# US 7,608,235 B2 · Carbon electrode for generation of nitrogen trifluoride gas

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- Number: US 7,608,235 B2
- Document ID: US7608235B2
- Status: Granted
- Kind: B2
- Application number: 11/572,938
- Filed: 2005-08-03
- Published: 2007-08-30
- Granted: 2009-10-27
- Earliest claimed: 2004-08-05
- Assignees: Toyo Tanso Co., Ltd.; Mitsui Chemicals, Inc.
- Inventors: Akimasa Tasaka; Masashi Kodama; Udai Tanaka; Hitoshi Takebayashi; Tetsuro Tojo; Atsuhisa Mimoto
- Web page: https://patentgrep.com/patent/US7608235B2

## CPC

- C25B 1/245: Fluorine; Compounds thereof
- C25B 11/044: Impregnation of carbon
- C25B: ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR (anodic or cathodic protection C23F13/00; single-crystal growth C30B)

## Abstract

A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 μm or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.

## Claims

### Claim 1

A carbon electrode for producing gaseous nitrogen trifluoride, comprising
a carbonaceous material, and
at least one metal fluoride selected from the group consisting of magnesium fluoride and aluminum fluoride, wherein
the carbon electrode has a dense structure comprising an average pore size of 0.5 μm or less,
the at least one metal fluoride is contained in the structure of the carbon electrode,
a melting point of the selected metal fluoride is not lower than a baking temperature of the carbonaceous material, and
a content of the selected metal fluoride is 3 to 10 wt %.

### Claim 2 (depends on 1)

The carbon electrode for producing gaseous nitrogen trifluoride according to claim 1 prepared by a method comprising cold isostatic press compacting and baking at a temperature of 800 to 1000° C.