# US 7,607,761 B2 · Droplet discharging head and manufacturing method for the same, and droplet discharging device

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- Number: US 7,607,761 B2
- Document ID: US7607761B2
- Status: Granted
- Kind: B2
- Application number: 11/444,678
- Filed: 2006-06-01
- Published: 2007-06-28
- Granted: 2009-10-27
- Earliest claimed: 2005-12-27
- Assignees: Fuji Xerox Co., Ltd.
- Inventors: Kumiko Tanaka; Michiaki Murata
- Web page: https://patentgrep.com/patent/US7607761B2

## CPC

- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1628: {dry etching}
- B41J 2/1629: {wet etching}
- B41J 2/1631: {photolithography}
- B41J 2/1632: {machining}
- B41J 2/1642: {thin film formation by CVD [chemical vapor deposition]}
- B41J 2/1646: {thin film formation by sputtering}
- B41J 2002/14241: {having a cover around the piezoelectric thin film element}
- B41J 2002/14491: {Electrical connection}
- B41J 2202/18: Electrical connection established using vias
- B41J 2202/20: Modules
- B41J 2202/21: Line printing
- Y10T 29/42: Piezoelectric device making
- Y10T 29/49126: Assembling bases
- Y10T 29/49128: Assembling formed circuit to base
- Y10T 29/4913: Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T 29/49165: by forming conductive walled aperture in base
- Y10T 29/49401: Fluid pattern dispersing device making, e.g., ink jet
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A droplet discharging head comprises a pressure chamber in which fluid is filled through a channel, and a nozzle that is connected to the pressure chamber and which discharges the fluid as a droplet. After the droplet discharging head is assembled, at least the wall surfaces contacting the fluid are coated with a carbonized silicon film.

## Claims

### Claim 1

A droplet discharging head comprising:
a pressure chamber in which fluid is filled through a channel; and
a nozzle that is connected to the pressure chamber and which discharges the fluid as a droplet,
wherein a wall surface of the droplet discharging device that contacts the fluid is coated with a carbonized silicon film, and a thin organic film is provided between the wall surface and the carbonized silicon film.

### Claim 2

A droplet discharging head comprising:
a pressure chamber in which fluid is filled through a channel; and
a nozzle that is connected to the pressure chamber and which discharges the fluid as a droplet,
wherein at least a wall surface of the droplet discharging device that contacts the fluid is coated with a carbonized silicon film, and a thin organic film is provided between the wall surface and the carbonized silicon film.

### Claim 3

A droplet discharging head comprising:
a pressure chamber in which fluid is filled through a channel;
a nozzle that is connected to the pressure chamber and which discharges the fluid as a droplet;
a vibration plate that comprises a portion of the pressure chamber; and
a piezoelectric element that displaces the vibration plate,
wherein a wall surface of the droplet discharging device that contacts the fluid is coated with a carbonized silicon film, and a thin organic film is provided between the wall surface and the carbonized silicon film.