# US 7,607,543 B2 · Reticle pod with isolation system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,607,543 B2 - Document ID: US7607543B2 - Status: Granted - Kind: B2 - Application number: 11/364,562 - Filed: 2006-02-26 - Published: 2006-11-23 - Granted: 2009-10-27 - Earliest claimed: 2005-02-27 - Assignees: Entegris, Inc. - Inventors: Barry Gregerson; David Halbmaier; Stephen Sumner; Brian Wiseman; Anthony Mathius Tieben; Justin Strike - Web page: https://patentgrep.com/patent/US7607543B2 ## CPC - H10P 72/1902: {specially adapted for a single substrate} - G03F 1/66: Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof - G03F 7/70741: {Handling masks outside exposure position, e.g. reticle libraries} - H10P 72/1906: {specially adapted for containing masks, reticles or pellicles} - H10P 72/1912: {characterised by shock absorbing elements, e.g. retainers or cushions} - H10P 72/1916: {characterised by sealing arrangements} - H10P 72/1922: {characterised by the construction of the closed carrier} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated. ## Claims ### Claim 1 Apparatus for supporting a substrate to provide shock and vibration isolation, the apparatus comprising: a primary pod including a cover configured with a concave inner surface and a base, the cover adapted to removably engage the base to define a first sealed enclosure between the concave surface and the base, the base having an interior with a latch mechanism contained therein; a secondary pod comprising a lower portion and an upper portion, the upper portion adapted to engage the lower portion to define a second enclosure for containing the substrate, the lower portion comprising support structure to hold the substrate thereupon and the upper portion comprising retaining structure for retaining the substrate when the upper portion is engaged with the lower portion; a plurality of resilient couplings extending upwardly from the base of the primary pod to the lower portion of the secondary pod and an additional plurality of resilient couplings extending downwardly from the cover to the upper portion providing a primary position of the secondary pod, including both the lower portion and the upper portion, with respect to the primary pod, the secondary pod, including both the lower portion and the upper portion, returnably moveable from the primary position by shock or vibrations, the plurality of resilient couplings extending upwardly from the base providing resilient support of the lower portion and the additional plurality of resilient couplings extending downwardly from the cover providing resilient support of the upper portion, the plurality of resilient couplings and the additional plurality of resilient couplings exclusively supporting the secondary pod, including both the lower portion and the upper portion and providing a plurality of degrees of freedom of movement to the secondary pod, including both the lower portion and the upper portion with respect to the primary pod. ### Claim 2 (depends on 1) The apparatus of claim 1 wherein the resilient coupling provides six degrees of freedom of movement in the displacement of the secondary pod, including the lower portion and the upper portion from its primary position. ### Claim 3 (depends on 1) The apparatus of claim 1 further comprising a plurality of resilient posts extending between the primary pod and the secondary pod. ### Claim 4 (depends on 2) The apparatus of claim 2 wherein the secondary pod has four corners and the plurality of resilient couplings extend vertically between the secondary pod and the primary pod at each of the four corners. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein each of the resilient couplings has a first end and a second end and has openings at each of said ends and wherein each of the resilient couplings connect to both the primary pod and secondary pod by way of a plurality of projections extending from said primary and secondary pods, the projections received in the openings at said ends. ### Claim 6 (depends on 1) The apparatus of claim 1 wherein the lower portion of the secondary pod has a substantially square profile with four corners and has a four sides extending between the corners, each side having an arcuate shape presenting a concavity to the reticle when said reticle is supported in the lower portion. ### Claim 7 (depends on 1) The apparatus of claim 1 wherein the lower portion of the secondary pod has a top side and a bottom side, said lower portion has a substantially square profile with four corners with each of the corners having a gusset formed on the bottom side extending inwardly toward an opposite corner. ### Claim 8 (depends on 6) The apparatus of claim 6 wherein the lower portion of the secondary pod has a top side and a bottom side, said lower portion has a substantially square profile with four corners with each of the corners having a gusset formed on the bottom side