, generated through conversion of optical frequency, in response to an illumination of the waveguide along the 0x axis under first and second optical frequencies ω1, ω2 different from the near infrared domain.

### Claim 16 (depends on 15)

Device according to claim 15 wherein the parameters a, b, c, d and hg of the optical structure are chosen so that the second harmonic of 2nd order g(x,y,½Λ) of the Fourier series associated to the profile of the unit pattern has a complex amplitude β much higher than the complex amplitude α of the harmonic of 1st order f(x,y,Λ).

### Claim 17 (depends on 1)

Device according to claim 1, including at least an optical member, and wherein:
said medium of positive dielectric permeability is vacuum;
said active optical member is an electron emitter with a tip effect, emitting along the −0y axis, the electron emission being controlled by an optical wave,
the period Λ of the optical structure is close to the wavelength of said optical wave.

### Claim 18 (depends on 17)

Device according to claim 17, wherein said emitter includes a photoconducting member disposed in the vicinity of the optical structure, the electron emission being controlled by the photoconductivity of said member.

### Claim 19 (depends on 18)

Device according to claim 18, wherein said emitter includes a nanowire or nanotube, oriented along −0y, of a photosensitive conducting material, which constitutes said photoconducting member.

### Claim 20 (depends on 18)

Device according to claim 18, wherein said photoconducting member is a diode or a semi-conducting resistor.

### Claim 21 (depends on 17)

Device according to claim 17, wherein the electron emission is controlled by the electrical field of the optical wave, the optical structure resulting in a re-orientation of this electrical field in the emission axis of the emitter.

### Claim 22 (depends on 17)

Device according to claim 17, wherein said electron emitter includes a carbon nanotube or a semi-conducting or metal nanowire.

### Claim 23 (depends on 17)

Device according to any of claim 17, wherein said emitter is disposed in the vicinity of the plane of symmetry, at a distance from said plane along 0x in the order of Λ/4.

### Claim 24 (depends on 17)

Device according to claim 17, including first and second emitters disposed on either side of the plane of symmetry, each one at about Λ/4 from said plane along 0x.

### Claim 25 (depends on 17)

Device according to claim 17, including a plurality of electron emitters aligned along 0z, in said third area.

### Claim 26 (depends on 22)

Device according to claim 22, including first and second incident optical sources, for generating a terahertz signal.

### Claim 27 (depends on 17)

Device according to claim 17, characterised including a plurality of optical structures formed on a same support.

### Claim 28 (depends on 17)

Electron source emission with an optical modulation of electrical field including an electron beam emission device according to claim 17.

### Claim 29 (depends on 6)

Device according to claim 6, wherein:
the medium of positive dielectric permeability is a semi-conductor type material,
said active optical member is an active layer of said material allowing an optical gain and a laser emission,
the period Λ, multiplied by the refractive index of the layer 20, is close to the wavelength emitted,
said device allows a vertical extraction of the laser emission,
wherein the parameters a, b, c, d and hg of said optical structure are chosen so that the second harmonic 2nd order g(x,y,½Λ) of Fourier series associated to the profile of the unit pattern has a complex amplitude β much higher than the complex amplitude α of the harmonic of 1st order f(x,y,Λ).

### Claim 30 (depends on 6)

Device according to claim 6, wherein:
the medium of positive dielectric permeability is a semi-conductor type material,
said material including an active optical member made up of a layer of a non linear material transparent to wavelengths of an infrared and terahertz range, said layer including a non linear waveguide transparent to said wavelengths, and having a positive dielectric permeability higher than that of said layer,
the period Λ, multiplied par an average refractive index of said layer, has a value close to a terahertz wavelength,
said device allowing a vertical emission of a terahertz wave at said terahertz wavelength, generated through conversion of optical frequency, in response to an illumination of the waveguide along the 0x axis under first and second optical frequencies ω1, ω2 different from the near infrared domain,
wherein the parameters a, b, c, d and hg of the optical structure are chosen so that the second harmonic of 2nd order g(x,y,½Λ) of the Fourier series associated to the profile of the unit pattern has a complex amplitude β much higher than the complex amplitude α of the harmonic of 1st order f(x,y,Λ).