# US 7,608,474 B2 · Method for manufacturing optical element

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- Number: US 7,608,474 B2
- Document ID: US7608474B2
- Status: Granted
- Kind: B2
- Application number: 11/353,346
- Filed: 2006-02-14
- Published: 2006-08-24
- Granted: 2009-10-27
- Earliest claimed: 2005-02-21
- Assignees: Seiko Epson Corporation
- Inventors: Yoshitomo Kumai; Daisuke Sawaki
- Web page: https://patentgrep.com/patent/US7608474B2

## CPC

- C25D 5/10: Electroplating with more than one layer of the same or of different metals (for bearings C25D7/10)
- C25D 5/022: {using masking means}
- G02B 5/3058: {comprising electrically conductive elements, e.g. wire grids, conductive particles}
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A method for manufacturing an optical element having a metal wire grid containing a plurality of metal wires on a substrate includes forming the metal wire grid using an electrolytic plating process.

## Claims

### Claim 1

A method for manufacturing an optical element, comprising:
forming plural linear resist films arranged at equal intervals on a transparent electrode layer formed on a glass substrate;
performing a process of forming a first metal layer made of a first metal by an electrolytic plating process and then forming a second metal layer made of a second metal by an electrolytic plating process or non-electrolytic plating process, thereby forming the first metal and second metal alternately on each other between the resist films; and
removing the resist films to leave a wire grid in which the first metal and second metal are alternately formed,
wherein the first metal is a different metal than the second metal, and
wherein the process of forming the first metal layer and then forming the second metal layer is performed at least twice until a configuration having a desired number of the first and second metal layers is obtained.

### Claim 2 (depends on 1)

The optical element manufacturing method according to claim 1, wherein the first metal is Al and the second metal is Ag.