# US 7,608,389 B2 · Photoresists processable under biocompatible conditions for multi-biomolecule patterning

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- Number: US 7,608,389 B2
- Document ID: US7608389B2
- Status: Granted
- Kind: B2
- Application number: 10/479,293
- Filed: 2002-05-30
- Published: 2005-02-17
- Granted: 2009-10-27
- Earliest claimed: 2001-05-31
- Assignees: National Centre for Scientific Research Demokritos; Panagiotis Argitis; Konstantinos Misiakos; Sotirios E. Kakabakos
- Inventors: Panagiotis Argitis; Konstantinos Misiakos; Sotirios E. Kakabakos; Constantinos D. Diakoumakos
- Web page: https://patentgrep.com/patent/US7608389B2

## CPC

- G03F 7/0397: {the macromolecular compound having an alicyclic moiety in a side chain}
- G01N 33/545: Synthetic resin
- G01N 33/552: Glass or silica
- G03F 7/40: Treatment after imagewise removal, e.g. baking
- Y10S 430/106: Binder containing
- Y10S 430/111: Polymer of unsaturated acid or ester
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

Novel photoresist materials, which can be photolithographically processed in biocompatible conditions are presented in this invention. Suitable lithographic scheme for the use of these and analogous resists for biomolecule layer patterning on solid substrates are also described. The processes described enable micropatterning of more than two different proteins on solid substrates without denaturation of the proteins. The preferred resist materials are based on (meth)acrylate copolymers that contain at least one acid cleavable ester group and at least one hydrophilic group such as an alcoholic or a carboxylic group.

## Claims

### Claim 1

A kit of photolithographic processing reagents comprising: (1) photoresist comprising a copolymer synthesized from monomers, wherein at least one of said monomers is 2-hydroxyethyl-methacrylate and wherein at least one of said monomers contains an acid cleavable group and at least one of said monomers contains a hydrophilic group selected from the class of hydroxyls and carboxyls; and (2) dilute aqueous base developer of less than 0.01 N base concentration.

### Claim 2

Method of photolithographic processing using photoresist comprising a copolymer synthesized from monomers, wherein at least one of said monomers contains an acid cleavable group and at least one of said monomers contains a hydrophilic group selected from the class of hydroxyls and carboxyls, comprising the steps of exposure of selected photoresist areas, dissolution of said photoresist areas and deposition of biomolecules on the substrate, wherein the step of dissolution is accomplished using dilute aqueous base developer that is less than 0.01 N base concentration and wherein exposure of selected photoresist areas and the subsequent dissolution of said photoresist areas follows the deposition of biomolecules on the substrate without deactivating the deposited biomolecules.

### Claim 3 (depends on 2)

Method according to claim 2, wherein the exposure of selected photoresist areas and the subsequent dissolution of said photoresist areas is repeated more than once without deactivating the deposited biomolecules.

### Claim 4

Method of photolithographic processing using photoresist comprising a copolymer synthesized from monomers of 2-hydroxyethyl- methacrylate, isobornyl-methacrylate, t-butylmethacrylate, and acrylic acid, wherein the method comprises the steps of exposure of selected photoresist areas, dissolution of said photoresist areas and deposition of biomolecules on the substrate.

### Claim 5

Photoresist in contact with a developer wherein said photoresist comprises a copolymer synthesized from monomers, wherein at least one of said monomers is 2-hydroxyethyl-methacrylate and wherein at least one of said monomers contains an acid cleavable group and at least one of said monomers contains a hydrophilic group selected from the class of hydroxyls and carboxyls; and wherein said developer is dilute aqueous base developer of less than 0.01 N base concentration.

### Claim 6 (depends on 5)

Method of photolithographic processing comprising the steps of exposure of selected photoresist areas, dissolution of said photoresist areas and deposition of biomolecules on a substrate wherein the step of dissolution is accomplished with the photoresist in contact with a developer, as recited in claim 5.

### Claim 7 (depends on 5)

Method of photolithographic processing for micropatterning biomolecules that are proteins or nucleic acid chain parts on a substrate comprising the steps of exposure of selected photoresist areas, dissolution of said photoresist areas and deposition of biomolecules on the substrate wherein the step of dissolution is accomplished with a photoresist in contact with a developer, as recited in claim 5.

### Claim 8

The photoresist comprising a copolymer synthesized from monomers of 2-hydroxyethyl-methacrylate, isobornyl-methacrylate, t-butylmethacrylate, and acrylic acid wherein the proportion of 2-hydroxyethyl-methacrylate/isobornyl- ethacrylate/t-butylmethacrylate/acrylic acid is 30/40/20/10 by weight.