extending inwardly toward an opposite corner. ### Claim 9 (depends on 7) The apparatus of claim 7 wherein the upper portion of the secondary pod has a top side and a bottom side, said upper portion having a substantially square profile with four corners with each of the corners having a radially extending gusset on the top side of said upper portion. ### Claim 10 (depends on 9) The apparatus of claim 9 wherein each gusset of the upper portion has a raised central portion with a pair of side walls that extend downwardly from the raised portion, and each gusset of the lower portion has a lowered portion extending downwardly with a pair of sidewalls. ### Claim 11 (depends on 1) The apparatus of claim 1 wherein the base of the primary pod has an upwardly facing surface with an outer edge, the upwardly facing surface having a groove therein extending along the edge portion, the apparatus further comprising an elastomeric seal configured in a loop positioned in the groove, and wherein the cover has an engagement projection for engaging with the elastomeric seal wherein said seal and said engagement projection provide a continuous engagement providing a sealing engagement between the cover and base. ### Claim 12 (depends on 11) The apparatus of claim 11 wherein the seal is compressed between the cover and base and wherein the cover is latched to the base the cover moveable vertically on the base a distance of at least 0.10 inches. ### Claim 13 (depends on 1) The apparatus of claim 1 wherein the base portion comprises four corner guides. ### Claim 14 Apparatus for supporting a substrate to provide shock and vibration isolation, the apparatus comprising: a pod including a cover and a base, the cover configured with a concave inner surface and adapted to removably engage the base to define a sealed enclosure between the concave surface and the base, the base having an interior with a latch mechanism contained therein, the base further having an upwardly facing surface with an outer edge portion and having a groove therein extending along the outer edge portion, the apparatus further comprising an elastomeric seal configured in a loop positioned in the groove, and wherein the seal has a top surface with two cantilevered portions and a middle portion, and wherein the top cover has an outer periphery with three engagement ribs extending around the outer periphery, and wherein the three engagement ribs engage the two cantilevered portions and the middle portion providing a continuous engagement providing a sealing engagement between the cover and base. ### Claim 15 Container for supporting a reticle to provide shock and vibration isolation, the container comprising: a primary pod including a cover and a door latchable to the cover, a secondary pod comprising a lower portion and an upper portion, the upper portion adapted to engage the lower portion to define a second enclosure for containing the reticle, the lower portion comprising support structure to hold a substrate thereupon and the upper portion comprising retaining structure for retaining the substrate when the upper portion is engaged with the lower portion; a plurality of resilient couplings extending upwardly from the door of the primary pod to the lower portion of the secondary pod and an additional plurality of resilient couplings extending downwardly from the cover of the primary pod to the upper portion of the secondary pod, whereby the plurality of resilient couplings extending upwardly and the additional plurality extending downwardly provide exclusive resilient support of the secondary pod, including the lower portion and the upper portion. ### Claim 16 (depends on 15) The container of claim 15 wherein the secondary pod has four corners and the plurality of resilient couplings extend vertically between the secondary pod and the primary pod at each of the four corners. ### Claim 17 (depends on 15) The container of claim 15, wherein each of the resilient couplings has a first end and a second end and has openings at each of said ends and wherein each of the resilient couplings connect to both the primary pod and secondary pod by way of a plurality of projections extending from said primary and secondary pods, the projections received in the openings at said ends. ### Claim 18 (depends on 15) The container of claim 15 wherein the lower portion of the secondary pod has a substantially square profile with four corners and has a four sides extending between the corners, each side having an arcuate shape presenting a concavity to the reticle when said reticle is supported in the lower portion. ### Claim 19 (depends on 15) The container of claim 15 wherein the upper portion and lower portion of the secondary pod have a gap extending from exterior of the secondary pod to interior of the secondary pod. ### Claim 20 (depends on 15) The container of claim 15 wherein the resilient couplings are formed from a thermoplastic elastomer.