# US 7,608,546 B2 · Method for fabricating a semiconductor device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,608,546 B2 - Document ID: US7608546B2 - Status: Granted - Kind: B2 - Application number: 11/765,673 - Filed: 2007-06-20 - Published: 2008-07-03 - Granted: 2009-10-27 - Earliest claimed: 2006-12-27 - Assignees: Hynix Semiconductor Inc. - Inventors: Sang-Soo Park; Chang-Heon Park; Dong-Ryeol Lee - Web page: https://patentgrep.com/patent/US7608546B2 ## CPC - H10P 50/71: {using masks for conductive or resistive materials} - H10P 50/283: {by chemical means} - H10P 50/285: {of materials not containing Si, e.g. PZT or Al2O3} - H10P 50/287: {by chemical means} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method for fabricating a semiconductor device includes forming an etch target layer over a substrate that includes a cell region and a peripheral region. A first hard mask layer, a second hard mask layer, and an anti-reflective coating layer are formed over the etch target layer. A photosensitive pattern is formed over the anti-reflective coating layer. The anti-reflective coating layer is etched to have a width smaller than the width of the photosensitive pattern. The second hard mask layer is etched. A main etching and an over-etching are performed on the first hard mask layer. The etch target layer is then etched. ## Claims ### Claim 1 A method for fabricating a semiconductor device, the method comprising: forming an etch target layer over a substrate, wherein the substrate includes a cell region and a peripheral region; forming a first hard mask layer, a second hard mask layer, and an anti-reflective coating layer over the etch target layer; forming a photosensitive pattern over the anti-reflective coating layer; etching the anti-reflective coating layer to have a width smaller than a width of the photosensitive pattern; etching the second hard mask layer; performing a main etching treatment and an over-etching treatment on the first hard mask layer to form first hard mask patterns in the cell region, wherein the first hard mask patterns have a sloped profile; and etching the etch target layer using the first hard mask patterns as an etch mask. ### Claim 2 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein the first hard mask layer includes a nitride-based material, and the second hard mask layer includes a carbon-based material. ### Claim 3 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein etching the anti-reflective coating layer comprises using a mixture gas including CF4 gas, CHF3 gas, and O2 gas, wherein the CF4 gas flows at a rate of approximately 50 sccm to 70 sccm, the CHF3 gas flows at a rate of approximately 30 sccm to 50 sccm, and the O2 gas flows at a rate of approximately 5 sccm to 10 sccm. ### Claim 4 (depends on 3) The method for fabricating a semiconductor device according to claim 3, wherein etching the anti-reflective coating layer proceeds under conditions of: a pressure of 100 mTorr to 150 mTorr; and a top power of approximately 200 W to 400 W. ### Claim 5 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein etching the second hard mask layer comprises using a mixture gas including N2 gas and O2 gas, wherein the N2 gas flows at a rate of approximately 30 sccm to 50 sccm, and the O2 gas flows at a rate of approximately 50 sccm to 70 sccm. ### Claim 6 (depends on 5) The method for fabricating a semiconductor device according to claim 5, wherein etching the second hard mask layer proceeds under conditions of: a pressure of approximately 10 mTorr to 20 mTorr; and a top power of approximately 1,400 W to 1,600 W. ### Claim 7 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein performing the main etching on the first hard mask layer comprises using an ending point detection mode. ### Claim 8 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein performing the main etching and the over-etching on the first hard mask layer comprises flowing a CHF-based gas at different rates. ### Claim 9 (depends on 8) The method for fabricating a semiconductor device according to claim 8, wherein performing the main etching on the first hard mask layer comprises using a mixture gas including CHF3 gas, CF4 gas, and O2 gas, wherein the CHF3 gas flows at a rate of approximately 20 sccm to 40 sccm, the CF4 gas flows at a rate of approximately 80 sccm to 100 sccm, and the O2 gas flows at a rate of approximately 5 sccm to 10 sccm. ### Claim 10 (depends on 9) The method for fabricating a semiconductor device according to claim 9, wherein performing the main etching on the first hard mask layer proceeds under conditions of: a pressure of approximately 100 mTorr to 200 mTorr; a top power of approximately 100 W to 200 W; and a bottom power of approximately 700 W to 800 W. ### Claim 11 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein performing the over-etching on the first hard mask layer comprises using CHF3 gas and O2 gas, wherein the CHF3 gas flows at a rate of approximately 90 sccm to 110 sccm, and the O2 gas flows at a rate of approximately 5 sccm to 10 sccm. ### Claim 12 (depends on 11) The method for fabricating a semiconductor device according to claim 11, wherein performing the over-etching on the first hard mask layer proceeds under conditions of: a pressure of approximately 100 mTorr to 200 mTorr; a top power of approximately 100 W to 200 W; and a bottom power of approximately 700 W to 800 W. ### Claim 13 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein performing the over-etching on the first hard mask layer comprises over-etching the first hard mask layer in the cell region such that a resultant pattern has a sloped profile. ### Claim 14 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein forming the etch target layer comprises forming the etch target layer to be one of a gate electrode and a bit line electrode. ### Claim 15 (depends on 14) The method for fabricating a semiconductor device according to claim 14, wherein forming the etch target layer comprises forming the etch target layer using one selected from a group consisting of polysilicon, metal and metal silicide. ### Claim 16 (depends on 1) The method for fabricating a semiconductor device according to claim 1, wherein the main etching treatment and the over-etching treatment are performed under different conditions that produce different amounts of polymers. ### Claim 17 A method for fabricating a semiconductor device, the method comprising: forming an etch target layer over a substrate, wherein the substrate includes a cell region and a peripheral region; forming a first hard mask layer, a second hard mask layer, and an anti-reflective coating layer over the etch target layer; forming a photosensitive pattern over the anti-reflective coating layer; etching the anti-reflective coating layer to have a width that is smaller than a width of the photosensitive pattern; etching the second hard mask layer; and etching the first hard mask layer such that the first hard mask layer in the peripheral region is etched more than the first hard mask layer in the cell region, wherein the etched first hard mask layer in the cell region has a sloped profile. ### Claim 18 (depends on 17) The method for fabricating a semiconductor device according to claim 17, wherein a width of the first hard mask layer in the cell region is larger than the width of the etched anti-reflective coating layer. ### Claim 19 (depends on 17) The method for fabricating a semiconductor device according to claim 17, wherein etching the first hard mask layer comprises flowing a CHF-based gas at different rates. ### Claim 20 (depends on 17) The method for fabricating a semiconductor device according to claim 17, wherein etching the first hard mask layer comprises over-etching the first hard mask layer in the cell region. ### Claim 21 (depends on 17) The method for fabricating a semiconductor device according to claim 17, further comprising etching the etch target layer.