# US 7,608,503 B2 · Side wall active pin memory and manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,608,503 B2 - Document ID: US7608503B2 - Status: Granted - Kind: B2 - Application number: 11/285,473 - Filed: 2005-11-21 - Published: 2006-05-25 - Granted: 2009-10-27 - Earliest claimed: 2004-11-22 - Assignees: Macronix International Co., Ltd. - Inventors: Hsiang Lan Lung; Shih-Hung Chen; Yi-Chou Chen - Web page: https://patentgrep.com/patent/US7608503B2 ## CPC - H10B 20/00: Read-only memory [ROM] devices - H10B 63/30: {comprising selection components having three or more electrodes, e.g. transistors} - H10B 63/80: {Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays} - H10B 69/00: Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices - H10N 70/068: {by processes specially adapted for achieving sub-lithographic dimensions, e.g. using spacers} - H10N 70/231: {based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect} - H10N 70/8265: {on sidewalls of dielectric structures, e.g. mesa-shaped or cup-shaped devices} - H10N 70/8828: {Tellurides, e.g. GeSbTe} - G11C 2213/52: Structure characterized by the electrode material, shape, etc. - H10P 76/4085: {characterised by the processes involved to create the masks} - H10P 76/4088: {Processes for improving the resolution of the masks} - H10B: ELECTRONIC MEMORY DEVICES - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - G11C: STATIC STORES (semiconductor memory devices H10B) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method of forming a memory cell comprises forming a stack comprising a first electrode, an insulating layer over the first electrode, and a second electrode over the insulating layer, with a side wall on the stack. A side wall spacer comprising a programmable resistive material in electrical communication with the first and second electrodes is formed. The side wall spacer is formed by depositing a layer of programmable resistive material over the side wall of the stack, anisotropically etching the layer of programmable resistive material to remove it in areas away from the side wall, and selectively etching the programmable resistive material according to a pattern to define the width of the side wall spacer. In embodiments described herein, the width is about 40 nanometers or less. ## Claims ### Claim 1 A method of forming a memory cell, comprising: forming a first electrode, an insulating layer over the first electrode, a second electrode over the insulating layer, and a protective layer over the second electrode, with a side wall on the insulating layer; forming a side wall spacer on the side wall, the spacer comprising a layer of a programmable resistive material in electrical communication with the first and second electrodes, the side wall spacer having a length extending from the first electrode to the second electrode along the side wall, a width generally orthogonal to the length, the spacer, the first electrode and the second electrode having respective thicknesses which are less than 40 nm, and wherein forming the side wall spacer comprises depositing a layer of the programmable resistive material over the side wall and on the protective layer; anisotropically etching the layer of programmable resistive material to remove programmable resistive material in areas other than the side wall; forming a fill material on the protective layer and surrounding the programmable resistive material on the side wall; planarizing the fill material to expose tops of the programmable resistive material on the sidewall and leave a remaining portion of the protective layer over the second electrode; forming an etch mask having a lithographic pattern to define a lithographic width; trimming the etch mask to provide a trimmed mask to define a pattern; and selectively etching the programmable resistive material according to the pattern, to define the width of the side wall spacer, the width being less than 40 nm. ### Claim 2 (depends on 1) The method of claim 1, wherein said trimming includes anisotropically etching the etch mask to provide said trimmed mask. ### Claim 3 (depends on 1) The method of claim 1, wherein the anisotropically etching comprises using a plasma etching process. ### Claim 4 (depends on 1) The method of claim 1, wherein the anisotropically etching comprises using a reactive ion etching process. ### Claim 5 (depends on 1) The method of claim 1, wherein the programmable resistive material comprises a chalcogenide. ### Claim 6 (depends on 1) The method of claim 1, wherein the programmable resistive material has at least two solid phases which are reversibly inducible by a current. ### Claim 7 (depends on 1) The method of claim 1, wherein the programmable resistive material has at least two solid phases which include a generally amorphous phase and a generally crystalline phase. ### Claim 8 (depends on 1) The method of claim 1, wherein the programmable resistive material comprises Ge2Sb2Te5. ### Claim 9 (depends on 1) The method of claim 1, wherein the programmable resistive material comprises a combination of two or more materials from the group of Ge, Sb, Te, Se, In, Ti, Ga, Bi, Sn, Cu, Pd, Pb, Ag, S, or Au. ### Claim 10 (depends on 1) The method of claim 1, wherein the selectively etching comprises partially etching the programmable resistive material to leave a residual layer of programmable resistive material along a bottom portion of the sidewall and surrounding the first electrode. ### Claim 11 A method of forming a spacer memory cell, comprising: forming a first electrode, an insulating layer over the first electrode, a second electrode over the insulating layer, and a protective layer over the second electrode, with a side wall on the insulating layer using a lithographic process; forming a side wall spacer on the side wall, the spacer comprising a layer of a programmable resistive material in electrical communication with the first and second electrodes, the side wall spacer having a length extending from the first electrode to the second electrode along the side wall, a width generally orthogonal to the length, the spacer, the first electrode and the second electrode having respective thicknesses which are less than 40 nm, and wherein forming the side wall spacer comprises: depositing a layer of the programmable resistive material over the side wall and on the protective layer; anisotropically etching the layer of programmable resistive material to remove programmable resistive material in areas away other than the side wall; forming a fill material on the protective layer and surrounding the programmable resistive material on the side wall; planarizing the fill material to expose tops of the programmable resistive material on the sidewall and leave a remaining portion of the protective layer over the second electrode; forming an etch mask having a lithographic pattern to define a lithographic width; trimming the etch mask to provide a trimmed mask to define a pattern having a dimension less than a minimum feature size specified for the lithographic