# US 7,608,150 B2 · Coating apparatus and operating method thereof

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- Number: US 7,608,150 B2
- Document ID: US7608150B2
- Status: Granted
- Kind: B2
- Application number: 11/453,869
- Filed: 2006-06-16
- Published: 2007-01-25
- Granted: 2009-10-27
- Earliest claimed: 2005-06-30
- Assignees: LG Display Co., Ltd.
- Inventors: Jeong Kweon Park; Seung Bum Lee; Sang Hyoung Jin
- Web page: https://patentgrep.com/patent/US7608150B2

## CPC

- B05C 5/0254: {Coating heads with slot-shaped outlet (B05C5/0283 takes precedence)}
- B05B 12/12: responsive to conditions of ambient medium or target, e.g. humidity, temperature {position or movement of the target relative to the spray apparatus (B05B12/082, B05B12/084 take precedence)}
- B05B 12/124: {responsive to distance between spray apparatus and target}
- B05B 15/14: Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts
- B05B 15/16: for preventing non-intended contact between spray heads or nozzles and foreign bodies, e.g. nozzle guards
- B05B 15/50: Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05C 5/0208: {for applying liquid or other fluent material to separate articles (B05C5/0204 takes precedence)}
- B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08)
- B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D)

## Abstract

A coating apparatus and an operating method thereof that prevent damage to the nozzle of a spinless coater from impurities on a substrate during resin coating of the substrate, and impurities remaining on a stage at the bottom of the substrate. The coating apparatus comprises a stage, a nozzle, a nozzle cleaner, and a stage cleaner. A substrate is placed upon the stage. The nozzle discharges resin on the substrate to perform coating. The nozzle cleaner cleans the nozzle. The stage cleaner cleans the stage. The operating method includes removing a coated first substrate from atop a stage, cleaning the stage using a stage cleaner, introducing a second substrate to be coated onto the cleaned stage, and discharging resin through a nozzle onto the second substrate and coating the second substrate.

## Claims

### Claim 1

A coating apparatus comprising:
a stage on which a substrate is placed;
a nozzle for discharging resin on said substrate to perform coating;
a nozzle cleaner for cleaning said nozzle;
a stage cleaner for cleaning said stage;
at least a tracking sensor for detecting a moving path of the nozzle and whether the nozzle deviates from above the substrate; and
a scanner provided near a front end of the nozzle, for scanning an upper region of the substrate along a moving direction of the nozzle to determine the presence of impurities,
wherein the scanner protrudes from a front surface of the nozzle and has a length about equal to a length of the nozzle.

### Claim 2 (depends on 1)

The coating apparatus according to claim 1, wherein the stage cleaner includes a contacting member for contacting the stage, a CDA (clean dry air) discharger for discharging CDA, and a suctioning portion for suctioning impurities on the stage.

### Claim 3 (depends on 2)

The coating apparatus according to claim 2, wherein the contacting member is formed of a polymer.

### Claim 4 (depends on 1)

The coating apparatus according to claim 1, wherein the stage includes small apertures substantially in a grid pattern thereon for vacuum suctioning.

### Claim 5 (depends on 4)

The coating apparatus of claim 4, wherein the stage further includes a lift pin for support or removal of a coated substrate.

### Claim 6 (depends on 1)

The coating apparatus according to claim 1, wherein the tracking sensor measures a gap between the nozzle and the substrate to determine whether the nozzle deviates from above the substrate.