# US 7,608,196 B2 · Method of forming high aspect ratio apertures

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- Number: US 7,608,196 B2
- Document ID: US7608196B2
- Status: Granted
- Kind: B2
- Application number: 11/638,955
- Filed: 2006-12-14
- Published: 2007-04-19
- Granted: 2009-10-27
- Earliest claimed: 1998-04-24
- Assignees: Micron Technology, Inc.
- Inventors: Kevin G. Donohoe; David S. Becker
- Web page: https://patentgrep.com/patent/US7608196B2

## CPC

- H10P 50/283: {by chemical means}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A plasma etch process for etching a dielectric material employing two primary etchants at low flows and pressures, and a relatively low temperature environment within the etch chamber. The two primary etchant gases are CHF3 and CH2F2, delivered at flow rates on the order of between about 10 sccm and 40 sccm for CHF3 and between about 10 sccm and 40 sccm for CH2F2. Small quantities, on the order of 10 sccm or less, of other gases such as C2HF5 and CF4 may be added.

## Claims

### Claim 1

A method for plasma etching a dielectric material, comprising:
applying a mask over a dielectric material so as to leave at least one aperture in the mask through which a surface of the dielectric material is exposed;
disposing a wafer comprising the dielectric material and the mask in a plasma etch chamber, the plasma etch chamber having a roof over the wafer, a ring around the wafer, and a chuck supporting the wafer;
maintaining the roof at a temperature between about 115° C. and about 150° C.;
maintaining the ring at a temperature between about 200° C. and about 250° C.;
maintaining the chuck at a temperature between about −10° C. and 30° C.; and
generating a gas plasma into an area proximate the at least one aperture, the gas plasma consisting of CHF3 and CH2F2 and none or at least one of argon, C2HF5, and CF4.

### Claim 2 (depends on 1)

The method of claim 1, wherein disposing a wafer comprising the dielectric material and the mask comprises providing a wafer having the dielectric material formed on a semiconductor substrate.

### Claim 3 (depends on 1)

The method of claim 1, wherein maintaining the roof at a temperature between about 115° C. and about 150° C. comprises maintaining the roof at a temperature of about 140° C.

### Claim 4 (depends on 1)

The method of claim 1, wherein maintaining the ring at a temperature between about 200° C. and about 250° C. comprises maintaining the ring at a temperature of about 200° C.

### Claim 5 (depends on 1)

The method of claim 1, wherein maintaining the chuck at a temperature between about −10° C. and 30° C. comprises maintaining the chuck at a temperature of about −10° C.

### Claim 6 (depends on 1)

The method of claim 1, further comprising maintaining a pressure in the plasma etch chamber of at least about 0.67 Newton per square meter (5 mTorr).

### Claim 7 (depends on 1)

The method of claim 1, further comprising maintaining a pressure in the plasma etch chamber at between about 2.67 Newtons per square meter (20 mTorr) and 8.7 Newtons per square meter (65 mTorr).

### Claim 8 (depends on 1)

The method of claim 1, further comprising maintaining a source power in the plasma etch chamber at between about 750 watts and 2000 watts.

### Claim 9 (depends on 1)

The method of claim 1, further comprising maintaining a source power in the plasma etch chamber at between about 600 watts and 1000 watts.

### Claim 10 (depends on 1)

The method of claim 1, wherein generating a gas plasma into an area proximate the at least one aperture comprises introducing CHF3 into the plasma etch chamber at a flow rate of between about 10 sccm and 40 sccm and introducing CH2F2 into the plasma etch chamber at a flow rate of between about 10 sccm and 40 sccm.

### Claim 11 (depends on 10)

The method of claim 10, further comprising introducing argon gas into the plasma etch chamber at a flow rate of up to about 100 sccm.

### Claim 12 (depends on 1)

The method of claim 1, further comprising reducing the flow of CH2F2 proximate the at least one aperture to zero sccm.

### Claim 13 (depends on 1)

The method of claim 1, further comprising maintaining the area proximate the at least one aperture at a temperature of about 150° C. or below.

### Claim 14 (depends on 1)

The method of claim 1, wherein generating a gas plasma into an area proximate the at least one aperture comprises introducing CHF3 into the plasma etch chamber at a flow rate of between about 10 sccm and 40 sccm, introducing CH2F2 into the plasma etch chamber at a flow rate of between about 10 sccm and 40 sccm, introducing C2HF5 into the plasma etch chamber at a flow rate of 10 sccm or less, and introducing CF4 into the plasma etch chamber at a flow rate of 10 sccm or less.