process; and selectively etching the programmable resistive material according to the pattern, to define the width of the side wall spacer, the width being less than the minimum feature size. ### Claim 12 (depends on 11) The method of claim 11, wherein the programmable resistive material comprises a chalcogenide. ### Claim 13 (depends on 11) The method of claim 11, wherein the programmable resistive material has at least two solid phases which are reversibly inducible by a current. ### Claim 14 (depends on 11) The method of claim 11, wherein the programmable resistive material has at least two solid phases which include a generally amorphous phase and a generally crystalline phase. ### Claim 15 (depends on 11) The method of claim 11, wherein the programmable resistive material comprises Ge2Sb2Te5. ### Claim 16 (depends on 11) The method of claim 11, wherein the programmable resistive material comprises a combination of two or more materials from the group of Ge, Sb, Te, Se, In, Ti, Ga, Bi, Sn, Cu, Pd, Pb, Ag, S, or Au. ### Claim 17 (depends on 11) The method of claim 11, wherein the selectively etching comprises partially etching the programmable resistive material to leave a residual layer of programmable resistive material along a bottom portion of the sidewall and surrounding the first electrode. ### Claim 18 A memory device, including: a first electrode, an insulating member over the first electrode, the insulating member having a side wall; a second electrode over the insulating member; a programmable resistive material spacer along the side wall of the insulating member and in electrical communication with the first and second electrodes, the spacer comprising a lower portion surrounding the first electrode and an upper portion having a length extending from the lower portion to the second electrode along the side wall on the insulating layer, a width generally orthogonal to the length, and a thickness, and wherein the width and the thickness are less than 40 nm; and the spacer, the first electrode and the second electrode having respective thicknesses which are less than 40 nm, wherein the spacer, the first electrode and the second electrode have respective thicknesses which are less than a minimum lithographic feature size of a lithographic process used to form the device. ### Claim 19 (depends on 18) The device of claim 18, wherein the programmable resistive material has at least two solid phases which are reversibly inducible by a current. ### Claim 20 (depends on 19) The device of claim 19, wherein the at least two solid phases include a generally amorphous phase and a generally crystalline phase. ### Claim 21 (depends on 18) The device of claim 18, wherein the insulating member has a thickness between the first and second electrodes, and the length of the upper portion of the spacer extending from the lower portion to the second electrode is substantially equal to the thickness of the insulating member. ### Claim 22 (depends on 18) The device of claim 18, wherein the programmable resistive material spacer comprises Ge2Sb2Te5. ### Claim 23 (depends on 18) The device of claim 18, wherein the programmable resistive material spacer comprises a combination of two or more materials from the group of Ge, Sb, Te, Se, In, Ti, Ga, Bi, Sn, Cu, Pd, Pb, Ag, S, or Au. ### Claim 24 (depends on 18) The device of claim 18, wherein the spacer has a thickness of 10 to 20 nm. ### Claim 25 (depends on 18) The device of claim 18, wherein the first electrode comprises Ti and N. ### Claim 26 (depends on 18) The device of claim 18, wherein the first electrode comprises Ta and N. ### Claim 27 (depends on 18) The device of claim 18, wherein the first electrode has a thickness of 10 to 30 nm. ### Claim 28 A memory device, including: a first electrode, an insulating member over the first electrode, the insulating member having a side wall; a second electrode over the insulating member; a programmable resistive material spacer along the side wall of the insulating member and in electrical communication with the first and second electrodes, the spacer comprising a lower portion surrounding the first electrode and an upper portion having a length extending from the lower portion to the second electrode along the side wall on the insulating layer, a width generally orthogonal to the length, and a thickness, and wherein the width and the thickness of the spacer are less than 40 nm, the first electrode has a thickness less than 40 nm, and the second electrode has a thickness of 10 to 30 nm. ### Claim 29 An integrated circuit comprising: a semiconductor substrate; an array of access transistors having terminals including doped regions in the semiconductor substrate adapted to connect respective drain terminals to a reference potential; a plurality of word lines coupled to gate terminals of access transistors along respective rows in the array of access transistors; an array of programmable memory cells, the programmable memory cells in the array respectively comprising a bottom electrode, an insulating member over the bottom electrode, the insulating member having a side wall, a top electrode over the insulating member, and a programmable resistive material spacer along the side wall of the insulating member and in electrical communication with the top and bottom electrodes, the spacer having a length extending from the bottom electrode to the top electrode along the side wall on the insulating layer, a width generally orthogonal to the length, and a thickness, and wherein the width and the thickness are less than 40 nm; a plurality of bit lines over the array of memory cells, arranged along respective columns of memory cells in the array of programmable memory cells; a first plurality of contacts connecting bottom electrodes of respective memory cells with corresponding drain terminals of access transistors in the array of access transistors; and a second plurality of contacts connecting top electrodes of respective memory cells with corresponding bit lines in the plurality of bit lines. ### Claim 30 (depends on 29) The integrated circuit of claim 29, wherein the programmable resistive material has at least two solid phases which are reversibly inducible by a current. ### Claim 31 (depends on 30) The integrated circuit of claim 30, wherein the at least two solid phases include a generally amorphous phase and a generally crystalline phase. ### Claim 32 (depends on 29) The integrated circuit of claim 29, wherein the spacer, the first electrode and the second electrode have respective thicknesses which are less than a minimum lithographic feature size of a lithographic process used to form the device. ### Claim 33 (depends on 29) The integrated circuit of claim 29, wherein the programmable resistive material spacer comprises Ge2Sb2Te5. ### Claim 34 (depends on 29) The integrated circuit of claim 29, wherein the programmable resistive material spacer comprises a combination of two or more materials from the group of Ge, Sb, Te, Se, In, Ti, Ga, Bi, Sn, Cu, Pd, Pb, Ag, S, or Au.