# US 7,608,481 B2 · Method for producing semiconductor package

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- Number: US 7,608,481 B2
- Document ID: US7608481B2
- Status: Granted
- Kind: B2
- Application number: 11/715,999
- Filed: 2007-03-09
- Published: 2007-09-20
- Granted: 2009-10-27
- Earliest claimed: 2006-03-14
- Assignees: Disco Corporation
- Inventors: Takatoshi Masuda
- Web page: https://patentgrep.com/patent/US7608481B2

## CPC

- H10W 74/014: {using batch processing}
- H10W 72/0198: {batch processes}
- H10W 90/00: Package configurations
- H10W 46/201: {located on the periphery of wafers, e.g. orientation notches or lot numbers}
- H10W 74/00: Encapsulations, e.g. protective coatings
- H10W 90/297: {characterised by the through-semiconductor vias [TSVs] in the stacked chips}
- H10W 90/722: {between stacked chips}
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W 90/732: {between stacked chips}
- H10W 90/752: {between stacked chips}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A method for producing a semiconductor package including a main semiconductor chip having a semiconductor circuit formed on one surface thereof, at least one subsidiary semiconductor chip stacked on the other surface of the main semiconductor chip, and an encapsulation resin covering the subsidiary semiconductor chip. This method comprises a semiconductor wafer preparation step of preparing a semiconductor wafer, on whose one surface many rectangular regions are defined by streets, and in each of the rectangular regions of which a semiconductor circuit constituting the main semiconductor chip is disposed; a circular concavity formation step of forming a circular concavity in the other surface of the semiconductor wafer; a semiconductor chip stacking step of stacking at least one such subsidiary semiconductor chip on each of many rectangular regions on the bottom surface of the circular concavity; an encapsulation resin formation step of filling a molten resin into the circular concavity, and curing the resin, thereby forming an encapsulation resin covering the subsidiary semiconductor chips; and a separation step of cutting the encapsulation resin, together with the semiconductor wafer, along the streets, to separate the semiconductor wafer and the encapsulation resin into many of the semiconductor packages.

## Claims

### Claim 1

A method for producing a semiconductor package including a main semiconductor chip having a semiconductor circuit formed on one surface thereof, at least one subsidiary semiconductor chip stacked on another surface of the main semiconductor chip, and an encapsulation resin covering the subsidiary semiconductor chip, comprising:
a semiconductor wafer preparation step of preparing a semiconductor wafer which is generally disk-shaped, on whose one surface a peripheral edge region and a main region surrounded with the peripheral edge region are present, in the main region of which many rectangular regions are defined by streets arranged in a lattice pattern, and in each of the rectangular regions of which a semiconductor circuit constituting the main semiconductor chip is disposed;
a circular concavity formation step of grinding other surface of the semiconductor wafer, except a peripheral edge region corresponding to the peripheral edge region on the one surface, after the preparation step, thereby forming a circular concavity in the other surface of the semiconductor wafer;
a semiconductor chip stacking step of stacking at least one said subsidiary semiconductor chip on each of many rectangular regions, which corresponds to each of the rectangular regions, on a bottom surface of the circular concavity of the semiconductor wafer after the circular concavity formation step;
an encapsulation resin formation step of filling a molten resin into the circular concavity of the semiconductor wafer, and curing the resin, after the semiconductor chip stacking step, thereby forming an encapsulation resin covering the subsidiary semiconductor chips; and
a separation step of cutting the encapsulation resin, together with the semiconductor wafer, along the streets, to separate the semiconductor wafer and the encapsulation resin into many of the semiconductor packages.

### Claim 2 (depends on 1)

The method according to claim 1, further comprising a via contact means formation step of forming a plurality of penetrating via contact means in each of the rectangular regions prior to the semiconductor chip stacking step.

### Claim 3 (depends on 2)

The method according to claim 2, wherein a plurality of bumps connected to the via contact means are formed in each of the rectangular regions on the one surface of the semiconductor wafer in the via contact means formation step.

### Claim 4 (depends on 2)

The method according to claim 2, further comprising a wire laying step of connecting a semiconductor circuit of the subsidiary semiconductor chip and the via contact means by electrically conductive wires after the semiconductor chip stacking step and before the encapsulation resin formation step.