# US 7,607,786 B2 · Light deflector, light deflection array, optical system, image forming device, and projection type image display apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,607,786 B2 - Document ID: US7607786B2 - Status: Granted - Kind: B2 - Application number: 11/406,372 - Filed: 2006-04-19 - Published: 2006-10-26 - Granted: 2009-10-27 - Earliest claimed: 2005-04-20 - Assignees: Ricoh Company, Ltd. - Inventors: Takeshi Nanjyo; Seiichi Katoh; Koichi Ohtaka - Web page: https://patentgrep.com/patent/US7607786B2 ## CPC - H04N 5/7441: {the modulator being an array of liquid crystal cells} - G02B 26/0841: {the reflecting element being moved or deformed by electrostatic means} - H04N 9/3105: {for displaying all colours simultaneously, e.g. by using two or more electronic spatial light modulators (simultaneous projection in colour photography G03B33/10; beam splitting or combining systems per se G02B27/10)} - G03B 21/008: {using micromirror devices} - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D) ## Abstract A light deflector includes a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member and the stopper, the plate-shaped member having a light reflection area, no fixed end, and a conductive layer; and a plurality of electrodes provided on the substrate, the electrodes facing the conductive layer of the plate-shaped member. ## Claims ### Claim 1 A light deflector, comprising: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element. ### Claim 2 (depends on 1) The light deflector as claimed in claim 1, wherein the fulcrum member includes an upper layer and a lower layer, and the upper layer and not the lower layer of the fulcrum member is made of a main ingredient which is a high melting point metal element. ### Claim 3 (depends on 1) The light deflector as claimed in claim 1, wherein the layer whose main ingredient is the high melting point metal element is made of tungsten. ### Claim 4 (depends on 1) The light deflector as claimed in claim 1, wherein the layer whose main ingredient is the high melting point metal element is made of a titanium nitride film. ### Claim 5 A light deflection array wherein a plurality of light deflectors is arranged in one dimension or two dimensions, the light deflector comprising: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element. ### Claim 6 An optical system, comprising: a light deflection array; a light source configured to light the light deflection array; and a projection lens configured to project a reflection light from the light deflection array as corresponding to color information; wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions, the light deflector including: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element. ### Claim 7 A projection type image display apparatus using an optical system as a projection optical system, the optical system comprising: a light deflection array; a light source configured to light the light deflection array; and a projection lens configured to project a reflection light from the light deflection array as corresponding to color information; wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions, the light deflector including: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element. ### Claim 8 A projection type image display apparatus using an optical system as a optical writing unit, the optical system comprising: a light deflection array; a light source configured to light the light deflection array; and a projection lens configured to project a reflection light from the light deflection array as corresponding to color information; wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions, the light deflector including: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the substrate includes a contact part formed thereon which contacts the plate-shaped member, the contact part including an upper layer and a lower layer, and the upper layer and not the lower layer is made of a main ingredient which is a high melting point metal element. ### Claim 9 A light deflector, comprising: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element. ### Claim 10 (depends on 9) The light deflector as claimed in claim 9, wherein the layer whose main ingredient is the high melting point metal element is made of tungsten. ### Claim 11 (depends on 9) The light deflector as claimed in claim 9, wherein the layer whose main ingredient is the high melting point metal element is made of a titanium nitride film. ### Claim 12 A light deflection array wherein a plurality of light deflectors is arranged in one dimension or two dimensions, the light deflector comprising: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element. ### Claim 13 An optical system, comprising: a light deflection array; a light source configured to light the light deflection array; and a projection lens configured to project a reflection light from the light deflection array as corresponding to color information; wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions, the light deflector including: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate-shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element. ### Claim 14 A projection type image display apparatus using an optical system as a projection optical system, the optical system comprising: a light deflection array; a light source configured to light the light deflection array; and a projection lens configured to project a reflection light from the light deflection array as corresponding to color information; wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions, the light deflector including: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element. ### Claim 15 A projection type image display apparatus using an optical system as a optical writing unit, the optical system comprising: a light deflection array; a light source configured to light the light deflection array; and a projection lens configured to project a reflection light from the light deflection array as corresponding to color information, wherein the light deflection array has a plurality of light deflectors which light deflectors are arranged in one dimension or two dimensions, the light deflector including: a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member, and the stoppers, the plate-shaped member having a light reflection area and no fixed end; and a plurality of electrodes provided on the substrate, the electrodes facing the plate shaped member; wherein the plate-shaped member is tilted and displaced by an electrostatic attraction force in a state where the fulcrum member is a center, so that a reflection direction of a light flux incident on the light reflection area is changed and thereby light deflection is performed; and wherein the plate-shaped member includes an upper layer and a lower layer, the lower layer contacting a contact part of the substrate, and the lower layer and not the upper layer is made of a main ingredient which is a high melting point metal element.